JPH0173926U - - Google Patents

Info

Publication number
JPH0173926U
JPH0173926U JP1987169701U JP16970187U JPH0173926U JP H0173926 U JPH0173926 U JP H0173926U JP 1987169701 U JP1987169701 U JP 1987169701U JP 16970187 U JP16970187 U JP 16970187U JP H0173926 U JPH0173926 U JP H0173926U
Authority
JP
Japan
Prior art keywords
wafer
heat treatment
jig
lower plate
support column
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1987169701U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0519952Y2 (cg-RX-API-DMAC7.html
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1987169701U priority Critical patent/JPH0519952Y2/ja
Publication of JPH0173926U publication Critical patent/JPH0173926U/ja
Application granted granted Critical
Publication of JPH0519952Y2 publication Critical patent/JPH0519952Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

JP1987169701U 1987-11-06 1987-11-06 Expired - Lifetime JPH0519952Y2 (cg-RX-API-DMAC7.html)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987169701U JPH0519952Y2 (cg-RX-API-DMAC7.html) 1987-11-06 1987-11-06

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987169701U JPH0519952Y2 (cg-RX-API-DMAC7.html) 1987-11-06 1987-11-06

Publications (2)

Publication Number Publication Date
JPH0173926U true JPH0173926U (cg-RX-API-DMAC7.html) 1989-05-18
JPH0519952Y2 JPH0519952Y2 (cg-RX-API-DMAC7.html) 1993-05-25

Family

ID=31459994

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987169701U Expired - Lifetime JPH0519952Y2 (cg-RX-API-DMAC7.html) 1987-11-06 1987-11-06

Country Status (1)

Country Link
JP (1) JPH0519952Y2 (cg-RX-API-DMAC7.html)

Also Published As

Publication number Publication date
JPH0519952Y2 (cg-RX-API-DMAC7.html) 1993-05-25

Similar Documents

Publication Publication Date Title
JPS61206634U (cg-RX-API-DMAC7.html)
JPS6153930U (cg-RX-API-DMAC7.html)
JPS6367239U (cg-RX-API-DMAC7.html)
JPS62151749U (cg-RX-API-DMAC7.html)
JPS644579U (cg-RX-API-DMAC7.html)
JPS6217120U (cg-RX-API-DMAC7.html)
JPS6186939U (cg-RX-API-DMAC7.html)
JPH0338U (cg-RX-API-DMAC7.html)
JPS6151083U (cg-RX-API-DMAC7.html)
JPS6199447U (cg-RX-API-DMAC7.html)
JPS6389512U (cg-RX-API-DMAC7.html)
JPS6289144U (cg-RX-API-DMAC7.html)
JPS612137U (ja) 机の高低調節装置
JPS6336048U (cg-RX-API-DMAC7.html)
JPS6222251U (cg-RX-API-DMAC7.html)
JPS63169640U (cg-RX-API-DMAC7.html)
JPS6426831U (cg-RX-API-DMAC7.html)
JPS6336298U (cg-RX-API-DMAC7.html)
JPH0166927U (cg-RX-API-DMAC7.html)
JPH02103700U (cg-RX-API-DMAC7.html)
JPS63154658U (cg-RX-API-DMAC7.html)
JPS63150778U (cg-RX-API-DMAC7.html)
JPS6192099U (cg-RX-API-DMAC7.html)
JPS6274916U (cg-RX-API-DMAC7.html)
JPS629309U (cg-RX-API-DMAC7.html)