JPH0174053U - - Google Patents
Info
- Publication number
- JPH0174053U JPH0174053U JP1987170362U JP17036287U JPH0174053U JP H0174053 U JPH0174053 U JP H0174053U JP 1987170362 U JP1987170362 U JP 1987170362U JP 17036287 U JP17036287 U JP 17036287U JP H0174053 U JPH0174053 U JP H0174053U
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor substrate
- cutting
- injection port
- rotary
- water injection
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 6
- 239000000758 substrate Substances 0.000 claims description 6
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 4
- 239000000498 cooling water Substances 0.000 claims description 3
- 238000002347 injection Methods 0.000 claims description 3
- 239000007924 injection Substances 0.000 claims description 3
Landscapes
- Grinding-Machine Dressing And Accessory Apparatuses (AREA)
- Polishing Bodies And Polishing Tools (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987170362U JPH0174053U (xx) | 1987-11-06 | 1987-11-06 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987170362U JPH0174053U (xx) | 1987-11-06 | 1987-11-06 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0174053U true JPH0174053U (xx) | 1989-05-18 |
Family
ID=31461234
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987170362U Pending JPH0174053U (xx) | 1987-11-06 | 1987-11-06 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0174053U (xx) |
-
1987
- 1987-11-06 JP JP1987170362U patent/JPH0174053U/ja active Pending