JPH0162650U - - Google Patents

Info

Publication number
JPH0162650U
JPH0162650U JP1987156397U JP15639787U JPH0162650U JP H0162650 U JPH0162650 U JP H0162650U JP 1987156397 U JP1987156397 U JP 1987156397U JP 15639787 U JP15639787 U JP 15639787U JP H0162650 U JPH0162650 U JP H0162650U
Authority
JP
Japan
Prior art keywords
probe
sample
micro
positioning mechanism
influence
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1987156397U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1987156397U priority Critical patent/JPH0162650U/ja
Publication of JPH0162650U publication Critical patent/JPH0162650U/ja
Pending legal-status Critical Current

Links

JP1987156397U 1987-10-13 1987-10-13 Pending JPH0162650U (enExample)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987156397U JPH0162650U (enExample) 1987-10-13 1987-10-13

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987156397U JPH0162650U (enExample) 1987-10-13 1987-10-13

Publications (1)

Publication Number Publication Date
JPH0162650U true JPH0162650U (enExample) 1989-04-21

Family

ID=31434899

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987156397U Pending JPH0162650U (enExample) 1987-10-13 1987-10-13

Country Status (1)

Country Link
JP (1) JPH0162650U (enExample)

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