JPH0165163U - - Google Patents

Info

Publication number
JPH0165163U
JPH0165163U JP1987161609U JP16160987U JPH0165163U JP H0165163 U JPH0165163 U JP H0165163U JP 1987161609 U JP1987161609 U JP 1987161609U JP 16160987 U JP16160987 U JP 16160987U JP H0165163 U JPH0165163 U JP H0165163U
Authority
JP
Japan
Prior art keywords
window
gas
partition wall
window holder
laser chamber
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1987161609U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1987161609U priority Critical patent/JPH0165163U/ja
Publication of JPH0165163U publication Critical patent/JPH0165163U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Lasers (AREA)
JP1987161609U 1987-10-21 1987-10-21 Pending JPH0165163U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987161609U JPH0165163U (enrdf_load_stackoverflow) 1987-10-21 1987-10-21

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987161609U JPH0165163U (enrdf_load_stackoverflow) 1987-10-21 1987-10-21

Publications (1)

Publication Number Publication Date
JPH0165163U true JPH0165163U (enrdf_load_stackoverflow) 1989-04-26

Family

ID=31444701

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987161609U Pending JPH0165163U (enrdf_load_stackoverflow) 1987-10-21 1987-10-21

Country Status (1)

Country Link
JP (1) JPH0165163U (enrdf_load_stackoverflow)

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