JPH0173958U - - Google Patents
Info
- Publication number
- JPH0173958U JPH0173958U JP1987169937U JP16993787U JPH0173958U JP H0173958 U JPH0173958 U JP H0173958U JP 1987169937 U JP1987169937 U JP 1987169937U JP 16993787 U JP16993787 U JP 16993787U JP H0173958 U JPH0173958 U JP H0173958U
- Authority
- JP
- Japan
- Prior art keywords
- mirror
- light
- excimer laser
- laser
- laser oscillation
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000010355 oscillation Effects 0.000 claims 2
- 238000012806 monitoring device Methods 0.000 claims 1
- 230000003287 optical effect Effects 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 3
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
Description
第１図は、本考案の一実施例にかかるモニター
装置を示す概略構成図である。第２図は、従来の
モニター装置を示す概略構成図である。第３図は
、本考案の他の実施例を示す概略構成図である。
〔主要部分の符号の説明〕、１…レーザー装置
ハウジング、２…第２ミラー（全反射ミラー）、
３…第１ミラー（出力ミラー）、４，５，６…エ
キシマレーザ光、７…第２の部分反射ミラー、８
…コーン、９…拡散板、１０…光電変換装置、１
１…減光ミラー、１２…エキシマレーザ漏れ光、
１３…Ａｌミラー、１４…ＭｇＦ２ミラー、１５
…アライメントレーザ、１６…アライメントレー
ザ光。
FIG. 1 is a schematic configuration diagram showing a monitor device according to an embodiment of the present invention. FIG. 2 is a schematic configuration diagram showing a conventional monitor device. FIG. 3 is a schematic configuration diagram showing another embodiment of the present invention. [Explanation of symbols of main parts], 1...Laser device housing, 2...Second mirror (total reflection mirror),
3...First mirror (output mirror), 4, 5, 6...Excimer laser beam, 7...Second partial reflection mirror, 8
... Cone, 9 ... Diffusion plate, 10 ... Photoelectric conversion device, 1
1...Dimension mirror, 12...Excimer laser leakage light,
13...Al mirror, 14...MgF 2 mirror, 15
...Alignment laser, 16...Alignment laser light.
Claims (1)
ーザ発振光を反射させるための第２ミラーから成
る光共振器を備えた放電励起エキシマレーザ装置
に於ける、 前記第２ミラーの裏面からの漏れ光の光エネル
ギーをモニターすることを特徴とするエキシマレ
ーザ用光エネルギーモニター装置。[Claims for Utility Model Registration] In the discharge-excited excimer laser device comprising an optical resonator comprising a first mirror for extracting laser oscillation light and a second mirror for reflecting the laser oscillation light, A light energy monitoring device for an excimer laser, which monitors the light energy of light leaking from the back surface of a mirror.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987169937U JPH0173958U (en) | 1987-11-06 | 1987-11-06 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987169937U JPH0173958U (en) | 1987-11-06 | 1987-11-06 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0173958U true JPH0173958U (en) | 1989-05-18 |
Family
ID=31460439
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987169937U Pending JPH0173958U (en) | 1987-11-06 | 1987-11-06 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0173958U (en) |
-
1987
- 1987-11-06 JP JP1987169937U patent/JPH0173958U/ja active Pending
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