JPH01500222A - Gas detection method and device using chemisorption and/or physical adsorption - Google Patents

Abstract

(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

[Detailed description of the invention] chemisorption and/or physical adsorption Gas detection method and device used Technical field The present invention generally describes a gas detection method that utilizes a capacitor having a solid electrolyte dielectric. In particular, if the capacitor is energized by the AC power source, Methods and apparatus for measuring chemisorption and/or physisorption effects Regarding.

Background technology The proposed prior art gas detection device uses lanthanum fluoride (LaFs). ) utilizes capacitors with solid electrolytes, i.e. ions, dielectrics. . Previously, such gas detection devices relied on a DC voltage applied between the electrodes of a capacitor. As the pressure changes as a function of the type and amount of gas incident on the dielectric, the C potential difference It was working in a certain way. However, the DC potential difference method requires The lack of lift and offset due to polarization effects of the DC voltage applied to the electrodes There is a point. These phenomena include both quantitative and qualitative detector readouts. It tends to have a negative impact on accuracy.

Some results of proposed prior art gas detectors utilizing solid electrolyte dielectrics Those required the dielectric to operate at elevated temperatures. This drawback is due to the fact that fluoride Although it does not occur depending on the temperature, it supplies heat to raise the dielectric temperature. The power required for this reduces the efficiency of the detector. solid electrolyte dielectric Prior art gas detection devices and methods that utilize capacitors with Only a limited number of gases could be detected at any given time.

By using a capacitor with a solid electrolyte dielectric, the humidity of the surrounding atmosphere It is desirable to detect However, with solid electrolyte dielectric for humidity detection Conventional configurations that utilize capacitors with It has been plagued by inaccuracies because it affects the impedance of the sensor.

Therefore, the object of the present invention is to use a solid electrolyte, i.e. a capacitor with an ion, dielectric material. New and improved method and apparatus for detecting gas by using a sensor The goal is to provide the following.

Another object of the invention is to provide a core having a solid electrolyte dielectric that is responsive to a relatively large number of gases. using Ndensa.

A new and improved gas that provides accurate quantitative and qualitative information about the gas. An object of the present invention is to provide a method and apparatus for detecting a gas.

Yet another object of the invention is to provide a method for accurate quantitative and quantitative analysis at room temperature. New and improved gas detection method utilizing capacitors with solid electrolyte dielectrics The objective is to provide methods and equipment.

Still another object of the present invention is to provide a solid state electrolytic solution that is accurate over a wide range of temperatures and New and improved temperature and/or temperature capacitors utilizing capacitors with high quality dielectrics An object of the present invention is to provide a humidity detector.

Still another object of the present invention is to provide a capacitor using a solid electrolyte dielectric in a chamber. Provides accurate quantitative and capacity information about ambient gases, such as operating at high temperatures. It is an object of the present invention to provide new and improved methods and apparatus.

Disclosure of invention According to seven aspects of the invention, a new and improved gas detection method and apparatus includes: to perform a physical adsorption reaction and/or chemisorption reaction with the gas to be detected. Capacitive means with operating solid electrolytes, ie ions, and dielectrics are included.

Physical adsorption, here referred to as physisorption, is the interaction between a solid adsorbent and an adsorbed molecule. It depends on the physical force of attraction, that is, the 7A/Der Waals force. permanent dipole moment Molecules with occurs, but still interacts with the solid dielectric in a process that leaves the molecules intact. be able to. Physical adsorption has little chemical specificity, so if the solid is at a sufficiently low temperature or any gas can be absorbed onto a solid if the gas is at a sufficiently high pressure. It tends to be worn. In chemical adsorption, even if the adsorbent is dielectric or Even if it is not a dielectric, a chemical reaction can occur in a mixture of gases incident on it. Ru. The products of this reaction are adsorbed by an adsorbent. In some embodiments The adsorbent for the chemical adsorption reaction is a catalytic electrode on a dielectric material. Gas is an adsorbent held by chemical forces. Chemical reactions are caused by electric charges present at the gas/surface interface. sb can be modified by the field.

In the physical adsorption process of the present invention, molecules of the gas to be detected are contained in a solid electrolyte. When incident on the surface of a dielectric, it changes the space charge on that surface.

The dielectric surface exposed to this molecule adsorbs the molecule and as a result the capacitor/pair This produces surface effects that induce changes in the solid dielectric between the electrodes. change in space charge This makes it possible to effectively monitor the capacitor impedance between the capacitor electrodes. Therefore, it is displayed.

The physisorption effect or reaction has polar molecules such as H20 and H2S. Particularly suitable for detecting gases. The physical adsorption effect is caused by the capacitor electrode K. is preferably monitored by connecting a relatively low amplitude voltage of AC. electric The voltage across the poles is kept small enough to prevent field-supported chemisorption; It is typically in the range of 1 to 100 mV.

