JPH0176037U - - Google Patents

Info

Publication number

JPH0176037U

JPH0176037U JP1987172395U JP17239587U JPH0176037U JP H0176037 U JPH0176037 U JP H0176037U JP 1987172395 U JP1987172395 U JP 1987172395U JP 17239587 U JP17239587 U JP 17239587U JP H0176037 U JPH0176037 U JP H0176037U

Authority

JP

Japan

Prior art keywords

storage section

wafer storage

nozzle

wafer

wafers

Prior art date

1987-11-10

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 238000004140 cleaning Methods 0.000 claims description 8
• 238000001035 drying Methods 0.000 claims description 6
• XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 4
• 235000012431 wafers Nutrition 0.000 claims 10
• 238000009434 installation Methods 0.000 claims 1
• 239000007921 spray Substances 0.000 claims 1
• 238000005507 spraying Methods 0.000 claims 1
• 238000010586 diagram Methods 0.000 description 1
• 125000006850 spacer group Chemical group 0.000 description 1