JPH0171446U - - Google Patents

Info

Publication number
JPH0171446U
JPH0171446U JP1987166691U JP16669187U JPH0171446U JP H0171446 U JPH0171446 U JP H0171446U JP 1987166691 U JP1987166691 U JP 1987166691U JP 16669187 U JP16669187 U JP 16669187U JP H0171446 U JPH0171446 U JP H0171446U
Authority
JP
Japan
Prior art keywords
pellets
wafer sheet
adsorbent
adsorbing
pushed
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1987166691U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1987166691U priority Critical patent/JPH0171446U/ja
Publication of JPH0171446U publication Critical patent/JPH0171446U/ja
Pending legal-status Critical Current

Links

JP1987166691U 1987-10-30 1987-10-30 Pending JPH0171446U (US07534539-20090519-C00280.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987166691U JPH0171446U (US07534539-20090519-C00280.png) 1987-10-30 1987-10-30

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987166691U JPH0171446U (US07534539-20090519-C00280.png) 1987-10-30 1987-10-30

Publications (1)

Publication Number Publication Date
JPH0171446U true JPH0171446U (US07534539-20090519-C00280.png) 1989-05-12

Family

ID=31454304

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987166691U Pending JPH0171446U (US07534539-20090519-C00280.png) 1987-10-30 1987-10-30

Country Status (1)

Country Link
JP (1) JPH0171446U (US07534539-20090519-C00280.png)

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