JPH0162358U - - Google Patents

Info

Publication number
JPH0162358U
JPH0162358U JP15897387U JP15897387U JPH0162358U JP H0162358 U JPH0162358 U JP H0162358U JP 15897387 U JP15897387 U JP 15897387U JP 15897387 U JP15897387 U JP 15897387U JP H0162358 U JPH0162358 U JP H0162358U
Authority
JP
Japan
Prior art keywords
vacuum chamber
target material
support
chamber wall
fitted
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP15897387U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP15897387U priority Critical patent/JPH0162358U/ja
Publication of JPH0162358U publication Critical patent/JPH0162358U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP15897387U 1987-10-16 1987-10-16 Pending JPH0162358U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15897387U JPH0162358U (enrdf_load_stackoverflow) 1987-10-16 1987-10-16

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15897387U JPH0162358U (enrdf_load_stackoverflow) 1987-10-16 1987-10-16

Publications (1)

Publication Number Publication Date
JPH0162358U true JPH0162358U (enrdf_load_stackoverflow) 1989-04-20

Family

ID=31439774

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15897387U Pending JPH0162358U (enrdf_load_stackoverflow) 1987-10-16 1987-10-16

Country Status (1)

Country Link
JP (1) JPH0162358U (enrdf_load_stackoverflow)

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