JPH0173384U - - Google Patents

Info

Publication number

JPH0173384U

JPH0173384U JP1987169440U JP16944087U JPH0173384U JP H0173384 U JPH0173384 U JP H0173384U JP 1987169440 U JP1987169440 U JP 1987169440U JP 16944087 U JP16944087 U JP 16944087U JP H0173384 U JPH0173384 U JP H0173384U

Authority

JP

Japan

Prior art keywords

porous material

suction port

mounting table

cleaning

washing water

Prior art date

1987-11-05

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Granted

Links

• Espacenet
• Global Dossier
• Discuss

• XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 9
• 238000004140 cleaning Methods 0.000 claims description 7
• 239000011148 porous material Substances 0.000 claims 5
• 238000005406 washing Methods 0.000 claims 2
• 238000007599 discharging Methods 0.000 claims 1
• 238000010586 diagram Methods 0.000 description 1
• 239000000126 substance Substances 0.000 description 1

Cited By (4)