The physisorption process is independent of the nature of the applied voltage, and pulsed DC voltage can be measured as a transient current response to an applied AC voltage or as a response to an applied AC voltage. can. It is preferable to use AC detection mode, thus avoiding the generation of unwanted side reactions. The compounds are alternately absorbed and repelled from the dielectric surface during each cycle of AC power. be attached or detached. For the space charge response to the physisorption process, the Officially, 30kh is the maximum frequency. In actual use cases, the frequency is approximately 0 ．． It is placed in the range of 0.03 to 30 Hz.

For some gases, physical adsorption reactions are temperature dependent. This means water vapor This is especially true when the gas is sensed to measure the relative humidity of the surrounding area. Sen The temperature of the capacitor is controlled by an AC voltage with an amplitude within the range that changes the space charge. It is measured by energizing the sensor. AC [pressure is the first relatively high frequency range the first capacitor circuit resistor and the first equivalent of the gas detection capacitor. The circuit capacitor responds. The first equivalent circuit resistor and capacitor are the first series etc. ion-hole movement through the dielectric thickness. The ionic resistance of the dielectric and the space charge of ions and holes in the dielectric are respectively expressed as represent. The first frequency range allows the surface space charge to contribute to the measurement signal. Things are expensive. For example, on the electrodes of a capacitor with a solid electrolyte dielectric. Apply a voltage with an amplitude in the range of /~100 mV at a frequency of /kHz represents the ambient temperature to which the dielectric is exposed, but the ambient humidity produces an insensitive response. This response corresponds to amplitudes in the l~/00 mV range. Response of a capacitor to an energizing voltage having a width and a frequency in the range 0.03 to 30 Hz combined with the answer to derive the relative humidity reading, − 1゛　It has been modified to explain the temperature You can become what you do.

In the chemisorption process according to the invention, molecules of the gas being detected are Due to the influence of the AC voltage applied to the surface of the solute dielectric, the catalyst of the dielectric It reacts chemically. The chemisorption reactions are referred to here as A, B, C and D. It can be classified into several classes. Class A, B, C and D chemical absorption In the second series equivalent circuit which shunts the first equivalent circuit capacitor by the arrival reaction, The values of the connected second equivalent circuit capacitor and second equivalent circuit resistor are changed.

The value of the first equivalent circuit capacitor is much larger than that of the first equivalent circuit capacitor. Therefore, the gas parameters generated from the chemisorption reaction are determined by the component values of the second equivalent circuit. Allows to be detected in response to changes in impedance at the slip detector terminals Make it. The change in impedance causes the detector to have a lower second frequency that is higher than the first range. Detected by applying power in a range of numbers. The component values of the first equivalent circuit are The 4t classes, which are not effectively modified by range biasing, are as follows: It is classified as a sea urchin.

Class A1 analysis gases are resistant to low AC or DC amplitude electric fields, F, surface and therefore its effect is independent of the amplitude of any applied Act or BC voltage. It has become irrelevant.

Class B1 analyte gases react independently of the amplitude of the applied AC or BC voltage, but Only in the presence of a catalyst (usually the top electrode material).

Class C1 analysis gas is applied to the sensor dielectric making the senna action voltage amplitude dependent. driven by an applied electric field (an example of such an analysis gas is a non-polar oxidizing gas o 2. so□, No□1, etc.).

The second gas D1 analysis gas is detected when there is a second gas species incident on the dielectric. (Examples of such analytical gases are hydrocarbons, CH4, etc.).

In the chemisorption process, capacitors containing solid electrolyte dielectrics fall into the second range. reeds, and sufficient to form negative oxygen ion (O-) species on the dielectric surface. energized by any AC voltage with a large amplitude. 〇Required to form a type The amplitude is different for different gases. Depending on the good catalyst, to provide a novel room temperature hydrocarbon sensor. Voltage is solid dielectric There is no way it could be so large as to cause destruction throughout the body. Induces chemisorption process AC to guide you! The frequency of the voltage sweeps the molecules into the dielectric during each cycle of the power supply. must be low enough to repel other molecules. Therefore, AC chemisorption excitation The frequency and amplitude of is 5, typically about 0, /~3 gilts and about 0.03~ It is placed in the range of 30kh.

In the chemisorption process, oxygen is adsorbed at the dielectric surface. This adsorption The released oxygen captures electrons from the metal catalyst electrode on the dielectric material12, and oxygen ions are generated on the surface of the dielectric material. On is formed to increase the conductivity of the dielectric. reduction such as methane (CH,) If gas is detected, this reducing gas reacts with ionized oxygen to increase the dielectric conductivity. decrease.

A solid electrolyte, i.e., a component with an ionic, dielectric material, that utilizes a chemisorption process. Gas sensors using capacitors have been developed for some time. such a transformation The gas detector based on chemical adsorption is DC11! Operates in measurement mode, and Dilute fluoride has been used as a dielectric material. DC1 flow measurement method is used. Impurities in the silk/silk shield are constantly driven, impairing the performance and accuracy of the sensor. have a negative impact on In particular, the rear contacts are exposed to the gas being detected, i.e. Contacts that touch non-dielectric surfaces are continuously oxidized, thereby oxidizing the rear electrode and Increases the resistance at the dielectric interface. On the other hand, tin oxide gas sensor Gas sensors based on chemisorption according to the prior art by using e.g. It is necessary to operate at a temperature above 3! Ta. Sensors based on prior art tin oxide and dilute ±7 fluoride current measurements are It is also sensitive to humidity. Tin oxide is deposited on a substrate typically formed as a cylinder. painted manually.

