JPH0165855U - - Google Patents

Info

Publication number
JPH0165855U
JPH0165855U JP1987160473U JP16047387U JPH0165855U JP H0165855 U JPH0165855 U JP H0165855U JP 1987160473 U JP1987160473 U JP 1987160473U JP 16047387 U JP16047387 U JP 16047387U JP H0165855 U JPH0165855 U JP H0165855U
Authority
JP
Japan
Prior art keywords
temperature
measuring
vapor deposition
protection tube
deposition substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1987160473U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1987160473U priority Critical patent/JPH0165855U/ja
Publication of JPH0165855U publication Critical patent/JPH0165855U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Measuring Temperature Or Quantity Of Heat (AREA)
  • Physical Vapour Deposition (AREA)
JP1987160473U 1987-10-20 1987-10-20 Pending JPH0165855U (cs)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987160473U JPH0165855U (cs) 1987-10-20 1987-10-20

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987160473U JPH0165855U (cs) 1987-10-20 1987-10-20

Publications (1)

Publication Number Publication Date
JPH0165855U true JPH0165855U (cs) 1989-04-27

Family

ID=31442566

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987160473U Pending JPH0165855U (cs) 1987-10-20 1987-10-20

Country Status (1)

Country Link
JP (1) JPH0165855U (cs)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60215759A (ja) * 1984-04-09 1985-10-29 Mitsubishi Electric Corp 薄膜形成装置
JPS61250949A (ja) * 1985-04-30 1986-11-08 Ulvac Corp 加速管

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60215759A (ja) * 1984-04-09 1985-10-29 Mitsubishi Electric Corp 薄膜形成装置
JPS61250949A (ja) * 1985-04-30 1986-11-08 Ulvac Corp 加速管

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