JPH0158932U - - Google Patents
Info
- Publication number
- JPH0158932U JPH0158932U JP15322987U JP15322987U JPH0158932U JP H0158932 U JPH0158932 U JP H0158932U JP 15322987 U JP15322987 U JP 15322987U JP 15322987 U JP15322987 U JP 15322987U JP H0158932 U JPH0158932 U JP H0158932U
- Authority
- JP
- Japan
- Prior art keywords
- mask substrate
- mask
- ray
- ray exposure
- exposure mask
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15322987U JPH0158932U (enExample) | 1987-10-08 | 1987-10-08 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15322987U JPH0158932U (enExample) | 1987-10-08 | 1987-10-08 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0158932U true JPH0158932U (enExample) | 1989-04-13 |
Family
ID=31428877
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15322987U Pending JPH0158932U (enExample) | 1987-10-08 | 1987-10-08 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0158932U (enExample) |
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1987
- 1987-10-08 JP JP15322987U patent/JPH0158932U/ja active Pending