JPH017722Y2 - - Google Patents
Info
- Publication number
- JPH017722Y2 JPH017722Y2 JP15997282U JP15997282U JPH017722Y2 JP H017722 Y2 JPH017722 Y2 JP H017722Y2 JP 15997282 U JP15997282 U JP 15997282U JP 15997282 U JP15997282 U JP 15997282U JP H017722 Y2 JPH017722 Y2 JP H017722Y2
- Authority
- JP
- Japan
- Prior art keywords
- pipe
- diameter portion
- rotary
- fixed
- hole
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000006243 chemical reaction Methods 0.000 claims description 14
- 239000002994 raw material Substances 0.000 claims description 10
- 238000007789 sealing Methods 0.000 claims description 10
- 238000000926 separation method Methods 0.000 claims description 8
- 238000005229 chemical vapour deposition Methods 0.000 claims description 5
- 238000007865 diluting Methods 0.000 claims description 2
- 230000001590 oxidative effect Effects 0.000 claims description 2
- 239000007789 gas Substances 0.000 description 25
- 239000007787 solid Substances 0.000 description 3
- 239000011521 glass Substances 0.000 description 2
- 150000004679 hydroxides Chemical class 0.000 description 2
- 239000000843 powder Substances 0.000 description 2
- 239000010453 quartz Substances 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 229910003902 SiCl 4 Inorganic materials 0.000 description 1
- -1 and as a result Substances 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 150000002366 halogen compounds Chemical class 0.000 description 1
- 230000007062 hydrolysis Effects 0.000 description 1
- 238000006460 hydrolysis reaction Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- RLOWWWKZYUNIDI-UHFFFAOYSA-N phosphinic chloride Chemical compound ClP=O RLOWWWKZYUNIDI-UHFFFAOYSA-N 0.000 description 1
- 239000011148 porous material Substances 0.000 description 1
Landscapes
- Chemical Vapour Deposition (AREA)
- Joints Allowing Movement (AREA)
- Surface Treatment Of Glass (AREA)
Description
【考案の詳細な説明】
本考案は石英管等の反応管と、反応管内に気孔
原料を供給するための気相系配管とを連結するた
めの内付けCVD法用ロータリージヨイントに関
する。[Detailed Description of the Invention] The present invention relates to an internal CVD rotary joint for connecting a reaction tube such as a quartz tube and a gas phase pipe for supplying pore material into the reaction tube.
内付けCVD法では、第１図に示すようにガラ
ス旋盤のチヤツク１に石英管等の反応管２を回転
自在に保持させ、これを回転させつつその内部に
気相系配管３から気相原料を供給し、反応管２内
で同原料を酸化させてその内周壁にガラス粉末を
堆積させ、バーナ４により同粉末を加熱してガラ
ス化させることにより母材を作製している。 In the internal CVD method, as shown in Fig. 1, a reaction tube 2 such as a quartz tube is rotatably held in a chuck 1 of a glass lathe, and while the reaction tube 2 is rotated, a gas phase raw material is introduced into the tube from a gas phase pipe 3. is supplied, the raw material is oxidized in the reaction tube 2, glass powder is deposited on the inner circumferential wall of the raw material, and the powder is heated and vitrified by the burner 4, thereby producing the base material.
ところでかかる内付けCVD法では、固定した
気相系配管３を回転する反応管２とをロータリー
ジヨイント５を介して連結している。 By the way, in such an internal CVD method, a fixed gas phase pipe 3 is connected to a rotating reaction tube 2 via a rotary joint 5.
従来この種のロータリージヨイントとしては、
第２図に示すような球面ジヨイントが使用されて
いる。 Conventionally, this type of rotary joint is
A spherical joint as shown in FIG. 2 is used.
つまり反応管２に連結される固定パイプ６の先
端に設けた凸状の球面部６ａを、気相系配管３に
連結される回転パイプ７の先端に設けた凹状の球
面部７ａに回転自在に嵌合することにより反応管
２と気相系配管３とを連結したものである。 In other words, the convex spherical part 6a provided at the tip of the fixed pipe 6 connected to the reaction tube 2 is rotatably connected to the concave spherical part 7a provided at the tip of the rotating pipe 7 connected to the gas phase pipe 3. The reaction tube 2 and the gas phase pipe 3 are connected by fitting together.
