JPH0167508U - - Google Patents
Info
- Publication number
- JPH0167508U JPH0167508U JP1987164359U JP16435987U JPH0167508U JP H0167508 U JPH0167508 U JP H0167508U JP 1987164359 U JP1987164359 U JP 1987164359U JP 16435987 U JP16435987 U JP 16435987U JP H0167508 U JPH0167508 U JP H0167508U
- Authority
- JP
- Japan
- Prior art keywords
- membrane
- electrodes
- long
- piezoelectric elements
- thin plate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000012528 membrane Substances 0.000 claims description 5
- 238000001514 detection method Methods 0.000 claims 1
- 239000000463 material Substances 0.000 claims 1
- 239000002356 single layer Substances 0.000 claims 1
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
- Transmission And Conversion Of Sensor Element Output (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1987164359U JPH0167508U (cs) | 1987-10-26 | 1987-10-26 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1987164359U JPH0167508U (cs) | 1987-10-26 | 1987-10-26 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH0167508U true JPH0167508U (cs) | 1989-05-01 |
Family
ID=31449896
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1987164359U Pending JPH0167508U (cs) | 1987-10-26 | 1987-10-26 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0167508U (cs) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH04366702A (ja) * | 1991-06-13 | 1992-12-18 | Agency Of Ind Science & Technol | 微小変位検出器 |
-
1987
- 1987-10-26 JP JP1987164359U patent/JPH0167508U/ja active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH04366702A (ja) * | 1991-06-13 | 1992-12-18 | Agency Of Ind Science & Technol | 微小変位検出器 |