JPH0175957U - - Google Patents

Info

Publication number
JPH0175957U
JPH0175957U JP1987171056U JP17105687U JPH0175957U JP H0175957 U JPH0175957 U JP H0175957U JP 1987171056 U JP1987171056 U JP 1987171056U JP 17105687 U JP17105687 U JP 17105687U JP H0175957 U JPH0175957 U JP H0175957U
Authority
JP
Japan
Prior art keywords
ion
rotating shaft
implantation device
support plate
ion implantation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1987171056U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1987171056U priority Critical patent/JPH0175957U/ja
Publication of JPH0175957U publication Critical patent/JPH0175957U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Electron Sources, Ion Sources (AREA)
JP1987171056U 1987-11-09 1987-11-09 Pending JPH0175957U (enrdf_load_html_response)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987171056U JPH0175957U (enrdf_load_html_response) 1987-11-09 1987-11-09

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987171056U JPH0175957U (enrdf_load_html_response) 1987-11-09 1987-11-09

Publications (1)

Publication Number Publication Date
JPH0175957U true JPH0175957U (enrdf_load_html_response) 1989-05-23

Family

ID=31462540

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987171056U Pending JPH0175957U (enrdf_load_html_response) 1987-11-09 1987-11-09

Country Status (1)

Country Link
JP (1) JPH0175957U (enrdf_load_html_response)

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