JPH0174262U - - Google Patents

Info

Publication number
JPH0174262U
JPH0174262U JP1987167295U JP16729587U JPH0174262U JP H0174262 U JPH0174262 U JP H0174262U JP 1987167295 U JP1987167295 U JP 1987167295U JP 16729587 U JP16729587 U JP 16729587U JP H0174262 U JPH0174262 U JP H0174262U
Authority
JP
Japan
Prior art keywords
target material
vacuum chamber
film
forming body
sputtering apparatus
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1987167295U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1987167295U priority Critical patent/JPH0174262U/ja
Publication of JPH0174262U publication Critical patent/JPH0174262U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP1987167295U 1987-10-31 1987-10-31 Pending JPH0174262U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987167295U JPH0174262U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1987-10-31 1987-10-31

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987167295U JPH0174262U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1987-10-31 1987-10-31

Publications (1)

Publication Number Publication Date
JPH0174262U true JPH0174262U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1989-05-19

Family

ID=31455456

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987167295U Pending JPH0174262U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1987-10-31 1987-10-31

Country Status (1)

Country Link
JP (1) JPH0174262U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

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