JPH0170339U - - Google Patents
Info
- Publication number
- JPH0170339U JPH0170339U JP1987165974U JP16597487U JPH0170339U JP H0170339 U JPH0170339 U JP H0170339U JP 1987165974 U JP1987165974 U JP 1987165974U JP 16597487 U JP16597487 U JP 16597487U JP H0170339 U JPH0170339 U JP H0170339U
- Authority
- JP
- Japan
- Prior art keywords
- carrier
- wafer
- pitch
- block
- fixing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000001105 regulatory effect Effects 0.000 claims 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987165974U JPH0170339U (pt) | 1987-10-29 | 1987-10-29 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987165974U JPH0170339U (pt) | 1987-10-29 | 1987-10-29 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0170339U true JPH0170339U (pt) | 1989-05-10 |
Family
ID=31452946
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987165974U Pending JPH0170339U (pt) | 1987-10-29 | 1987-10-29 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0170339U (pt) |
-
1987
- 1987-10-29 JP JP1987165974U patent/JPH0170339U/ja active Pending