JPH0174398U - - Google Patents

Info

Publication number
JPH0174398U
JPH0174398U JP1987170051U JP17005187U JPH0174398U JP H0174398 U JPH0174398 U JP H0174398U JP 1987170051 U JP1987170051 U JP 1987170051U JP 17005187 U JP17005187 U JP 17005187U JP H0174398 U JPH0174398 U JP H0174398U
Authority
JP
Japan
Prior art keywords
pump stage
vacuum pump
housing
compound vacuum
view
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1987170051U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1987170051U priority Critical patent/JPH0174398U/ja
Publication of JPH0174398U publication Critical patent/JPH0174398U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Non-Positive Displacement Air Blowers (AREA)
JP1987170051U 1987-11-09 1987-11-09 Pending JPH0174398U (US07122547-20061017-C00032.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987170051U JPH0174398U (US07122547-20061017-C00032.png) 1987-11-09 1987-11-09

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987170051U JPH0174398U (US07122547-20061017-C00032.png) 1987-11-09 1987-11-09

Publications (1)

Publication Number Publication Date
JPH0174398U true JPH0174398U (US07122547-20061017-C00032.png) 1989-05-19

Family

ID=31460650

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987170051U Pending JPH0174398U (US07122547-20061017-C00032.png) 1987-11-09 1987-11-09

Country Status (1)

Country Link
JP (1) JPH0174398U (US07122547-20061017-C00032.png)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009235922A (ja) * 2008-03-26 2009-10-15 Ebara Corp ターボ型真空ポンプ
WO2018147191A1 (ja) * 2017-02-08 2018-08-16 エドワーズ株式会社 真空ポンプ、真空ポンプに備わる回転部、およびアンバランス修正方法

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009235922A (ja) * 2008-03-26 2009-10-15 Ebara Corp ターボ型真空ポンプ
WO2018147191A1 (ja) * 2017-02-08 2018-08-16 エドワーズ株式会社 真空ポンプ、真空ポンプに備わる回転部、およびアンバランス修正方法
JP2018127950A (ja) * 2017-02-08 2018-08-16 エドワーズ株式会社 真空ポンプ、真空ポンプに備わる回転部、およびアンバランス修正方法
CN110199127A (zh) * 2017-02-08 2019-09-03 埃地沃兹日本有限公司 真空泵、真空泵所具备的旋转部及不平衡修正方法
KR20190111032A (ko) * 2017-02-08 2019-10-01 에드워즈 가부시키가이샤 진공 펌프, 진공 펌프에 구비되는 회전부, 및 언밸런스 수정 방법
CN110199127B (zh) * 2017-02-08 2021-10-29 埃地沃兹日本有限公司 真空泵、真空泵所具备的旋转部及不平衡修正方法
US11168697B2 (en) 2017-02-08 2021-11-09 Edwards Japan Limited Vacuum pump, rotating portion included in vacuum pump, and imbalance correction method

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