By using 7 fluoranthane as an electrical conductor, it is possible to eliminate the electrical Eliminating the need for power consuming heaters. with lanthanum fluoride electrolyte dielectric Impurities are removed from the dielectric bulk material by energizing the capacitor with an AC voltage. The tendency to be driven will disappear. Instead, the pure cine remains on the dielectric surface. AC'ft The magnitude of the pressure is sufficient to generate oxygen ions from atmospheric oxygen, but fluoride The breakdown voltage of lanthanum dielectric is small. Only during alternating half cycles of AC voltage The large dipole layer electric field of the fluoride carrier is modulated, thereby Molecules welded to the surface of the tantanium spread and easily split to release oxygen ion species. Occur. Therefore, during alternate half-cycles of the AC power supply, the capacitor will have a relatively high conductivity. Must have low conductivity and operate the detector in diode-like mode. .

Conversely, in the physical adsorption process, the resistance and capacitance of the second equalization circuit The changes are not sensitive to voltage applied to the dielectric. What is between the adsorbent and adsorbate molecules? There is no chemical reaction. Physically adsorbed polar gas reduces space charge thickness However, it is measured by the increase in the second equivalent circuit capacitance, which causes the detector to is detected by providing a second frequency range.

Fluorinated fluoride is particularly desirable as a solid electrolyte dielectric because it temperature, i.e. approximately 0'C6 or 3000k. This is because the gas can be detected. For example, oxygen and nitric oxide (N o), -arranged carbon (CO), and gases such as carbon dioxide (CO□) are 0. Provides an AC voltage in the range of 0.3 to 300 Hz with a frequency in the range of 0.3 to 30 Hz. It can be detected by a capacitor with a fluoride capacitor/current collector.

Influence of humidity on lanthanum heptafluoride, which is very sensitive to moisture in very low temperature ranges. by covering an inert or catalytic grid on lanthanum fluoride with a hydrophilic salt. Therefore, a hydrophobic coating on the lanthanum fluoride surface exposed to the gas, e.g. This can be minimized by covering it with a Teflon membrane, for example. Hydrophilic salt is fluorinated removes moisture from the lanthanum dielectric, whereas a linear water-based coating removes moisture on the dielectric. Prevents precipitation.

At very high temperatures, i.e. above 1 ooc, water evaporates and lanthanum fluoride Its effect on will be minimal.

In chemisorption mode, oxygen from the species to be detected is absorbed by the lanthanum fluoride. and is absorbed. Alternatively, the catalyst grid on the lanthanum heptafluoride changing the number of molecules between the catalyst grid and the reducing gas being sensed. adsorbed by fluorinated sulfur as a result of the interaction of

Electrons from the grid on the lanthanum fluoride dielectric move to adsorbed oxygen on the dielectric surface to form reactive intermediates such as oxygen ions (O2). The body oxygen ion is the one you are trying to detect, such as methane, glopane or carbon butane. Reacts with reducing gas. by the reaction between the reactive intermediate oxygen ion and the reducing gas Remove type ○ from the dielectric surface. Next, the redox gas is a lanthanum fluoride dielectric. is desorbed or emitted into the atmosphere from the surface of the This thing a sequence is chemistry It occurs in response to an applied AC voltage having an amplitude and frequency that causes an adsorption reaction to occur.

The components of the second equivalent circuit change in value in response to 0- fluctuations on the dielectric surface. Ru.

The reactive oxygen species are shaped by the applied voltage, dielectric ionic conductivity, and characteristics of the analyzed gas. For example, a fluoride with a certain dopant level determines when it starts to form. responds to the magnitude of separate voltages applied to the capacitive sensor relative to the tan dielectric and reactive oxygen species begin to form. The magnitude of the voltage at which reactive oxygen species begin to form is , gas species for species identification (e.g. 0□.

NO! Correlates with +80. For exogenously doped lanthanum fluoride, Oxygen ionic species begin to form at a voltage of 0.3 melt AC. However, lantha fluoride If the ion is intrinsic, the oxygen ionic species is begins to form only in response to AC (3 pol) previously applied to the electrodes of .

