JPH0170112U - - Google Patents
Info
- Publication number
- JPH0170112U JPH0170112U JP1987164774U JP16477487U JPH0170112U JP H0170112 U JPH0170112 U JP H0170112U JP 1987164774 U JP1987164774 U JP 1987164774U JP 16477487 U JP16477487 U JP 16477487U JP H0170112 U JPH0170112 U JP H0170112U
- Authority
- JP
- Japan
- Prior art keywords
- base
- semiconductor product
- air blowing
- flat nozzle
- recess
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000007664 blowing Methods 0.000 claims 2
- 239000004065 semiconductor Substances 0.000 claims 2
Landscapes
- Measuring Arrangements Characterized By The Use Of Fluids (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987164774U JPH0170112U (ru) | 1987-10-28 | 1987-10-28 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987164774U JPH0170112U (ru) | 1987-10-28 | 1987-10-28 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0170112U true JPH0170112U (ru) | 1989-05-10 |
Family
ID=31450666
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987164774U Pending JPH0170112U (ru) | 1987-10-28 | 1987-10-28 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0170112U (ru) |
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1987
- 1987-10-28 JP JP1987164774U patent/JPH0170112U/ja active Pending