JPH0158660U - - Google Patents

Info

Publication number
JPH0158660U
JPH0158660U JP15239787U JP15239787U JPH0158660U JP H0158660 U JPH0158660 U JP H0158660U JP 15239787 U JP15239787 U JP 15239787U JP 15239787 U JP15239787 U JP 15239787U JP H0158660 U JPH0158660 U JP H0158660U
Authority
JP
Japan
Prior art keywords
processing chamber
wafer
holder
chamber
processing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP15239787U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0745561Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1987152397U priority Critical patent/JPH0745561Y2/ja
Publication of JPH0158660U publication Critical patent/JPH0158660U/ja
Application granted granted Critical
Publication of JPH0745561Y2 publication Critical patent/JPH0745561Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
JP1987152397U 1987-10-05 1987-10-05 イオン処理装置 Expired - Lifetime JPH0745561Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987152397U JPH0745561Y2 (ja) 1987-10-05 1987-10-05 イオン処理装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987152397U JPH0745561Y2 (ja) 1987-10-05 1987-10-05 イオン処理装置

Publications (2)

Publication Number Publication Date
JPH0158660U true JPH0158660U (US20030204162A1-20031030-M00001.png) 1989-04-12
JPH0745561Y2 JPH0745561Y2 (ja) 1995-10-18

Family

ID=31427284

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987152397U Expired - Lifetime JPH0745561Y2 (ja) 1987-10-05 1987-10-05 イオン処理装置

Country Status (1)

Country Link
JP (1) JPH0745561Y2 (US20030204162A1-20031030-M00001.png)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6280268A (ja) * 1985-10-04 1987-04-13 Hitachi Ltd 微細加工用真空装置

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6280268A (ja) * 1985-10-04 1987-04-13 Hitachi Ltd 微細加工用真空装置

Also Published As

Publication number Publication date
JPH0745561Y2 (ja) 1995-10-18

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