JPH0167548U - - Google Patents
Info
- Publication number
- JPH0167548U JPH0167548U JP1987163043U JP16304387U JPH0167548U JP H0167548 U JPH0167548 U JP H0167548U JP 1987163043 U JP1987163043 U JP 1987163043U JP 16304387 U JP16304387 U JP 16304387U JP H0167548 U JPH0167548 U JP H0167548U
- Authority
- JP
- Japan
- Prior art keywords
- sample
- support shaft
- vacuum chamber
- moving mechanism
- sample moving
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000007246 mechanism Effects 0.000 claims description 4
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
Landscapes
- Sampling And Sample Adjustment (AREA)
Description
第1図は本考案の実施例に係る試料ステージの
断面図、第2図は本考案の他の変形例を示す平面
図、第3図は従来例の試料ステージの断面図であ
る。
1……真空チヤンバ、8,18……試料移動機
構、13,17……試料支持軸。
FIG. 1 is a sectional view of a sample stage according to an embodiment of the present invention, FIG. 2 is a plan view showing another modification of the present invention, and FIG. 3 is a sectional view of a conventional sample stage. 1... Vacuum chamber, 8, 18... Sample moving mechanism, 13, 17... Sample support shaft.
Claims (1)
数の試料移動機構が設けられ、各試料移動機構か
らは該試料移動機構に一端が固定された試料支持
軸が前記真空チヤンバ内に突設され、これらの各
試料支持軸の他端は互いに一体的に接合されてい
ることを特徴とする試料ステージ。 A plurality of sample moving mechanisms that are driven in synchronization with each other are provided outside the vacuum chamber, and from each sample moving mechanism, a sample support shaft with one end fixed to the sample moving mechanism is provided protruding into the vacuum chamber. A sample stage characterized in that the other ends of each sample support shaft are integrally joined to each other.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1987163043U JPH0167548U (en) | 1987-10-23 | 1987-10-23 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1987163043U JPH0167548U (en) | 1987-10-23 | 1987-10-23 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH0167548U true JPH0167548U (en) | 1989-05-01 |
Family
ID=31447414
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1987163043U Pending JPH0167548U (en) | 1987-10-23 | 1987-10-23 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0167548U (en) |
Cited By (13)
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---|---|---|---|---|
USD805176S1 (en) | 2016-05-06 | 2017-12-12 | Airius Ip Holdings, Llc | Air moving device |
US9970457B2 (en) | 2008-05-30 | 2018-05-15 | Airius Ip Holdings, Llc | Columnar air moving devices, systems and methods |
USD820967S1 (en) | 2016-05-06 | 2018-06-19 | Airius Ip Holdings Llc | Air moving device |
US10024531B2 (en) | 2013-12-19 | 2018-07-17 | Airius Ip Holdings, Llc | Columnar air moving devices, systems and methods |
US10221861B2 (en) | 2014-06-06 | 2019-03-05 | Airius Ip Holdings Llc | Columnar air moving devices, systems and methods |
US10487840B2 (en) | 2004-03-15 | 2019-11-26 | Airius Ip Holdings, Llc | Temperature destratification systems |
US10487852B2 (en) | 2016-06-24 | 2019-11-26 | Airius Ip Holdings, Llc | Air moving device |
US10641506B2 (en) | 2013-12-19 | 2020-05-05 | Airius Ip Holdings, Llc | Columnar air moving devices, systems and methods |
USD885550S1 (en) | 2017-07-31 | 2020-05-26 | Airius Ip Holdings, Llc | Air moving device |
USD886275S1 (en) | 2017-01-26 | 2020-06-02 | Airius Ip Holdings, Llc | Air moving device |
