JPH0174568U - - Google Patents
Info
- Publication number
- JPH0174568U JPH0174568U JP1987169654U JP16965487U JPH0174568U JP H0174568 U JPH0174568 U JP H0174568U JP 1987169654 U JP1987169654 U JP 1987169654U JP 16965487 U JP16965487 U JP 16965487U JP H0174568 U JPH0174568 U JP H0174568U
- Authority
- JP
- Japan
- Prior art keywords
- laser beam
- laser
- electro
- crystal element
- optic crystal
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000013078 crystal Substances 0.000 claims description 4
- 238000001514 detection method Methods 0.000 claims description 4
- 238000010586 diagram Methods 0.000 description 1
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Measuring Instrument Details And Bridges, And Automatic Balancing Devices (AREA)
- Measurement Of Current Or Voltage (AREA)
Description
第１図は、本考案の表面電位分布検出装置の主
要部分の構成図、第２図は、従来例の主要部分の
断面図である。
１……レーザ発振器、２……ビームエクスパン
ダ、２ａ，２ｂ……ビームエクスパンダを構成す
るレンズ、３，１０……偏光板、４……ビームス
プリツタ、５……透明電極、６……電気光学結晶
素子、７……多層膜誘電体ミラー、８……被測定
物、９……波長板、１１……レンズ、１２……投
影板、１３……検出用電極、１４……リード線、
１５……検出回路。
FIG. 1 is a block diagram of the main parts of the surface potential distribution detection device of the present invention, and FIG. 2 is a sectional view of the main parts of a conventional example. DESCRIPTION OF SYMBOLS 1...Laser oscillator, 2...Beam expander, 2a, 2b...Lens constituting the beam expander, 3, 10...Polarizing plate, 4...Beam splitter, 5...Transparent electrode, 6... Electro-optic crystal element, 7... multilayer dielectric mirror, 8... object to be measured, 9... wavelength plate, 11... lens, 12... projection plate, 13... detection electrode, 14... lead wire ,
15...Detection circuit.
Claims (1)
り太い平行線束に変換するためのビームエクスパ
ンダと、 このビームエクスパンダにより太くされたレー
ザ光を常光線と異常光線の２つの異なつた位相速
度の光線に分ける為の電気光学結晶素子と、 この電気光学結晶素子に電界を生じさせてレー
ザ光の屈折率変化を生じさせる為に、この電気光
学結晶素子の上部に設けた透明電極と、 上記電気光学結晶素子を通過したレーザ光を反
射させる多層膜誘電体ミラーと、 この多層膜誘電体ミラーで反射し再び上記電気
光学結晶素子を通過したレーザ光を反射させ、方
向を変えるビームスプリツタと、 このビームスプリツタによつて反射されたレー
ザ光を、上記電気光学結晶素子に供給される前の
直線偏波とは略９０度異なる偏向方向に設定した
偏光板と、 この偏光板を通過したレーザ光を拡大投影する
ためのレンズと、 このレンズで拡大されたレーザ光を映し出す投
影板とを備えたことを特徴とする表面電位分布検
出装置。[Claims for Utility Model Registration] A laser oscillator that oscillates a laser beam, a beam expander that converts the laser beam oscillated by the laser oscillator into a thicker parallel beam bundle, and a laser that is made thicker by the beam expander. An electro-optic crystal element is used to separate light into two beams with different phase velocities, an ordinary ray and an extraordinary ray. a transparent electrode provided on the top of the electro-optic crystal element; a multilayer dielectric mirror that reflects the laser beam that has passed through the electro-optic crystal element; a beam splitter that reflects and changes the direction of the laser beam reflected by the beam splitter; Surface potential distribution detection characterized by comprising: a polarizing plate set in a direction, a lens for enlarging and projecting the laser beam that has passed through the polarizing plate, and a projection plate for projecting the laser beam magnified by the lens. Device.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16965487U JPH0519817Y2 (en) | 1987-11-06 | 1987-11-06 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16965487U JPH0519817Y2 (en) | 1987-11-06 | 1987-11-06 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0174568U true JPH0174568U (en) | 1989-05-19 |
| JPH0519817Y2 JPH0519817Y2 (en) | 1993-05-25 |
Family
ID=31459906
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16965487U Expired - Lifetime JPH0519817Y2 (en) | 1987-11-06 | 1987-11-06 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0519817Y2 (en) |
-
1987
- 1987-11-06 JP JP16965487U patent/JPH0519817Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0519817Y2 (en) | 1993-05-25 |
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