JPH0173372U - - Google Patents
Info
- Publication number
- JPH0173372U JPH0173372U JP1987169403U JP16940387U JPH0173372U JP H0173372 U JPH0173372 U JP H0173372U JP 1987169403 U JP1987169403 U JP 1987169403U JP 16940387 U JP16940387 U JP 16940387U JP H0173372 U JPH0173372 U JP H0173372U
- Authority
- JP
- Japan
- Prior art keywords
- section
- silicon oxide
- immersion
- adjusting
- treatment liquid
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000007654 immersion Methods 0.000 claims description 6
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 5
- 239000007788 liquid Substances 0.000 claims description 5
- 229910052814 silicon oxide Inorganic materials 0.000 claims description 5
- 238000004519 manufacturing process Methods 0.000 claims description 4
- 239000000758 substrate Substances 0.000 claims 2
- 239000011248 coating agent Substances 0.000 claims 1
- 238000000576 coating method Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
Landscapes
- Coating Apparatus (AREA)
- Application Of Or Painting With Fluid Materials (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987169403U JPH0173372U (en, 2012) | 1987-11-05 | 1987-11-05 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987169403U JPH0173372U (en, 2012) | 1987-11-05 | 1987-11-05 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0173372U true JPH0173372U (en, 2012) | 1989-05-17 |
Family
ID=31459428
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987169403U Pending JPH0173372U (en, 2012) | 1987-11-05 | 1987-11-05 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0173372U (en, 2012) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2008238035A (ja) * | 2007-03-27 | 2008-10-09 | Seiko Epson Corp | 浸漬塗布装置及び浸漬塗布方法 |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS52146451A (en) * | 1976-06-01 | 1977-12-06 | Sumitomo Chem Co Ltd | Dipping apparatus |
| JPS5429348A (en) * | 1977-08-08 | 1979-03-05 | Nichicon Capacitor Ltd | Coating apparatus |
-
1987
- 1987-11-05 JP JP1987169403U patent/JPH0173372U/ja active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS52146451A (en) * | 1976-06-01 | 1977-12-06 | Sumitomo Chem Co Ltd | Dipping apparatus |
| JPS5429348A (en) * | 1977-08-08 | 1979-03-05 | Nichicon Capacitor Ltd | Coating apparatus |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2008238035A (ja) * | 2007-03-27 | 2008-10-09 | Seiko Epson Corp | 浸漬塗布装置及び浸漬塗布方法 |