JPH0171058U - - Google Patents
Info
- Publication number
- JPH0171058U JPH0171058U JP16487587U JP16487587U JPH0171058U JP H0171058 U JPH0171058 U JP H0171058U JP 16487587 U JP16487587 U JP 16487587U JP 16487587 U JP16487587 U JP 16487587U JP H0171058 U JPH0171058 U JP H0171058U
- Authority
- JP
- Japan
- Prior art keywords
- main body
- center
- outer periphery
- disk
- storage hole
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000004308 accommodation Effects 0.000 description 2
- 239000012050 conventional carrier Substances 0.000 description 2
- 238000000034 method Methods 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP16487587U JPH0171058U (no) | 1987-10-28 | 1987-10-28 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP16487587U JPH0171058U (no) | 1987-10-28 | 1987-10-28 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH0171058U true JPH0171058U (no) | 1989-05-11 |
Family
ID=31450854
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP16487587U Pending JPH0171058U (no) | 1987-10-28 | 1987-10-28 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0171058U (no) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2001252864A (ja) * | 2000-03-08 | 2001-09-18 | Speedfam Co Ltd | 研磨方法及び研磨装置 |
-
1987
- 1987-10-28 JP JP16487587U patent/JPH0171058U/ja active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2001252864A (ja) * | 2000-03-08 | 2001-09-18 | Speedfam Co Ltd | 研磨方法及び研磨装置 |