JPH0171437U - - Google Patents

Info

Publication number
JPH0171437U
JPH0171437U JP1987167233U JP16723387U JPH0171437U JP H0171437 U JPH0171437 U JP H0171437U JP 1987167233 U JP1987167233 U JP 1987167233U JP 16723387 U JP16723387 U JP 16723387U JP H0171437 U JPH0171437 U JP H0171437U
Authority
JP
Japan
Prior art keywords
mask
semiconductor wafer
positioning
back sides
alignment marks
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1987167233U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1987167233U priority Critical patent/JPH0171437U/ja
Publication of JPH0171437U publication Critical patent/JPH0171437U/ja
Pending legal-status Critical Current

Links

JP1987167233U 1987-10-30 1987-10-30 Pending JPH0171437U (US06815460-20041109-C00097.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987167233U JPH0171437U (US06815460-20041109-C00097.png) 1987-10-30 1987-10-30

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987167233U JPH0171437U (US06815460-20041109-C00097.png) 1987-10-30 1987-10-30

Publications (1)

Publication Number Publication Date
JPH0171437U true JPH0171437U (US06815460-20041109-C00097.png) 1989-05-12

Family

ID=31455339

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987167233U Pending JPH0171437U (US06815460-20041109-C00097.png) 1987-10-30 1987-10-30

Country Status (1)

Country Link
JP (1) JPH0171437U (US06815460-20041109-C00097.png)

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