JPH0158931U - - Google Patents
Info
- Publication number
- JPH0158931U JPH0158931U JP15433287U JP15433287U JPH0158931U JP H0158931 U JPH0158931 U JP H0158931U JP 15433287 U JP15433287 U JP 15433287U JP 15433287 U JP15433287 U JP 15433287U JP H0158931 U JPH0158931 U JP H0158931U
- Authority
- JP
- Japan
- Prior art keywords
- cap
- pull
- wafer boat
- out rod
- support part
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004519 manufacturing process Methods 0.000 claims 2
- 239000004065 semiconductor Substances 0.000 claims 2
- 230000007723 transport mechanism Effects 0.000 claims 2
Landscapes
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15433287U JPH0158931U (enExample) | 1987-10-07 | 1987-10-07 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15433287U JPH0158931U (enExample) | 1987-10-07 | 1987-10-07 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0158931U true JPH0158931U (enExample) | 1989-04-13 |
Family
ID=31430968
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15433287U Pending JPH0158931U (enExample) | 1987-10-07 | 1987-10-07 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0158931U (enExample) |
-
1987
- 1987-10-07 JP JP15433287U patent/JPH0158931U/ja active Pending