JPH0173937U - - Google Patents
Info
- Publication number
- JPH0173937U JPH0173937U JP1987167937U JP16793787U JPH0173937U JP H0173937 U JPH0173937 U JP H0173937U JP 1987167937 U JP1987167937 U JP 1987167937U JP 16793787 U JP16793787 U JP 16793787U JP H0173937 U JPH0173937 U JP H0173937U
- Authority
- JP
- Japan
- Prior art keywords
- elastic member
- fork
- transfer device
- wafer transfer
- wafer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 235000012431 wafers Nutrition 0.000 claims 4
- 230000032258 transport Effects 0.000 claims 2
- 229920006311 Urethane elastomer Polymers 0.000 claims 1
- 229920002379 silicone rubber Polymers 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
- 230000003068 static effect Effects 0.000 description 1
Landscapes
- Feeding Of Articles By Means Other Than Belts Or Rollers (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987167937U JPH0173937U (enExample) | 1987-11-04 | 1987-11-04 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987167937U JPH0173937U (enExample) | 1987-11-04 | 1987-11-04 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0173937U true JPH0173937U (enExample) | 1989-05-18 |
Family
ID=31456678
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987167937U Pending JPH0173937U (enExample) | 1987-11-04 | 1987-11-04 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0173937U (enExample) |
-
1987
- 1987-11-04 JP JP1987167937U patent/JPH0173937U/ja active Pending