JPH0160538U - - Google Patents
Info
- Publication number
- JPH0160538U JPH0160538U JP15578987U JP15578987U JPH0160538U JP H0160538 U JPH0160538 U JP H0160538U JP 15578987 U JP15578987 U JP 15578987U JP 15578987 U JP15578987 U JP 15578987U JP H0160538 U JPH0160538 U JP H0160538U
- Authority
- JP
- Japan
- Prior art keywords
- stage
- processed
- fixing
- semiconductor manufacturing
- clamp pieces
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000463 material Substances 0.000 claims description 9
- 238000004519 manufacturing process Methods 0.000 claims 4
- 239000004065 semiconductor Substances 0.000 claims 4
- 230000007423 decrease Effects 0.000 claims 1
- 230000006835 compression Effects 0.000 description 1
- 238000007906 compression Methods 0.000 description 1
Landscapes
- Jigs For Machine Tools (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987155789U JPH0617299Y2 (ja) | 1987-10-12 | 1987-10-12 | 半導体製造装置用ステージへの被処理材固定装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987155789U JPH0617299Y2 (ja) | 1987-10-12 | 1987-10-12 | 半導体製造装置用ステージへの被処理材固定装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0160538U true JPH0160538U (da) | 1989-04-17 |
| JPH0617299Y2 JPH0617299Y2 (ja) | 1994-05-02 |
Family
ID=31433727
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987155789U Expired - Lifetime JPH0617299Y2 (ja) | 1987-10-12 | 1987-10-12 | 半導体製造装置用ステージへの被処理材固定装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0617299Y2 (da) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6010983U (ja) * | 1983-07-02 | 1985-01-25 | 住友電気工業株式会社 | 補強入りポリエチレンパイプ |
| JPS6023240A (ja) * | 1983-06-28 | 1985-02-05 | ウインドメ−レル・ウント・ヘルシエル | 平らな加工片を重なり合う関係に変換する装置 |
-
1987
- 1987-10-12 JP JP1987155789U patent/JPH0617299Y2/ja not_active Expired - Lifetime
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6023240A (ja) * | 1983-06-28 | 1985-02-05 | ウインドメ−レル・ウント・ヘルシエル | 平らな加工片を重なり合う関係に変換する装置 |
| JPS6010983U (ja) * | 1983-07-02 | 1985-01-25 | 住友電気工業株式会社 | 補強入りポリエチレンパイプ |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0617299Y2 (ja) | 1994-05-02 |
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