JPH0163129U - - Google Patents
Info
- Publication number
- JPH0163129U JPH0163129U JP1987159048U JP15904887U JPH0163129U JP H0163129 U JPH0163129 U JP H0163129U JP 1987159048 U JP1987159048 U JP 1987159048U JP 15904887 U JP15904887 U JP 15904887U JP H0163129 U JPH0163129 U JP H0163129U
- Authority
- JP
- Japan
- Prior art keywords
- driving
- operating means
- auxiliary
- driving means
- main operating
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987159048U JPH0163129U (cs) | 1987-10-16 | 1987-10-16 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987159048U JPH0163129U (cs) | 1987-10-16 | 1987-10-16 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0163129U true JPH0163129U (cs) | 1989-04-24 |
Family
ID=31439914
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987159048U Pending JPH0163129U (cs) | 1987-10-16 | 1987-10-16 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0163129U (cs) |
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1987
- 1987-10-16 JP JP1987159048U patent/JPH0163129U/ja active Pending