JPH0158109U - - Google Patents

Info

Publication number
JPH0158109U
JPH0158109U JP15392987U JP15392987U JPH0158109U JP H0158109 U JPH0158109 U JP H0158109U JP 15392987 U JP15392987 U JP 15392987U JP 15392987 U JP15392987 U JP 15392987U JP H0158109 U JPH0158109 U JP H0158109U
Authority
JP
Japan
Prior art keywords
contact
touch probe
vibrator
state
vibrating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP15392987U
Other languages
English (en)
Japanese (ja)
Other versions
JPH055442Y2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP15392987U priority Critical patent/JPH055442Y2/ja
Publication of JPH0158109U publication Critical patent/JPH0158109U/ja
Application granted granted Critical
Publication of JPH055442Y2 publication Critical patent/JPH055442Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices With Unspecified Measuring Means (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
JP15392987U 1987-10-07 1987-10-07 Expired - Lifetime JPH055442Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15392987U JPH055442Y2 (enrdf_load_stackoverflow) 1987-10-07 1987-10-07

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15392987U JPH055442Y2 (enrdf_load_stackoverflow) 1987-10-07 1987-10-07

Publications (2)

Publication Number Publication Date
JPH0158109U true JPH0158109U (enrdf_load_stackoverflow) 1989-04-11
JPH055442Y2 JPH055442Y2 (enrdf_load_stackoverflow) 1993-02-12

Family

ID=31430199

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15392987U Expired - Lifetime JPH055442Y2 (enrdf_load_stackoverflow) 1987-10-07 1987-10-07

Country Status (1)

Country Link
JP (1) JPH055442Y2 (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0269613A (ja) * 1988-07-20 1990-03-08 Carl Zeiss:Fa プローブヘツドを運転する方法及び装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0269613A (ja) * 1988-07-20 1990-03-08 Carl Zeiss:Fa プローブヘツドを運転する方法及び装置

Also Published As

Publication number Publication date
JPH055442Y2 (enrdf_load_stackoverflow) 1993-02-12

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