To optimize this response, the device should have a large surface area, thereby A large number of oxygen ions are formed on the surface of lanthanum fluoride. Also, the catalyst grid is Preferably, it is formed from a material that is a good oxygen catalyst. The grid is fine lid, i.e. the gas does not pass through the bulk of the grid but between the grid lines or through a porous grid, i.e. oxygen ions and they can be transported to the lanthanum fluoride surface on which the grid is located. It is a grid formed from a material that allows the

In addition, the surface area is large compared to that of the lanthanum fluoride surface that adsorbs gas molecules. It is also possible to use a catalyst adsorption thin 1K having a Detected gas in the air Catalyst-adsorbing thin film materials that displace oxygen molecules very effectively can also be used. Wear. The catalyst thin film allows the device to select different species; This forces the capacitor array with different catalyst thin films into chemisorption mode. can be used to detect different gases. Additionally, several different solid electrolytes, i.e. Capacitors with ionic hyperelectric materials can be used in chemisorption and/or physisorption modes. can be energized to detect many different gas species, including lanthanum fluoride and more. If external dielectrics are used, it may be necessary to heat them. Ru.

In physisorption mode, no reaction with oxygen is necessary and the device is therefore always in the room. Operates at warm temperatures. The adsorbed gas molecules modulate the space charge of lanthanum fluoride and A change in capacitance occurs at the frequency of a low amplitude voltage applied to the capacitor electrode.

The sensitivity of the device is relatively high, but this is because the space charge capacitor/s is an exponential function of free energy, which is modified by the gas in the physisorption mode. This is because The exponential relationship involves a large capacitance change as a function of gas concentration. , giving high sensitivity.

In order to effectively detect the impedance of the capacitor, the voltage applied to the monitoring capacitor is The voltage magnitude and phase angle of the AC voltage are determined. For this, the sampling resistor The resistor is connected in series with a capacitor and the voltage across this resistor is monitored. . The phase of the voltage across the sampling resistor is compared to the phase of the AC power supply; The power supply drives the circuitry including the sensing capacitor and sampling resistor. electric The amplitude and frequency of the source were stepped by a computerized arrangement from 0.03 to 3 Measures physisorption and chemisorption responses over a wide range of frequencies, such as 0Hz do.

The phase and voltage across the sampling resistor are 6 at each amplitude and frequency position. Detected. The sampled phase and voltage are fed into computer-type circuitry. , where for a known species and concentration, the previously stored values of voltage and phase and be compared.

The computer transfers the sampled voltage and phase to the previously stored voltage and phase. gives an indication of the specifically detected species and their concentrations.

Alternatively, the AC power source has a single frequency, such as /Hz, and a range of amplitudes. chemisorption and physisorption reactions in capacitor dielectrics Measure. across the sampling resistor for the amplitude that induces the chemisorption reaction. Phase is detected for the fundamental and higher odd harmonics. basic and odd The harmonic phase response is detected and the previously stored value for it is are compared with respect to the different species to be detected. Species identification depends on sampling resistance. The detected voltage is used to address the memory that responds to the detected voltage across the resistor. gives an indication of the concentration of the species collected.

In theory, variable amplitude, harmonic detection techniques could detect low concentrations of gas in the presence of other high concentration gases. / gas sump that has been determined to be particularly advantageous for detecting If the gas contains oxygen and carbon dioxide components, the oxygen and carbon dioxide components are harmonic, chemical Although it can be detected separately by adsorption techniques, it is important to note that the nonlinear response In the presence of oxygen, in the presence of oxygen, it is possible to start at lower voltages. It is et al. Therefore, if oxygen is present on the dielectric surface, chemisorption mode can be achieved at relatively low voltage. Significant harmonics are generated at the At high voltage in the presence of carbon dioxide gas only harmonics are generated. If another component of the analyzed gas is carbon monoxide, chemisorption Diode action is at intermediate voltage, i.e. diode action on oxygen and dioxide occurs for voltages between voltages that produce a diode effect on carbon.

Multiple capacitors, some of which have different solid electrolytes, dielectrics and/or catalysts Similar devices are available that utilize arrays of sex detectors.

The array detector is responsive to AC power and has chemisorption and/or physisorption. mode. The voltage and phase across each of the dielectrics will be detected. The previously detected species in the capacitor array are and concentration with previously stored responses.

Preferable for detecting relative humidity and temperature? Second lanthanum fluoride dielectric The capacitor with the physical relationship between the lanthanum fluoride and the water molecules being detected It responds to a low frequency power source to measure the adsorption reaction.

Lanthanum fluoride dielectrics are also suitable for very high frequencies A, e.g. C, but it produces a response that is only representative of the temperature 1frO. both of these The voltage and phase across the sampling resistor in response to the AC frequency of It will be done. Computerized circuitry responds to sense voltage and phase in response to high frequency signals. and detect the temperature. The computer also detects the detection voltage for low frequency excitations. and also in response to the phase, but it is modified by the temperature display. , producing an accurate relative humidity reading independent of temperature.

Lanthanum fluoride is chemically stable, has a high melting point, and almost Being an ionic conductor, it is particularly desirable as a dielectric. Lanthanum fluoride is Although it has a very high melting point of approximately /j00°C, fluoride ions rapidly melt at room temperature. Move through the material. Since it is an ionic material, its electron and hole transfer The kinetics are relatively slow, making it an excellent insulator against electron flow.

for LX+ and F- ions that reach from inside the bulk of this material to its surface. There is a larger difference in the Helmholtz free energy difference than in the 0,2j electron melt. be. Therefore, a dipole layer exists on the entire surface, resulting in a wide surface electric field.

