JPH0165852U - - Google Patents
Info
- Publication number
- JPH0165852U JPH0165852U JP1987162372U JP16237287U JPH0165852U JP H0165852 U JPH0165852 U JP H0165852U JP 1987162372 U JP1987162372 U JP 1987162372U JP 16237287 U JP16237287 U JP 16237287U JP H0165852 U JPH0165852 U JP H0165852U
- Authority
- JP
- Japan
- Prior art keywords
- source
- evaporation source
- deposition
- deposition source
- semiconductor manufacturing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000008021 deposition Effects 0.000 claims description 6
- 238000004519 manufacturing process Methods 0.000 claims description 5
- 239000004065 semiconductor Substances 0.000 claims description 5
- 238000007740 vapor deposition Methods 0.000 claims description 3
- 238000010894 electron beam technology Methods 0.000 claims description 2
- 230000008020 evaporation Effects 0.000 claims 4
- 238000001704 evaporation Methods 0.000 claims 4
- 230000003028 elevating effect Effects 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987162372U JPH0165852U (en, 2012) | 1987-10-22 | 1987-10-22 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987162372U JPH0165852U (en, 2012) | 1987-10-22 | 1987-10-22 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0165852U true JPH0165852U (en, 2012) | 1989-04-27 |
Family
ID=31446136
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987162372U Pending JPH0165852U (en, 2012) | 1987-10-22 | 1987-10-22 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0165852U (en, 2012) |
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1987
- 1987-10-22 JP JP1987162372U patent/JPH0165852U/ja active Pending