JPH0161641U - - Google Patents

Info

Publication number
JPH0161641U
JPH0161641U JP15691187U JP15691187U JPH0161641U JP H0161641 U JPH0161641 U JP H0161641U JP 15691187 U JP15691187 U JP 15691187U JP 15691187 U JP15691187 U JP 15691187U JP H0161641 U JPH0161641 U JP H0161641U
Authority
JP
Japan
Prior art keywords
base
top surface
wafer
indicate
scale provided
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP15691187U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP15691187U priority Critical patent/JPH0161641U/ja
Publication of JPH0161641U publication Critical patent/JPH0161641U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Investigating Strength Of Materials By Application Of Mechanical Stress (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP15691187U 1987-10-13 1987-10-13 Pending JPH0161641U (US20020051482A1-20020502-M00020.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15691187U JPH0161641U (US20020051482A1-20020502-M00020.png) 1987-10-13 1987-10-13

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15691187U JPH0161641U (US20020051482A1-20020502-M00020.png) 1987-10-13 1987-10-13

Publications (1)

Publication Number Publication Date
JPH0161641U true JPH0161641U (US20020051482A1-20020502-M00020.png) 1989-04-19

Family

ID=31435880

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15691187U Pending JPH0161641U (US20020051482A1-20020502-M00020.png) 1987-10-13 1987-10-13

Country Status (1)

Country Link
JP (1) JPH0161641U (US20020051482A1-20020502-M00020.png)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011027430A (ja) * 2009-07-21 2011-02-10 Sumco Corp シリコンウェーハの機械的強度測定装置および測定方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011027430A (ja) * 2009-07-21 2011-02-10 Sumco Corp シリコンウェーハの機械的強度測定装置および測定方法

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