同ジヨイントでは、球面部６ａ，７ａの嵌合面
を研磨することにより、気相原料の漏洩を極力防
止するようにしているが、それにもかかわらず気
密性が不十分になりがちで、しばしば気相原料の
漏洩が生じることがあつた。 In this joint, the fitting surfaces of the spherical parts 6a and 7a are polished to prevent leakage of the gas phase raw material as much as possible, but the airtightness tends to be insufficient despite this, and often Leakage of phase raw materials sometimes occurred.
そこでかかる対策としては第３図に示すような
ジヨイントが提案されている。 Therefore, as a countermeasure against this problem, a joint as shown in FIG. 3 has been proposed.
同ジヨイントは同図に示すように気相系配管３
に連結される固定パイプ１０の先端部には、その
内径が他の部分のそれより大になつた径大部１０
が形成されており、この径大部１０ａと径小部１
０ｂとの境界部には、内径の差に基づく段差部１
０ｃが形成されている。 The joint is connected to gas phase pipe 3 as shown in the figure.
At the distal end of the fixed pipe 10, which is connected to the
is formed, and the large diameter portion 10a and the small diameter portion 1
At the boundary with 0b, there is a stepped portion 1 based on the difference in inner diameter.
0c is formed.
他方、反応管２に連結される回転パイプ１１の
長手方向中間における外周には環状突起１２が形
成されており、同パイプ１１の基端部、即ち同パ
イプ１１の端面１１ａと環状突起１２との間の部
分は上記固定パイプ１０の径大部１０ａ内に挿入
されており、回転パイプ１１の先端側方向を向く
環状突起１２の内側端面１２ａは固定パイプ１０
の端面に接当していると共に回転パイプ１１の基
端面は上記段差部１０ｃに接当している。 On the other hand, an annular protrusion 12 is formed on the outer periphery of the rotating pipe 11 connected to the reaction tube 2 at the middle in the longitudinal direction. The part between is inserted into the large diameter part 10a of the fixed pipe 10, and the inner end surface 12a of the annular projection 12 facing toward the distal end of the rotating pipe 11 is inserted into the large diameter part 10a of the fixed pipe 10.
The proximal end surface of the rotary pipe 11 is in contact with the stepped portion 10c.
さらに径大部１０ａと回転パイプ１１との間隙
には、１対のＯ−リングによるシール部材１３
ａ，１３ｂが設けられており、これらシール部材
１３ａ，１３ｂは径大部１０ａの内周面と回転パ
イプ１１の外周面との両周面に摺接し得るように
なつている。 Further, in the gap between the large diameter portion 10a and the rotary pipe 11, a sealing member 13 formed of a pair of O-rings is provided.
a, 13b are provided, and these seal members 13a, 13b are adapted to be able to come into sliding contact with both the inner circumferential surface of the large diameter portion 10a and the outer circumferential surface of the rotary pipe 11.
さらに回転パイプ１１の基端側には連結部Ａが
取り付けられている。 Further, a connecting portion A is attached to the base end side of the rotary pipe 11.
同連結部Ａは、環状突起１２を介して回転パイ
プ１１に連結力を付与するキヤツプナツト１４を
備えており、キヤツプナツト１４に形成された透
孔１４ａの内径は環状突起１２の外径より小さく
かつ回転パイプ１１の外径と同等かまたはそれよ
りも大になつている。 The connecting portion A includes a cap nut 14 that applies a connecting force to the rotary pipe 11 via the annular projection 12, and the inner diameter of the through hole 14a formed in the cap nut 14 is smaller than the outer diameter of the annular projection 12, and the rotation It is equal to or larger than the outer diameter of the pipe 11.
このキヤツプナツト１４を回転パイプ１１に取
り付けるには、透孔１４ａに同パイプ１１の基端
側を挿入し、同ナツト１４の取付け部１４ｂ内周
に形成されたネジ部１４ｃを固定パイプ１０の外
周に形成されたネジ部１０ｄに螺合させ、透孔１
４ａを有する天井面が環状突起１２の外側端面１
２ｂに接面するまで同ナツト１４を回転すればよ
い。 To attach the cap nut 14 to the rotary pipe 11, insert the base end of the pipe 11 into the through hole 14a, and thread the threaded portion 14c formed on the inner periphery of the mounting portion 14b of the nut 14 onto the outer periphery of the fixed pipe 10. The through hole 1 is screwed into the formed threaded portion 10d.
4a is the outer end surface 1 of the annular projection 12.
The nut 14 may be rotated until it comes into contact with the nut 2b.
