JPH0176034U - - Google Patents

Info

Publication number
JPH0176034U
JPH0176034U JP1987172460U JP17246087U JPH0176034U JP H0176034 U JPH0176034 U JP H0176034U JP 1987172460 U JP1987172460 U JP 1987172460U JP 17246087 U JP17246087 U JP 17246087U JP H0176034 U JPH0176034 U JP H0176034U
Authority
JP
Japan
Prior art keywords
vacuum container
etching
sample
ion beam
ion source
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1987172460U
Other languages
English (en)
Japanese (ja)
Other versions
JPH087626Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1987172460U priority Critical patent/JPH087626Y2/ja
Publication of JPH0176034U publication Critical patent/JPH0176034U/ja
Application granted granted Critical
Publication of JPH087626Y2 publication Critical patent/JPH087626Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Drying Of Semiconductors (AREA)
JP1987172460U 1987-11-11 1987-11-11 エッチング装置 Expired - Lifetime JPH087626Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987172460U JPH087626Y2 (ja) 1987-11-11 1987-11-11 エッチング装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987172460U JPH087626Y2 (ja) 1987-11-11 1987-11-11 エッチング装置

Publications (2)

Publication Number Publication Date
JPH0176034U true JPH0176034U (US20100056889A1-20100304-C00004.png) 1989-05-23
JPH087626Y2 JPH087626Y2 (ja) 1996-03-04

Family

ID=31464431

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987172460U Expired - Lifetime JPH087626Y2 (ja) 1987-11-11 1987-11-11 エッチング装置

Country Status (1)

Country Link
JP (1) JPH087626Y2 (US20100056889A1-20100304-C00004.png)

Also Published As

Publication number Publication date
JPH087626Y2 (ja) 1996-03-04

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