The relative permittivity of PA is /Hirodewa).

This is a relatively large number for an electrolyte dielectric. However, the bulk material is a dipole layer Capacitors formed from lanthanum fluoride have capacitance values that are typically much larger than those measured geometrically. have.

A grid-like electrode on the lanthanum fluoride surface is exposed to a reducing gas while a gradient voltage is applied across fluoride, the resulting current is characteristic of the different gases. It has been found that the stage PIft- exhibits at a voltage of . Each stage amplitude is a measure of the partial pressure of the gas that produces that step. Additionally, below the electrode The space charge distribution at is changed each time the step occurs. The present invention is a variable amplitude This phenomenon is exploited in AC mode.

In a gas detector formed as a capacitor with a lanthanum fluoride electrolyte dielectric It has been found that the use of DC current results in slower response times. Huh The sensitivity of a lanthanum chloride capacitive gas detector is reduced by a factor of approximately -10. , it is obvious that the space charge layer on the lanthanum fluoride surface disappears and the lanthanum fluoride This occurs because it changes the bulk resistivity of the tantalum. Long time to reducing gas and DC voltage Bulk resistivity changes that accumulate after exposure to lanthanum fluoride, although reversible, The space charge never returns to its original condition. Obviously, the space is The only possible method is to reduce the free energy between the surface thermal excitation of L♂+ and F− ions. Whether the surface is electrochemically modified such that the difference is significantly reduced.

In the present invention, by an AC voltage in a predetermined range for chemisorption operation, Electrochemical changes can be made by energizing a capacitor containing a lanthanum fluoride dielectric. sex is performed. Since the free energy difference changes in response to AC voltage, the space charge Load thickness is highly affected. The thickness of the space charge is in series with the capacitor. can be effectively measured by monitoring the voltage and phase across the sampling resistor. determined. A DC voltage is applied to drive surface products into the bulk semiconductor dielectric. aging and hysteresis are reduced.

The above and still further objects of the present invention, q! The details and advantages are listed below. A detailed description of some specific embodiments should be considered with particular reference to the accompanying drawings. And it will become clear.

Brief description of the drawing FIG. 1 is a plan view of a thin film detector according to one aspect of the invention.

FIG. 2 is a side view of the detector shown in FIG. 1.

FIG. 2S is a side view of a modified example of the detector shown in FIGS. 7 and 2.

FIG. 3 is a plan view of a single ore detector according to a second embodiment of the invention.

Figure 3 is a side view of the detector shown in Figure 3.

Figure ≠a is a side view of a variation of the detector shown in Figures 3 and 3.

Figure 5 shows the equivalent of the apparatus shown in Figures 1 to 1 when operating in physical adsorption mode. It is a circuit diagram.

Figure 6 shows that the gas detection capacitor is variable when operating in ethical adsorption and chemisorption modes. The first embodiment of the invention is responsive to a variable amplitude and frequency oscillator. Partial schematics and partial blocks are included.

Figure 7 shows a variable gas detection capacitor operating in physisorption and chemisorption modes. Amplitude and response to single frequency power supply, harmonic frequencies detected for chemisorption mode 2 is a partial circuit diagram and a partial block diagram of a second embodiment of the invention, as shown in FIG. .

Figure g shows multiple detectors, each responding differently to different gases, with variable amplitude and 1, which is activated into chemisorption and physisorption modes by a variable frequency power source and a variable frequency power supply. a partial circuit diagram and a partial block diagram of yet another embodiment of the invention, and Figure 7 shows that at low frequencies both humidity and temperature are measured, and at high frequencies temperature The humidity sensing capacitor operates in physical adsorption mode so that only A partial circuit diagram and partial block diagram of an embodiment of the invention that detects both humidity and temperature. It's a diagram.

The best mode of carrying out the invention 7 and 2, a first embodiment of the invention shows gas sensing or detection according to a first embodiment of the invention. A preferred embodiment of the capacitor is shown. The gas detection capacitor is used as an electrode. It is mounted on a copper substrate or support 11 which serves as a substrate. On the support 1/ there are respectively A recon chip 12 and a glass electrical insulation plate/3 are attached. S The recon chip 12 is degenerate and has high electrical conductivity. glass grate 13 top The gold layer deposited as an electrode is electrically insulated from the copper substrate.

The degenerate silicon chip 12 supports a very flat surface on which a thin chrome film is applied. Layer /j is deposited, and a copper thin film layer 16 is further deposited thereon. Chromium layer/j is copper Necessary for adhering layer 16. Solid ions, i.e. electrolytes, on the copper layer 16 A thin film dielectric layer 17 is welded to the surface, but it is not suitable for room temperature detection purposes. Clay fluoride, lanthanum fluoride with thickness of oo~200θ Angstroms (LaFs) is preferred; lanthanum fluoride is not particularly advantageous as pointed out above. However, other ionic dielectrics may be utilized as layer 17, especially other clay fluorides. I can understand that. The copper layer /6 is thermal expansion matched to the lanthanum fluoride layer /7, It is also thick enough to mechanically separate the lanthanum fluoride layer with a silicon tip saw. can be done.