しかしかかるロータリージヨイントにおいても
気密性が不充分であり、僅かでも漏洩が生じる
と、気相原料として用いるSiCl4，GeCl4，POCl3
等のハロゲン化合物ガスに加水分解が生じ、この
結果酸化物、水酸化物等の固体が生成されること
になる。 However, even in such a rotary joint, the airtightness is insufficient, and if even a slight leak occurs, SiCl 4 , GeCl 4 , POCl 3 used as gas phase raw materials
Hydrolysis occurs in halogen compound gases such as, and as a result, solids such as oxides and hydroxides are produced.
この固体がシール部材１３ａ，１３ｂに付着す
ることにより、気密性がますます不充分になると
いう問題があつた。 When this solid adheres to the sealing members 13a and 13b, there is a problem in that the airtightness becomes increasingly insufficient.
本考案は気相原料の漏洩通路に外部から所定の
ガスを導入し、気相原料がシール部材に到達する
ことを防止することによつて上記問題点を解決し
ようというもので、これを図面に示す実施例を参
照しながら説明すると、第４図に示すように、固
定パイプ２０の先端部には、他の部分よりも内径
が大にされた径大部２１が設けられており、この
径大部２１と径小部２２との境界における段差部
２３には、同パイプ２０の径小部２２と連通する
分離パイプ２４が固着されている。 The present invention aims to solve the above problem by introducing a specified gas from the outside into the leakage path of the gas phase raw material to prevent the gas phase raw material from reaching the sealing member, and this is shown in the drawing. To explain this with reference to the embodiment shown, as shown in FIG. A separation pipe 24 that communicates with the small diameter portion 22 of the pipe 20 is fixed to a stepped portion 23 at the boundary between the large portion 21 and the small diameter portion 22 .
この分離パイプ２４は径大部２１の内周面から
所定の間隙をおいてかつ径大部２１と同心円状に
配置されている。 The separation pipe 24 is arranged concentrically with the large-diameter portion 21 at a predetermined gap from the inner circumferential surface of the large-diameter portion 21 .
径大部２１と分離パイプ２４とによつて固定さ
れた環状間隙には、回転パイプ２５の基端部が挿
入されており、さらに径大部２１と回転パイプ２
５との間隙には、径大部２１の内周面と回転パイ
プ２５の外周面に摺接自在なＯ−リングによるシ
ール部材２６ａ，２６ｂが設けられている。 The proximal end of the rotary pipe 25 is inserted into the annular gap fixed by the large-diameter portion 21 and the separation pipe 24, and the large-diameter portion 21 and the rotary pipe 2
Seal members 26a and 26b, which are O-rings that can slide on the inner circumferential surface of the large-diameter portion 21 and the outer circumferential surface of the rotary pipe 25, are provided in the gap between the rotary pipe 25 and the rotary pipe 25.
さらに径大部２１には、酸化ガスO2や希釈ガ
スAr等の所定のガスを導入するための通孔２７
が形成されており、同通孔２７はシール部材２６
ａと段差部２３との間に開口している。 Further, the large diameter portion 21 has a through hole 27 for introducing a predetermined gas such as oxidizing gas O 2 or diluting gas Ar.
is formed, and the through hole 27 is connected to the seal member 26.
It opens between a and the stepped portion 23.
回転パイプ２５の基端面２５ａは段差部２３と
通孔２７との間に位置していることが好ましくか
つ通孔２７を越える部分の長さl1はできるだけ長
い方が有効であり、また回転パイプ２５の基端面
２５ａと分離パイプ２４の先端面２４ａとの直線
距離l2もまたできるだけ長い方が有効である。 It is preferable that the base end surface 25a of the rotary pipe 25 is located between the stepped portion 23 and the through hole 27, and it is effective that the length l1 of the portion beyond the through hole 27 is as long as possible. It is also effective that the straight distance l 2 between the proximal end surface 25a of the pipe 25 and the distal end surface 24a of the separation pipe 24 be as long as possible.
さらに回転パイプ２５の先端部には可撓性を有
する可撓パイプ２８を取り付けることが好まし
く、同パイプ２８を設けることにより、反応管２
の中心軸とロータリージヨイントのそれとが多少
ずれていても両者の接続が難なく行なえる。 Further, it is preferable to attach a flexible pipe 28 to the tip of the rotary pipe 25, and by providing the flexible pipe 28, the reaction tube 2
Even if the center axis of the rotary joint is slightly misaligned with that of the rotary joint, the two can be connected without difficulty.
