JPH0163129U - - Google Patents

Info

Publication number
JPH0163129U
JPH0163129U JP1987159048U JP15904887U JPH0163129U JP H0163129 U JPH0163129 U JP H0163129U JP 1987159048 U JP1987159048 U JP 1987159048U JP 15904887 U JP15904887 U JP 15904887U JP H0163129 U JPH0163129 U JP H0163129U
Authority
JP
Japan
Prior art keywords
driving
operating means
auxiliary
driving means
main operating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1987159048U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1987159048U priority Critical patent/JPH0163129U/ja
Publication of JPH0163129U publication Critical patent/JPH0163129U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
JP1987159048U 1987-10-16 1987-10-16 Pending JPH0163129U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987159048U JPH0163129U (enrdf_load_stackoverflow) 1987-10-16 1987-10-16

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987159048U JPH0163129U (enrdf_load_stackoverflow) 1987-10-16 1987-10-16

Publications (1)

Publication Number Publication Date
JPH0163129U true JPH0163129U (enrdf_load_stackoverflow) 1989-04-24

Family

ID=31439914

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987159048U Pending JPH0163129U (enrdf_load_stackoverflow) 1987-10-16 1987-10-16

Country Status (1)

Country Link
JP (1) JPH0163129U (enrdf_load_stackoverflow)

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