JPH0171438U - - Google Patents
Info
- Publication number
- JPH0171438U JPH0171438U JP1987166456U JP16645687U JPH0171438U JP H0171438 U JPH0171438 U JP H0171438U JP 1987166456 U JP1987166456 U JP 1987166456U JP 16645687 U JP16645687 U JP 16645687U JP H0171438 U JPH0171438 U JP H0171438U
- Authority
- JP
- Japan
- Prior art keywords
- gas
- suction port
- processing chamber
- vacuum processing
- dry etching
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001312 dry etching Methods 0.000 claims description 3
- 238000001020 plasma etching Methods 0.000 claims 1
- 239000012212 insulator Substances 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
Landscapes
- Drying Of Semiconductors (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1987166456U JPH0171438U (zh) | 1987-10-30 | 1987-10-30 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1987166456U JPH0171438U (zh) | 1987-10-30 | 1987-10-30 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH0171438U true JPH0171438U (zh) | 1989-05-12 |
Family
ID=31453853
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1987166456U Pending JPH0171438U (zh) | 1987-10-30 | 1987-10-30 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0171438U (zh) |
-
1987
- 1987-10-30 JP JP1987166456U patent/JPH0171438U/ja active Pending