図中、Ａは固定パイプ２０と回転パイプ２５と
を連結するための連結部であり、かかる連結部Ａ
は上記従来例と同様の構成となつている。 In the figure, A is a connecting part for connecting the fixed pipe 20 and the rotating pipe 25, and this connecting part A
has the same structure as the above conventional example.
なお、上述した本考案では、つぎの理由により
固定パイプ２０を回転させ、回転パイプ２５を固
定（非回転）させる使用態様がとれない。 In addition, in the present invention described above, the fixed pipe 20 cannot be rotated and the rotary pipe 25 cannot be fixed (non-rotated) for the following reason.
すなわち、固定パイプ２０には所定のガスを供
給するための通孔２７が設けられており、その通
孔２７にはガスパイプ（図示せず）が接続される
が、このような状態において固定パイプ２０を回
転させた場合、周知のごとくガスパイプが捻れた
り、ロータリージヨイントに巻きついてパイプ破
壊が起こるからである。 That is, the fixed pipe 20 is provided with a through hole 27 for supplying a predetermined gas, and a gas pipe (not shown) is connected to the through hole 27. This is because, as is well known, when the gas pipe is rotated, the gas pipe may become twisted or become wrapped around the rotary joint, causing the pipe to break.
これは、配管接続の技術常識として自明の事項
である。 This is a matter that is self-evident as common technical knowledge regarding piping connections.
したがつて本考案の場合、一方のパイプ２０は
あくまでも固定（非回転）状態で使用することと
なり、必然的に他方のパイプ２５を回転させるこ
ととなる。 Therefore, in the case of the present invention, one pipe 20 is used in a fixed (non-rotating) state, and the other pipe 25 is inevitably rotated.
以上のように本考案においては、固定パイプの
先端部に径大部を設けると共に径小部と連通する
分離パイプを径大部と径小部との段差部に固着
し、該分離パイプと径大部とによつて固定される
環状間隙内に回転パイプの先端部を挿入すると共
に同パイプと径大部との間隙にその内外周に摺接
自在なシール部材を配置し、さらに所定のガスを
導入するための通孔を径大部に設け、同通孔を段
差部とシール部材との間に開口させてので、気相
原料のシール部材方向への流れは、通孔から導入
される所定のガスによつて防害を受け、反応管方
向へ押し戻されるため、シール部材へ達せず、し
たがつて酸化物、水酸化物等の固体はシール部材
に付着しないことになり、この結果シール部材は
清浄に保持され、気密性が長期間にわたつて保た
れることになる。 As described above, in the present invention, a large-diameter portion is provided at the tip of the fixed pipe, and a separation pipe that communicates with the small-diameter portion is fixed to the step between the large-diameter portion and the small-diameter portion, and the separation pipe and the diameter The tip of the rotary pipe is inserted into the annular gap fixed by the large diameter part, and a sealing member that can be slid into the inner and outer circumferences of the pipe is placed in the gap between the large diameter part and the large diameter part, and a predetermined gas A through hole for introducing gas is provided in the large diameter part, and the through hole is opened between the step part and the sealing member, so that the flow of the gas phase raw material toward the sealing member is introduced through the through hole. Since they are protected by the specified gas and pushed back toward the reaction tube, they do not reach the sealing member, and therefore solids such as oxides and hydroxides do not adhere to the sealing member, and as a result, the seal The member will be kept clean and airtight for a long period of time.
第１図は一般の内付けCVD法を示す模式図、
第２図及び第３図は従来のロータリージヨイント
を示す断面図、第４図は本考案に係るロータリー
ジヨイントの断面図である。
２……反応管、３……気相系配管、１２……環
状突起、２０……固定パイプ、２１……径大部、
２２……径小部、２３……段差部、２４……分離
パイプ、２５……回転パイプ、２６ａ，２６ｂ…
…シール部材、２７……通孔、Ａ……連結部。
Figure 1 is a schematic diagram showing the general internal CVD method.
2 and 3 are sectional views showing a conventional rotary joint, and FIG. 4 is a sectional view of a rotary joint according to the present invention. 2... Reaction tube, 3... Gas phase system piping, 12... Annular projection, 20... Fixed pipe, 21... Large diameter part,
22... Small diameter portion, 23... Step portion, 24... Separation pipe, 25... Rotating pipe, 26a, 26b...
... Seal member, 27 ... Through hole, A ... Connection part.
