JPH0162357U - - Google Patents

Info

Publication number
JPH0162357U
JPH0162357U JP12963088U JP12963088U JPH0162357U JP H0162357 U JPH0162357 U JP H0162357U JP 12963088 U JP12963088 U JP 12963088U JP 12963088 U JP12963088 U JP 12963088U JP H0162357 U JPH0162357 U JP H0162357U
Authority
JP
Japan
Prior art keywords
sputtering
anode
target
cylindrical
anodes
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP12963088U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0136910Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP12963088U priority Critical patent/JPH0136910Y2/ja
Publication of JPH0162357U publication Critical patent/JPH0162357U/ja
Application granted granted Critical
Publication of JPH0136910Y2 publication Critical patent/JPH0136910Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Photoreceptors In Electrophotography (AREA)
  • Physical Vapour Deposition (AREA)
JP12963088U 1988-10-04 1988-10-04 Expired JPH0136910Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12963088U JPH0136910Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1988-10-04 1988-10-04

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12963088U JPH0136910Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1988-10-04 1988-10-04

Publications (2)

Publication Number Publication Date
JPH0162357U true JPH0162357U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1989-04-20
JPH0136910Y2 JPH0136910Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1989-11-08

Family

ID=31384082

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12963088U Expired JPH0136910Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1988-10-04 1988-10-04

Country Status (1)

Country Link
JP (1) JPH0136910Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Also Published As

Publication number Publication date
JPH0136910Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1989-11-08

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