JPH0160895B2 - - Google Patents
Info
- Publication number
- JPH0160895B2 JPH0160895B2 JP55167487A JP16748780A JPH0160895B2 JP H0160895 B2 JPH0160895 B2 JP H0160895B2 JP 55167487 A JP55167487 A JP 55167487A JP 16748780 A JP16748780 A JP 16748780A JP H0160895 B2 JPH0160895 B2 JP H0160895B2
- Authority
- JP
- Japan
- Prior art keywords
- vacuum chamber
- beryllium
- extraction window
- ray
- present
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000000605 extraction Methods 0.000 claims description 10
- 229910052790 beryllium Inorganic materials 0.000 claims description 9
- ATBAMAFKBVZNFJ-UHFFFAOYSA-N beryllium atom Chemical compound [Be] ATBAMAFKBVZNFJ-UHFFFAOYSA-N 0.000 claims description 9
- 239000010408 film Substances 0.000 claims description 4
- 238000000034 method Methods 0.000 claims description 4
- 230000001681 protective effect Effects 0.000 claims description 4
- 239000010409 thin film Substances 0.000 claims description 2
- 230000015572 biosynthetic process Effects 0.000 claims 1
- CBENFWSGALASAD-UHFFFAOYSA-N Ozone Chemical compound [O-][O+]=O CBENFWSGALASAD-UHFFFAOYSA-N 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 238000007733 ion plating Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000002834 transmittance Methods 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J35/00—X-ray tubes
- H01J35/02—Details
- H01J35/16—Vessels; Containers; Shields associated therewith
- H01J35/18—Windows
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2235/00—X-ray tubes
- H01J2235/18—Windows, e.g. for X-ray transmission
- H01J2235/183—Multi-layer structures
Landscapes
- X-Ray Techniques (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP55167487A JPS5790857A (en) | 1980-11-28 | 1980-11-28 | X-ray radiation system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP55167487A JPS5790857A (en) | 1980-11-28 | 1980-11-28 | X-ray radiation system |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5790857A JPS5790857A (en) | 1982-06-05 |
| JPH0160895B2 true JPH0160895B2 (ru) | 1989-12-26 |
Family
ID=15850586
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP55167487A Granted JPS5790857A (en) | 1980-11-28 | 1980-11-28 | X-ray radiation system |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5790857A (ru) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH034455U (ru) * | 1989-06-01 | 1991-01-17 |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5730746Y2 (en) * | 1977-03-31 | 1982-07-06 | Tokyo Shibaura Electric Co.Ltd | X-ray tube |
-
1980
- 1980-11-28 JP JP55167487A patent/JPS5790857A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5790857A (en) | 1982-06-05 |
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