A thin film metal grid is formed on the top surface of dielectric layer/7. Grid/IK is ten Since it includes a gap with a range of , a relatively large proportion of the top surface of the dielectric layer 17 is around the area to be detected by the device. Allows exposure to gas. The grid is preferably inert, such as gold. It may be a catalytic metal, or it may be a catalytic metal, such as dium. stomach. Alternatively, the grid may be a catalyst that adsorbs molecules from the source being detected. It can also be replaced with a medium porous metal layer. The adsorbed molecules pass through the catalytic porous metal layer. It migrates through and is then adsorbed onto the surface of the dielectric layer/7.

The grid/strip or porous metal layer on dielectric layer 17 is connected to the gold layer by gold leads 21. The first electrode of the capacitor is connected to the first electrode of the capacitor. Copper support l/is condensate A second electrode of the sensor is formed. Both electrodes, including the support and the layer, are respectively connected to the device. is applied to the support l/ for one layer called the anode and cathode of In response to a sufficiently high positive voltage applied to the support 7 to tip/2, the layer l! and layer An effective current flows through layer 16 to layer/7 which acts as a forward bias semiconductor. This II flow from the 0 layer 17 goes to the grid/za (or equalizing porous layer) and the layer/hiro. Flows to lead 2/. The dielectric passes from the support/l through the lath plate 13 to the layer l. Since the impedance to the ion dielectric is sufficiently high, it is considered an open circuit. That is, a low positive voltage or any negative voltage that does not cause destruction of the glass plate 13 If a voltage is applied to the support 1/ with respect to the layer 12, the tip 12 and in series The path to the grid containing layers 16 and 17 is reverse biased and dielectric It just acts as a body. Diode action is simultaneous with chemical mode of device operation Therefore, a chemical reaction occurs between the gases on the exposed surface of the dielectric, and 1fI17 does not affect the electrical impedance of the

In a second embodiment of the invention, shown in FIGS. 3 and 3, thin film ions, dielectric Layer 17 is replaced by a single crystalline dielectric slice 23, which is preferred. It is made of lanthanum fluoride and typically has a thickness of about 200 micrometers. Ru. The lanthanum fluoride slice 23 is a silver welded onto a copper support or substrate. It is supported by layer 24L.

The silver layer 2hiro is used in place of the silicon layer and chromium layer in FIGS. 7 and 2, but That is, the single crystalline lanthanum fluoride slice 23 is self-supporting and silicon This is because the support provided by the tip is not required. Electrode 2j is inductively coupled It is welded to the exposed surface of the crystal slice 23, and it extends from the long arm 27. It can also be formed as several parallel fingers 26, or as shown in FIGS. As a grid as shown in Figure 2,! Rirui is porous and acts as a suction layer (Fig. 0 layer 2j that can also be formed (not shown) is gold or has been detected It can be formed from a metal catalyst that is a function of the gas. glass plate 1 3 and the metal 1 on the support 1 in the embodiments of FIGS. 7 and 2. Last plate / 3 and layer / 4'lZ) Similar to the bathrobe, the embodiment of Figure 3 and Figure 3 Two silver layers are welded onto the copper support II at a distance.

To detect some gases, such as oxygen, with great accuracy, io yys’rt It is better if the body is not sensitive to the surrounding moisture. Lanthanum fluoride is very sensitive to moisture. Therefore, when detecting some types of cursive characters, prevent water vapor from entering there. This is very important.

To this end, a thin film hydrophilic salt layer 30/ of FIG. 2 extends upwardly from the dielectric layer 17. Slightly above the upper exposed surface of the grid by dielectric posts (not shown) hanging on. R water layer 30/ is otherwise fluoridated on pitf* absorbs water molecules that can also be incident on the dielectric. has no effect on impedance. Bad or good, it also repels water molecules. Alternatively, a hydrophobic layer 302 of Teflon coating is welded onto the lanthanum fluoride (No. Figure a) The 0 layer 302 repels water molecules near the lanthanum fluoride dielectric, so the dielectric Impedance is not affected by water molecules.

Therefore, both the hydrophilic layer 30/ and the hydrophobic layer 302 are water vapor or humidity detectors. This minimizes the effect on the action of Hydrophilic salts attract water molecules in the air, Prevent them from reaching the lanthanum fluoride. Hydrophobic coating on the surface of lanthanum fluoride The coating repels water molecules in the air and prevents them from reacting with the lanthanum fluoride. I'll do my best.

Mechanisms related to the operation of the equipment shown in Figures 1, 2, 3 and 3 The names are the same. Chemisorption and physisorption actions occur in both embodiments. It can be done. In physical adsorption, van der Waals forces (typically 1 mm and 10 An AC or DC voltage of sufficient amplitude to detect , a chemical according to the invention applied between the electrodes comprising the support plate // and the thin film 14L. In adsorption, a higher voltage, always AC, is applied between the electrodes.