USD887541S1 (en) | 2019-03-21 | 2020-06-16 | Airius Ip Holdings, Llc | Air moving device |
USD926963S1 (en) | 2012-05-15 | 2021-08-03 | Airius Ip Holdings, Llc | Air moving device |
US11598539B2 (en) | 2019-04-17 | 2023-03-07 | Airius Ip Holdings, Llc | Air moving device with bypass intake |
-
1987
- 1987-10-23 JP JP1987163043U patent/JPH0167548U/ja active Pending
Cited By (26)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US11053948B2 (en) | 2004-03-15 | 2021-07-06 | Airius Ip Holdings, Llc | Temperature destratification systems |
US11703062B2 (en) | 2004-03-15 | 2023-07-18 | Airius Ip Holdings, Llc | Temperature destratification systems |
US11365743B2 (en) | 2004-03-15 | 2022-06-21 | Airius Ip Holdings, Llc | Temperature destratification systems |
US10487840B2 (en) | 2004-03-15 | 2019-11-26 | Airius Ip Holdings, Llc | Temperature destratification systems |
US9970457B2 (en) | 2008-05-30 | 2018-05-15 | Airius Ip Holdings, Llc | Columnar air moving devices, systems and methods |
US10184489B2 (en) | 2011-06-15 | 2019-01-22 | Airius Ip Holdings, Llc | Columnar air moving devices, systems and methods |
USD926963S1 (en) | 2012-05-15 | 2021-08-03 | Airius Ip Holdings, Llc | Air moving device |
US11221153B2 (en) | 2013-12-19 | 2022-01-11 | Airius Ip Holdings, Llc | Columnar air moving devices, systems and methods |
US10024531B2 (en) | 2013-12-19 | 2018-07-17 | Airius Ip Holdings, Llc | Columnar air moving devices, systems and methods |
US10655841B2 (en) | 2013-12-19 | 2020-05-19 | Airius Ip Holdings, Llc | Columnar air moving devices, systems and methods |
US10641506B2 (en) | 2013-12-19 | 2020-05-05 | Airius Ip Holdings, Llc | Columnar air moving devices, systems and methods |
US11092330B2 (en) | 2013-12-19 | 2021-08-17 | Airius Ip Holdings, Llc | Columnar air moving devices, systems and methods |
US11236766B2 (en) | 2014-06-06 | 2022-02-01 | Airius Ip Holdings Llc | Columnar air moving devices, systems and methods |
US10724542B2 (en) | 2014-06-06 | 2020-07-28 | Airius Ip Holdings, Llc | Columnar air moving devices, systems and methods |
US11713773B2 (en) | 2014-06-06 | 2023-08-01 | Airius Ip Holdings, Llc | Columnar air moving devices, systems and methods |
US10221861B2 (en) | 2014-06-06 | 2019-03-05 | Airius Ip Holdings Llc | Columnar air moving devices, systems and methods |
USD805176S1 (en) | 2016-05-06 | 2017-12-12 | Airius Ip Holdings, Llc | Air moving device |
USD820967S1 (en) | 2016-05-06 | 2018-06-19 | Airius Ip Holdings Llc | Air moving device |
US11105341B2 (en) | 2016-06-24 | 2021-08-31 | Airius Ip Holdings, Llc | Air moving device |
US11421710B2 (en) | 2016-06-24 | 2022-08-23 | Airius Ip Holdings, Llc | Air moving device |
US10487852B2 (en) | 2016-06-24 | 2019-11-26 | Airius Ip Holdings, Llc | Air moving device |
USD886275S1 (en) | 2017-01-26 | 2020-06-02 | Airius Ip Holdings, Llc | Air moving device |
USD885550S1 (en) | 2017-07-31 | 2020-05-26 | Airius Ip Holdings, Llc | Air moving device |
USD887541S1 (en) | 2019-03-21 | 2020-06-16 | Airius Ip Holdings, Llc | Air moving device |
US11598539B2 (en) | 2019-04-17 | 2023-03-07 | Airius Ip Holdings, Llc | Air moving device with bypass intake |
US11781761B1 (en) | 2019-04-17 | 2023-10-10 | Airius Ip Holdings, Llc | Air moving device with bypass intake |