JPH0161471U - - Google Patents
Info
- Publication number
- JPH0161471U JPH0161471U JP15608987U JP15608987U JPH0161471U JP H0161471 U JPH0161471 U JP H0161471U JP 15608987 U JP15608987 U JP 15608987U JP 15608987 U JP15608987 U JP 15608987U JP H0161471 U JPH0161471 U JP H0161471U
- Authority
- JP
- Japan
- Prior art keywords
- cycle
- refrigerator
- cryopump
- pump case
- stage
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005057 refrigeration Methods 0.000 claims 1
- 238000007796 conventional method Methods 0.000 description 1
Landscapes
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15608987U JPH0161471U (fi) | 1987-10-14 | 1987-10-14 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15608987U JPH0161471U (fi) | 1987-10-14 | 1987-10-14 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH0161471U true JPH0161471U (fi) | 1989-04-19 |
Family
ID=31434304
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP15608987U Pending JPH0161471U (fi) | 1987-10-14 | 1987-10-14 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0161471U (fi) |
-
1987
- 1987-10-14 JP JP15608987U patent/JPH0161471U/ja active Pending