The voltage amplitude is sufficient to form 0-.

Silver layer 24A in FIG. 3 acts as an anode, while layer 26 acts as a cathode. use The voltage at which tIL begins to flow is the doping of the ion tIt layer 17 or the crystal 23. Depends on the ping level and the type of gas incident on the dielectric and the material of the dielectric layer. do. Exogenously doped and intrinsic fluorinated titanate to the body, t For each anode, about 0.03 for a particular species and 3. θ? Start the forward bias voltage of the default ACRMS. Between capacitor electrodes The peak voltage of shall not exceed the dielectric breakdown voltage. For intrinsic lanthanum fluoride Therefore, for the thickness of layer/7 and crystal 23, which exceeds several times the thickness of the surface dipole layer, destruction occurs. The voltage is approximately jN volts.

In chemisorption mode, the voltage at which the reaction starts determines which species are fluorinated. Determine whether it is incident on the lanthanum dielectric. Once the reaction has started, the ti The size indicates the gas amount, that is, the concentration ti of the specific gas. as explained below , gas species and concentrations, according to/aspects of the present invention, are of the type shown in FIGS. It is measured by applying an AC excitation voltage to a capacitor of Eq. Check the gas type The AC amplitude of the voltage required to trigger the sensing action is detected. single frequency from a variable amplitude ACt source, by fundamental and odd harmonic detection, or by AC' excitation is possible from a variable frequency, variable amplitude ACt source. In DC operation The aging effect that occurs does not occur for AC excitation, but it has been analyzed for nine different types. This is because children are not accumulated within the sample. The frequency of AC power is low enough , adsorption and desorption processes can occur.

Methane (aH4) at atmospheric ambient conditions to study the chemisorption process. Assume that we are trying to detect Th. Layer/7 or crystal 2 for atmospheric ambient conditions Many @ elementary molecules incident on the exposed lanthanum fluoride surface of No. 3 are included. Adsorption During the process, if anode /6 is forward biased with respect to cathode /I, the exposure Oxygen molecules incident on the surface of the ejected diluent are converted into oxygen ions. exposed i On-dielectric surface ions react with methane in the atmosphere and form methyl alcohol. (CH,OH) is formed. Oxygen reacts with methane to form methyl alcohol Since the lanthanum fluoride lattice is composed of Therefore, the forward bias required to achieve a given flow rate is: The forward bias required to achieve the same t flow in the absence of methane in the air is It becomes high. Determine the presence of methane by detecting the voltage at which the reaction begins -carbon oxide, carbon dioxide, silicon dioxide, -butane, propane and A similar mechanism occurs at different voltages for and other reducing gases. Daioh Detect each of these gases by detecting the AC voltage that initiates the deactivation. It becomes possible to do so.

The reaction occurs at relatively low temperatures and above, e.g. at room temperature and above. . Detection is typically possible from about /g°C to at least ≠00°C. detected The concentration of the species can be monitored by monitoring the ACll flowing at the characteristic voltage required to start the reaction. Measured by

An electrode formed by a grid covering the ion conductor or an equivalent porous layer When formed as a catalyst, this catalyst can be used for the detection of indicated gases. Selected from a set of qualities. For methane detection, the catalyst is) radium (Pd), Zinc oxide (ZnO), ferric oxide (FezO3) or tin dioxide (5n0 2) For oxygen, the catalyst is iridium dioxide (IrO2). ), either cobalt phthalocyanine or iron phthalocyanine. sulfur For hydrogen oxide (H2S), the catalyst is a metal sulfide, preferably cadmium sulfide. (CdS), for H2 the catalyst is /9 radium. grid/ g or grid 2j from cobalt phthalocyanine or iron phthalocyanine If formed, a much lower potential is required to initiate the sensing action; A very rapid response is achieved. Dielectric breakdown〉Guarantees that the gloss voltage does not exceed Therefore, it is desirable to reduce the required potential for sensing.

FIG. 5 shows items related to the apparatus shown in FIG. 7, FIGS. 2 and 3, and FIG. μ. An equivalent circuit to create the physical adsorption mechanism is shown. Physical adsorption mode is for water It is particularly advantageous for sensing polar molecules such as Oxygen in the molecules of the rootstock is highly electric. It is atmospherically negative and attracts the hydrogen electrons in the molecule to it. Therefore, the molecule of the rootstock There is a partial negative charge on the inside @, and a partial positive charge on the hydrogen in the rootstock molecules. stomach The on-dielectric layer/7 or the single crystal slice 23 consists of molecules having a dipole moment. Prioritize gl, 5! I will do it. Adsorbed species on the surface of lanthanum fluoride denatures the space charge of lanthanum fluoride, and the A associated with the lanthanum trifluoride gas interface Causes a change in C impedance/4 parameters. Physical adsorption mode It has been found to be particularly advantageous for sensing impropaters. moreover, - in a capacitor with a lanthanum trifluoride dielectric exposed to carbon oxide, A slight physisorption effect has been detected.

