JPH0167548U - - Google Patents

Info

Publication number
JPH0167548U
JPH0167548U JP1987163043U JP16304387U JPH0167548U JP H0167548 U JPH0167548 U JP H0167548U JP 1987163043 U JP1987163043 U JP 1987163043U JP 16304387 U JP16304387 U JP 16304387U JP H0167548 U JPH0167548 U JP H0167548U
Authority
JP
Japan
Prior art keywords
sample
support shaft
vacuum chamber
moving mechanism
sample moving
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1987163043U
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1987163043U priority Critical patent/JPH0167548U/ja
Publication of JPH0167548U publication Critical patent/JPH0167548U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Sampling And Sample Adjustment (AREA)

Description

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は本考案の実施例に係る試料ステージの
断面図、第2図は本考案の他の変形例を示す平面
図、第3図は従来例の試料ステージの断面図であ
る。 1……真空チヤンバ、8,18……試料移動機
構、13,17……試料支持軸。
FIG. 1 is a sectional view of a sample stage according to an embodiment of the present invention, FIG. 2 is a plan view showing another modification of the present invention, and FIG. 3 is a sectional view of a conventional sample stage. 1... Vacuum chamber, 8, 18... Sample moving mechanism, 13, 17... Sample support shaft.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] 真空チヤンバの外部に互いに同期駆動される複
数の試料移動機構が設けられ、各試料移動機構か
らは該試料移動機構に一端が固定された試料支持
軸が前記真空チヤンバ内に突設され、これらの各
試料支持軸の他端は互いに一体的に接合されてい
ることを特徴とする試料ステージ。
A plurality of sample moving mechanisms that are driven in synchronization with each other are provided outside the vacuum chamber, and from each sample moving mechanism, a sample support shaft with one end fixed to the sample moving mechanism is provided protruding into the vacuum chamber. A sample stage characterized in that the other ends of each sample support shaft are integrally joined to each other.
JP1987163043U 1987-10-23 1987-10-23 Pending JPH0167548U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987163043U JPH0167548U (en) 1987-10-23 1987-10-23

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987163043U JPH0167548U (en) 1987-10-23 1987-10-23

Publications (1)

Publication Number Publication Date
JPH0167548U true JPH0167548U (en) 1989-05-01

Family

ID=31447414

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987163043U Pending JPH0167548U (en) 1987-10-23 1987-10-23

Country Status (1)

Country Link
JP (1) JPH0167548U (en)

Cited By (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USD805176S1 (en) 2016-05-06 2017-12-12 Airius Ip Holdings, Llc Air moving device
US9970457B2 (en) 2008-05-30 2018-05-15 Airius Ip Holdings, Llc Columnar air moving devices, systems and methods
USD820967S1 (en) 2016-05-06 2018-06-19 Airius Ip Holdings Llc Air moving device
US10024531B2 (en) 2013-12-19 2018-07-17 Airius Ip Holdings, Llc Columnar air moving devices, systems and methods
US10221861B2 (en) 2014-06-06 2019-03-05 Airius Ip Holdings Llc Columnar air moving devices, systems and methods
US10487840B2 (en) 2004-03-15 2019-11-26 Airius Ip Holdings, Llc Temperature destratification systems
US10487852B2 (en) 2016-06-24 2019-11-26 Airius Ip Holdings, Llc Air moving device
US10641506B2 (en) 2013-12-19 2020-05-05 Airius Ip Holdings, Llc Columnar air moving devices, systems and methods
USD885550S1 (en) 2017-07-31 2020-05-26 Airius Ip Holdings, Llc Air moving device
USD886275S1 (en) 2017-01-26 2020-06-02 Airius Ip Holdings, Llc Air moving device
USD887541S1 (en) 2019-03-21 2020-06-16 Airius Ip Holdings, Llc Air moving device
USD926963S1 (en) 2012-05-15 2021-08-03 Airius Ip Holdings, Llc Air moving device
US11598539B2 (en) 2019-04-17 2023-03-07 Airius Ip Holdings, Llc Air moving device with bypass intake

Cited By (26)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US11053948B2 (en) 2004-03-15 2021-07-06 Airius Ip Holdings, Llc Temperature destratification systems
US11703062B2 (en) 2004-03-15 2023-07-18 Airius Ip Holdings, Llc Temperature destratification systems
US11365743B2 (en) 2004-03-15 2022-06-21 Airius Ip Holdings, Llc Temperature destratification systems
US10487840B2 (en) 2004-03-15 2019-11-26 Airius Ip Holdings, Llc Temperature destratification systems
US9970457B2 (en) 2008-05-30 2018-05-15 Airius Ip Holdings, Llc Columnar air moving devices, systems and methods
US10184489B2 (en) 2011-06-15 2019-01-22 Airius Ip Holdings, Llc Columnar air moving devices, systems and methods
USD926963S1 (en) 2012-05-15 2021-08-03 Airius Ip Holdings, Llc Air moving device
US11221153B2 (en) 2013-12-19 2022-01-11 Airius Ip Holdings, Llc Columnar air moving devices, systems and methods
US10024531B2 (en) 2013-12-19 2018-07-17 Airius Ip Holdings, Llc Columnar air moving devices, systems and methods
US10655841B2 (en) 2013-12-19 2020-05-19 Airius Ip Holdings, Llc Columnar air moving devices, systems and methods
US10641506B2 (en) 2013-12-19 2020-05-05 Airius Ip Holdings, Llc Columnar air moving devices, systems and methods
US11092330B2 (en) 2013-12-19 2021-08-17 Airius Ip Holdings, Llc Columnar air moving devices, systems and methods
US11236766B2 (en) 2014-06-06 2022-02-01 Airius Ip Holdings Llc Columnar air moving devices, systems and methods
US10724542B2 (en) 2014-06-06 2020-07-28 Airius Ip Holdings, Llc Columnar air moving devices, systems and methods
US11713773B2 (en) 2014-06-06 2023-08-01 Airius Ip Holdings, Llc Columnar air moving devices, systems and methods
US10221861B2 (en) 2014-06-06 2019-03-05 Airius Ip Holdings Llc Columnar air moving devices, systems and methods
USD805176S1 (en) 2016-05-06 2017-12-12 Airius Ip Holdings, Llc Air moving device
USD820967S1 (en) 2016-05-06 2018-06-19 Airius Ip Holdings Llc Air moving device
US11105341B2 (en) 2016-06-24 2021-08-31 Airius Ip Holdings, Llc Air moving device
US11421710B2 (en) 2016-06-24 2022-08-23 Airius Ip Holdings, Llc Air moving device
US10487852B2 (en) 2016-06-24 2019-11-26 Airius Ip Holdings, Llc Air moving device
USD886275S1 (en) 2017-01-26 2020-06-02 Airius Ip Holdings, Llc Air moving device
USD885550S1 (en) 2017-07-31 2020-05-26 Airius Ip Holdings, Llc Air moving device
USD887541S1 (en) 2019-03-21 2020-06-16 Airius Ip Holdings, Llc Air moving device
US11598539B2 (en) 2019-04-17 2023-03-07 Airius Ip Holdings, Llc Air moving device with bypass intake
US11781761B1 (en) 2019-04-17 2023-10-10 Airius Ip Holdings, Llc Air moving device with bypass intake

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