JPH0162358U - - Google Patents
Info
- Publication number
- JPH0162358U JPH0162358U JP15897387U JP15897387U JPH0162358U JP H0162358 U JPH0162358 U JP H0162358U JP 15897387 U JP15897387 U JP 15897387U JP 15897387 U JP15897387 U JP 15897387U JP H0162358 U JPH0162358 U JP H0162358U
- Authority
- JP
- Japan
- Prior art keywords
- vacuum chamber
- target material
- support
- chamber wall
- fitted
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000013077 target material Substances 0.000 claims description 6
- 238000004544 sputter deposition Methods 0.000 claims 1
- 238000001816 cooling Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15897387U JPH0162358U (enExample) | 1987-10-16 | 1987-10-16 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15897387U JPH0162358U (enExample) | 1987-10-16 | 1987-10-16 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0162358U true JPH0162358U (enExample) | 1989-04-20 |
Family
ID=31439774
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15897387U Pending JPH0162358U (enExample) | 1987-10-16 | 1987-10-16 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0162358U (enExample) |
-
1987
- 1987-10-16 JP JP15897387U patent/JPH0162358U/ja active Pending