JPH0168566U - - Google Patents

Info

Publication number
JPH0168566U
JPH0168566U JP1987163343U JP16334387U JPH0168566U JP H0168566 U JPH0168566 U JP H0168566U JP 1987163343 U JP1987163343 U JP 1987163343U JP 16334387 U JP16334387 U JP 16334387U JP H0168566 U JPH0168566 U JP H0168566U
Authority
JP
Japan
Prior art keywords
wafer
contact
support member
counts
wafer carrier
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1987163343U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1987163343U priority Critical patent/JPH0168566U/ja
Publication of JPH0168566U publication Critical patent/JPH0168566U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
JP1987163343U 1987-10-26 1987-10-26 Pending JPH0168566U (US20080293856A1-20081127-C00150.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987163343U JPH0168566U (US20080293856A1-20081127-C00150.png) 1987-10-26 1987-10-26

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987163343U JPH0168566U (US20080293856A1-20081127-C00150.png) 1987-10-26 1987-10-26

Publications (1)

Publication Number Publication Date
JPH0168566U true JPH0168566U (US20080293856A1-20081127-C00150.png) 1989-05-02

Family

ID=31447984

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987163343U Pending JPH0168566U (US20080293856A1-20081127-C00150.png) 1987-10-26 1987-10-26

Country Status (1)

Country Link
JP (1) JPH0168566U (US20080293856A1-20081127-C00150.png)

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