Claims (1)
転パイプと、該反応管内に気相原料を供給する
ための気相系配管に連結される固定パイプと、
当該両パイプを連結するための連結部とを有
し、該連結部は上記回転パイプの外周に設けら
れかつ上記固定パイプの先端面に接当自在な環
状突起と該固定パイプの外周に取り付け自在で
あつてかつ環状突起を介して上記回転パイプに
連結力を付与する取付け部とを備えた内付け
CVD法用ロータリージヨイントにおいて、上
記固定パイプの先端部に径大部を設けると共に
径小部と連通する分離パイプを該径大部と径小
部との段差部に固着し、該分離パイプと径大部
とによつて画定される環状間隙内に上記回転パ
イプの基端部を挿入すると共に該回転パイプと
径大部との間隙にその内外周に摺接自在なシー
ル部材を配置し、さらに酸化ガスあるいは希釈
ガス等の所定のガスを導入するための通孔を上
記固定パイプの径大部に設け、同通孔を上記段
差部とシール部材との間に開口させてなる内付
けCVD法用ロータリージヨイント。 (2) 回転パイプの先端面は段差部と通孔との間に
位置している実用新案登録請求の範囲第１項記
載の内付けCVD法用ロータリージヨイント。[Claims for Utility Model Registration] (1) A rotating pipe connected to a rotatably held reaction tube, and a fixed pipe connected to a gas phase system piping for supplying gas phase raw materials into the reaction tube. ,
a connecting portion for connecting the two pipes, the connecting portion being provided on the outer periphery of the rotary pipe and capable of freely coming into contact with the distal end surface of the fixed pipe; and the connecting portion being freely attachable to the outer periphery of the fixed pipe. and a mounting portion that applies a connecting force to the rotating pipe via an annular projection.
In the rotary joint for CVD method, a large-diameter portion is provided at the tip of the fixed pipe, and a separation pipe that communicates with the small-diameter portion is fixed to the step between the large-diameter portion and the small-diameter portion. Inserting the proximal end of the rotary pipe into an annular gap defined by the large-diameter portion, and arranging a sealing member slidable on the inner and outer peripheries of the rotary pipe and the large-diameter portion, Furthermore, a through hole for introducing a predetermined gas such as oxidizing gas or diluting gas is provided in the large diameter part of the fixed pipe, and the through hole is opened between the stepped part and the sealing member. Legal rotary joint. (2) The rotary joint for internal CVD method according to claim 1 of the utility model registration, wherein the end surface of the rotary pipe is located between the stepped portion and the through hole.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15997282U JPS5964967U (en) | 1982-10-22 | 1982-10-22 | Rotary joint for internal CVD method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15997282U JPS5964967U (en) | 1982-10-22 | 1982-10-22 | Rotary joint for internal CVD method |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5964967U JPS5964967U (en) | 1984-04-28 |
| JPH017722Y2 true JPH017722Y2 (en) | 1989-03-01 |
Family
ID=30351993
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15997282U Granted JPS5964967U (en) | 1982-10-22 | 1982-10-22 | Rotary joint for internal CVD method |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5964967U (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP6708521B2 (en) * | 2016-08-23 | 2020-06-10 | 月島機械株式会社 | Rotary joint |
-
1982
- 1982-10-22 JP JP15997282U patent/JPS5964967U/en active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5964967U (en) | 1984-04-28 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JPH0123021Y2 (en) | ||
| JPH0266390A (en) | Connector for pipe | |
| JPH017722Y2 (en) | ||
| EP0779957A4 (en) | Pipe joining construction | |
| JPH017723Y2 (en) | ||
| JP2000088157A (en) | Pipe body connection structure | |
| EP0390243A3 (en) | Mechanical face seals | |
| JPH05280682A (en) | Flexible plug-in one-touch connecting pipe coupling device | |
| JP2000074274A (en) | Pipe body connecting structure | |
| JPH0722553Y2 (en) | One Touch Connector | |
| JP2531340Y2 (en) | Pipe fittings | |
| JP2542043Y2 (en) | Joint | |
| JPH0750628Y2 (en) | Pipe fitting | |
| JPH025172Y2 (en) | ||
| JPH0727274A (en) | Tube joint structure of fluid equipment | |
| JP2782252B2 (en) | Pipe fittings | |
| JPH109469A (en) | Pipe connector | |
| JP2507100Y2 (en) | Pipe fitting | |
| JPS606713Y2 (en) | Metal pipe fitting device | |
| JPH0449151Y2 (en) | ||
| JPH038871Y2 (en) | ||
| JPH0341189Y2 (en) | ||
| JPH0217268Y2 (en) | ||
| JPH025173Y2 (en) | ||
| JPS59131022A (en) | Hollow rotary device |