JPH0165855U - - Google Patents
Info
- Publication number
- JPH0165855U JPH0165855U JP1987160473U JP16047387U JPH0165855U JP H0165855 U JPH0165855 U JP H0165855U JP 1987160473 U JP1987160473 U JP 1987160473U JP 16047387 U JP16047387 U JP 16047387U JP H0165855 U JPH0165855 U JP H0165855U
- Authority
- JP
- Japan
- Prior art keywords
- temperature
- measuring
- vapor deposition
- protection tube
- deposition substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Measuring Temperature Or Quantity Of Heat (AREA)
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987160473U JPH0165855U (OSRAM) | 1987-10-20 | 1987-10-20 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987160473U JPH0165855U (OSRAM) | 1987-10-20 | 1987-10-20 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0165855U true JPH0165855U (OSRAM) | 1989-04-27 |
Family
ID=31442566
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987160473U Pending JPH0165855U (OSRAM) | 1987-10-20 | 1987-10-20 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0165855U (OSRAM) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60215759A (ja) * | 1984-04-09 | 1985-10-29 | Mitsubishi Electric Corp | 薄膜形成装置 |
| JPS61250949A (ja) * | 1985-04-30 | 1986-11-08 | Ulvac Corp | 加速管 |
-
1987
- 1987-10-20 JP JP1987160473U patent/JPH0165855U/ja active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60215759A (ja) * | 1984-04-09 | 1985-10-29 | Mitsubishi Electric Corp | 薄膜形成装置 |
| JPS61250949A (ja) * | 1985-04-30 | 1986-11-08 | Ulvac Corp | 加速管 |