JPH0158932U - - Google Patents

Info

Publication number
JPH0158932U
JPH0158932U JP15322987U JP15322987U JPH0158932U JP H0158932 U JPH0158932 U JP H0158932U JP 15322987 U JP15322987 U JP 15322987U JP 15322987 U JP15322987 U JP 15322987U JP H0158932 U JPH0158932 U JP H0158932U
Authority
JP
Japan
Prior art keywords
mask substrate
mask
ray
ray exposure
exposure mask
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP15322987U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP15322987U priority Critical patent/JPH0158932U/ja
Publication of JPH0158932U publication Critical patent/JPH0158932U/ja
Pending legal-status Critical Current

Links

JP15322987U 1987-10-08 1987-10-08 Pending JPH0158932U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15322987U JPH0158932U (enrdf_load_stackoverflow) 1987-10-08 1987-10-08

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15322987U JPH0158932U (enrdf_load_stackoverflow) 1987-10-08 1987-10-08

Publications (1)

Publication Number Publication Date
JPH0158932U true JPH0158932U (enrdf_load_stackoverflow) 1989-04-13

Family

ID=31428877

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15322987U Pending JPH0158932U (enrdf_load_stackoverflow) 1987-10-08 1987-10-08

Country Status (1)

Country Link
JP (1) JPH0158932U (enrdf_load_stackoverflow)

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