JPH0165163U - - Google Patents
Info
- Publication number
- JPH0165163U JPH0165163U JP1987161609U JP16160987U JPH0165163U JP H0165163 U JPH0165163 U JP H0165163U JP 1987161609 U JP1987161609 U JP 1987161609U JP 16160987 U JP16160987 U JP 16160987U JP H0165163 U JPH0165163 U JP H0165163U
- Authority
- JP
- Japan
- Prior art keywords
- window
- gas
- partition wall
- window holder
- laser chamber
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Lasers (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987161609U JPH0165163U (en:Method) | 1987-10-21 | 1987-10-21 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987161609U JPH0165163U (en:Method) | 1987-10-21 | 1987-10-21 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0165163U true JPH0165163U (en:Method) | 1989-04-26 |
Family
ID=31444701
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987161609U Pending JPH0165163U (en:Method) | 1987-10-21 | 1987-10-21 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0165163U (en:Method) |
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1987
- 1987-10-21 JP JP1987161609U patent/JPH0165163U/ja active Pending