JPH0170329U - - Google Patents
Info
- Publication number
- JPH0170329U JPH0170329U JP1987165540U JP16554087U JPH0170329U JP H0170329 U JPH0170329 U JP H0170329U JP 1987165540 U JP1987165540 U JP 1987165540U JP 16554087 U JP16554087 U JP 16554087U JP H0170329 U JPH0170329 U JP H0170329U
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor substrate
- hot air
- fin
- splashing
- thrown
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 4
- 239000000758 substrate Substances 0.000 claims description 3
- 238000001035 drying Methods 0.000 claims 1
- 239000000428 dust Substances 0.000 claims 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims 1
- 238000010438 heat treatment Methods 0.000 description 1
- 238000007602 hot air drying Methods 0.000 description 1
Landscapes
- Drying Of Solid Materials (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987165540U JPH0170329U (cs) | 1987-10-28 | 1987-10-28 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987165540U JPH0170329U (cs) | 1987-10-28 | 1987-10-28 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0170329U true JPH0170329U (cs) | 1989-05-10 |
Family
ID=31452118
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987165540U Pending JPH0170329U (cs) | 1987-10-28 | 1987-10-28 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0170329U (cs) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4918614U (cs) * | 1972-05-20 | 1974-02-16 | ||
| JPS52135453A (en) * | 1976-05-08 | 1977-11-12 | Nec Corp | Wafer dryer |
-
1987
- 1987-10-28 JP JP1987165540U patent/JPH0170329U/ja active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4918614U (cs) * | 1972-05-20 | 1974-02-16 | ||
| JPS52135453A (en) * | 1976-05-08 | 1977-11-12 | Nec Corp | Wafer dryer |