JPH0166962U - - Google Patents

Info

Publication number
JPH0166962U
JPH0166962U JP16202187U JP16202187U JPH0166962U JP H0166962 U JPH0166962 U JP H0166962U JP 16202187 U JP16202187 U JP 16202187U JP 16202187 U JP16202187 U JP 16202187U JP H0166962 U JPH0166962 U JP H0166962U
Authority
JP
Japan
Prior art keywords
semiconductor wafer
polishing
holder
plate
wafer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP16202187U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP16202187U priority Critical patent/JPH0166962U/ja
Publication of JPH0166962U publication Critical patent/JPH0166962U/ja
Pending legal-status Critical Current

Links

JP16202187U 1987-10-22 1987-10-22 Pending JPH0166962U (US07714131-20100511-C00024.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16202187U JPH0166962U (US07714131-20100511-C00024.png) 1987-10-22 1987-10-22

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16202187U JPH0166962U (US07714131-20100511-C00024.png) 1987-10-22 1987-10-22

Publications (1)

Publication Number Publication Date
JPH0166962U true JPH0166962U (US07714131-20100511-C00024.png) 1989-04-28

Family

ID=31445471

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16202187U Pending JPH0166962U (US07714131-20100511-C00024.png) 1987-10-22 1987-10-22

Country Status (1)

Country Link
JP (1) JPH0166962U (US07714131-20100511-C00024.png)

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