JPH0158109U - - Google Patents

Info

Publication number
JPH0158109U
JPH0158109U JP15392987U JP15392987U JPH0158109U JP H0158109 U JPH0158109 U JP H0158109U JP 15392987 U JP15392987 U JP 15392987U JP 15392987 U JP15392987 U JP 15392987U JP H0158109 U JPH0158109 U JP H0158109U
Authority
JP
Japan
Prior art keywords
contact
touch probe
vibrator
state
vibrating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP15392987U
Other languages
English (en)
Japanese (ja)
Other versions
JPH055442Y2 (en, 2012
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP15392987U priority Critical patent/JPH055442Y2/ja
Publication of JPH0158109U publication Critical patent/JPH0158109U/ja
Application granted granted Critical
Publication of JPH055442Y2 publication Critical patent/JPH055442Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)
JP15392987U 1987-10-07 1987-10-07 Expired - Lifetime JPH055442Y2 (en, 2012)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15392987U JPH055442Y2 (en, 2012) 1987-10-07 1987-10-07

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15392987U JPH055442Y2 (en, 2012) 1987-10-07 1987-10-07

Publications (2)

Publication Number Publication Date
JPH0158109U true JPH0158109U (en, 2012) 1989-04-11
JPH055442Y2 JPH055442Y2 (en, 2012) 1993-02-12

Family

ID=31430199

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15392987U Expired - Lifetime JPH055442Y2 (en, 2012) 1987-10-07 1987-10-07

Country Status (1)

Country Link
JP (1) JPH055442Y2 (en, 2012)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0269613A (ja) * 1988-07-20 1990-03-08 Carl Zeiss:Fa プローブヘツドを運転する方法及び装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0269613A (ja) * 1988-07-20 1990-03-08 Carl Zeiss:Fa プローブヘツドを運転する方法及び装置

Also Published As

Publication number Publication date
JPH055442Y2 (en, 2012) 1993-02-12

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