JPH0166741U - - Google Patents

Info

Publication number
JPH0166741U
JPH0166741U JP1987161615U JP16161587U JPH0166741U JP H0166741 U JPH0166741 U JP H0166741U JP 1987161615 U JP1987161615 U JP 1987161615U JP 16161587 U JP16161587 U JP 16161587U JP H0166741 U JPH0166741 U JP H0166741U
Authority
JP
Japan
Prior art keywords
arc chamber
hot cathode
ion source
coil
utility
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1987161615U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1987161615U priority Critical patent/JPH0166741U/ja
Publication of JPH0166741U publication Critical patent/JPH0166741U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Electron Sources, Ion Sources (AREA)
JP1987161615U 1987-10-21 1987-10-21 Pending JPH0166741U (US20090163788A1-20090625-C00002.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987161615U JPH0166741U (US20090163788A1-20090625-C00002.png) 1987-10-21 1987-10-21

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987161615U JPH0166741U (US20090163788A1-20090625-C00002.png) 1987-10-21 1987-10-21

Publications (1)

Publication Number Publication Date
JPH0166741U true JPH0166741U (US20090163788A1-20090625-C00002.png) 1989-04-28

Family

ID=31444713

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987161615U Pending JPH0166741U (US20090163788A1-20090625-C00002.png) 1987-10-21 1987-10-21

Country Status (1)

Country Link
JP (1) JPH0166741U (US20090163788A1-20090625-C00002.png)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0468348U (US20090163788A1-20090625-C00002.png) * 1990-10-24 1992-06-17

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0468348U (US20090163788A1-20090625-C00002.png) * 1990-10-24 1992-06-17

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