JPH0173926U - - Google Patents
Info
- Publication number
- JPH0173926U JPH0173926U JP1987169701U JP16970187U JPH0173926U JP H0173926 U JPH0173926 U JP H0173926U JP 1987169701 U JP1987169701 U JP 1987169701U JP 16970187 U JP16970187 U JP 16970187U JP H0173926 U JPH0173926 U JP H0173926U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- heat treatment
- jig
- lower plate
- support column
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000010438 heat treatment Methods 0.000 claims description 4
- 239000000758 substrate Substances 0.000 claims description 2
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16970187U JPH0519952Y2 (de) | 1987-11-06 | 1987-11-06 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16970187U JPH0519952Y2 (de) | 1987-11-06 | 1987-11-06 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0173926U true JPH0173926U (de) | 1989-05-18 |
| JPH0519952Y2 JPH0519952Y2 (de) | 1993-05-25 |
Family
ID=31459994
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16970187U Expired - Lifetime JPH0519952Y2 (de) | 1987-11-06 | 1987-11-06 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0519952Y2 (de) |
-
1987
- 1987-11-06 JP JP16970187U patent/JPH0519952Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0519952Y2 (de) | 1993-05-25 |