JPH0159865U - - Google Patents
Info
- Publication number
- JPH0159865U JPH0159865U JP15560587U JP15560587U JPH0159865U JP H0159865 U JPH0159865 U JP H0159865U JP 15560587 U JP15560587 U JP 15560587U JP 15560587 U JP15560587 U JP 15560587U JP H0159865 U JPH0159865 U JP H0159865U
- Authority
- JP
- Japan
- Prior art keywords
- reticle
- sensor
- optical fibers
- spatial filter
- illumination section
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000013307 optical fiber Substances 0.000 claims description 3
- 238000005286 illumination Methods 0.000 claims 2
- 230000007423 decrease Effects 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 4
Landscapes
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15560587U JPH0159865U (de) | 1987-10-13 | 1987-10-13 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15560587U JPH0159865U (de) | 1987-10-13 | 1987-10-13 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0159865U true JPH0159865U (de) | 1989-04-14 |
Family
ID=31433381
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15560587U Pending JPH0159865U (de) | 1987-10-13 | 1987-10-13 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0159865U (de) |
-
1987
- 1987-10-13 JP JP15560587U patent/JPH0159865U/ja active Pending