JPH0172329U - - Google Patents
Info
- Publication number
- JPH0172329U JPH0172329U JP1987168484U JP16848487U JPH0172329U JP H0172329 U JPH0172329 U JP H0172329U JP 1987168484 U JP1987168484 U JP 1987168484U JP 16848487 U JP16848487 U JP 16848487U JP H0172329 U JPH0172329 U JP H0172329U
- Authority
- JP
- Japan
- Prior art keywords
- bed
- flow path
- heat medium
- air
- connection port
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000011148 porous material Substances 0.000 claims description 3
- 239000003566 sealing material Substances 0.000 claims description 2
- 238000007664 blowing Methods 0.000 claims 1
- 238000007645 offset printing Methods 0.000 description 1
Landscapes
- Sheets, Magazines, And Separation Thereof (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987168484U JPH0172329U (enExample) | 1987-11-05 | 1987-11-05 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987168484U JPH0172329U (enExample) | 1987-11-05 | 1987-11-05 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0172329U true JPH0172329U (enExample) | 1989-05-16 |
Family
ID=31457701
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987168484U Pending JPH0172329U (enExample) | 1987-11-05 | 1987-11-05 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0172329U (enExample) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2011143620A (ja) * | 2010-01-15 | 2011-07-28 | Ihi Corp | 真空吸着ステージ |
-
1987
- 1987-11-05 JP JP1987168484U patent/JPH0172329U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2011143620A (ja) * | 2010-01-15 | 2011-07-28 | Ihi Corp | 真空吸着ステージ |