Both capacitors shown in Fig. 1, Fig. 2 or Fig. 3, Fig. A bulk material dielectric, represented as a capacitor 33, is connected between terminals jlA and 3j in the figure. include. The capacitance of capacitor 33 is p, dielectric constant C1 thickness d, and surface It has become a bulk material of lanthanum fluoride with a certain amount of product.

A branch containing series resistor 36 and series capacitance 37 is separated from capacitor 33. I'm on the road. The capacitance C4 of the capacitor 37 is a lanthanum fluoride dielectric. associated with a space charge layer found on the entire surface of Space charge fluoridated from bulk material Free energy between F− ions and L aF2” ions excited to the surface of the lanthanum It arises from energy difference. Lanthanum fluoride is a neutral fluoride that forms Schottky defects. Official unit of lanthanum fluoride, i.e. neutral lanthanum fluoride excited from bulk to surface It has a low activation energy of o, or electron for the formal unit. child These neutral official units are CF'')'' leaving a hole and an F- ion excited to it, The (F-) + hole is applied externally and responds to the nine-electrode rise, becoming a positively charged particle. It works. The F- ion that accounts for the official unit amount of neutral lanthanum fluoride is (F-)+ La F2+ ions must travel from adjacent points to empty holes. Therefore, The disadvantage of the neutral formal unit is (LaF2”)-hole, which is treated as a negatively charged species. Can be done. (LaF2'')-hole leaves behind a space charge layer of (F-)'' hole. , preferentially move to the surface. These dipole layers represent the capacitance of capacitor 37. Related to C9, It can be symbolically expressed as, however, d is any of the lanthanum fluoride dielectrics is the sum of the effective thicknesses of the two space charge layers at that point. space charge layer thickness d varies inversely as the square root of the concentration of CF−)+ ions.

The resistance value of the resistor 36 depends on the thickness of the lanthanum fluoride (F-) + hole movement. The ionic resistance of the lanthanum fluoride layer is reduced by However, ρ is the relative value of the Lantuff dielectric layer/7 or the crystal 23. It is the resistivity between the two surfaces.

The branch containing series resistor 3g and capacitor 3 is shunted from capacitor 37. In both cases, the fast ion motion is completed and the thermal driving force is exhausted. Partially mobile ionic species (LaF2) affected by the remaining electric field It is caused by the movement of and shows the effect. Lanthanum fluoride layer/7 or crystal 23 Charge is accumulated in the surface state. Finite response time of surface states to external stimuli contributes to the cage of resistors 3g and 39. The device contains a gas detection element. It is this leg of the circuit with resistor 3g and capacitor 3 that . Therefore, the sensing frequency is low enough that these elements of the circuit respond I am sensitive to stress.

If a stepped voltage is applied to the capacitor, resistor 3g and capacitor 3 The effect tends to produce time-varying currents that are not simply exponential. As a result, resistance The transient response of the branch, represented as a capacitor 3g and a capacitor 3, is expressed by a simple exponential: and cannot be represented by a finite number of resistor and capacitor circuit elements. stomach. Therefore, the fluoride lantern represented by resistor 3 and capacitor 3 The dielectric part actually has a frequency and voltage dependence expressed as 5 composite function 2). existing impedance.

The main effect of the complex impedance 2(-) is frequency-dependent for many purposes under consideration. The resistor 3g and capacitor 3 can be considered as variables.

Obviously, the diameter of capacitor 3 is much larger than that of capacitor 37; corresponds to a very thin space charge thickness, which in some cases is probably just a few sheets. is only an atomic layer thick. The main gas response of a detector operating in physisorption mode is The value of the complex impedance in the branch including the 3 resistors and 3 capacitors. Related to change. The maximum electric field occurs at the negative electrode, so that the maximum gas response is Occurs at the interface between the exposed upper surface of the lanthanum chloride and the grid/r or layer 23. do.

The state of the device shown schematically in Figure 1 is in the high frequency range (applied voltage is A kHz). z) and intermediate range frequencies (applied voltages of 30 Hz and A kHz). (if the frequency is between 30Hz) and low frequency region (if the frequency is less than 30Hz) Let's consider this. These characteristic frequencies depend on both sample thickness and doping. and therefore can be adjusted in the sample preparation by varying the thickness and doping parameters. can do. In all three assumptions, the applied voltage is 100mV It doesn't get bigger, so 7 Anderwaalska is a lanthanum fluoride surface layer. and the attraction between the molecules incident there, and the diode due to chemisorption. It has no effect.

In the high frequency range, the main impedance is the capacitor between terminals 31/L and 31/L. This is due to the bulk capacitance of the sensor 33. The resistance of resistor 3 and the resistance of A kHz or more The impedance of capacitor 37 relative to the impedance of capacitor 33 at the frequency The pedance is the bulk capacitance (represented by capacitor 33) It has an effect on the impedance of the device. In the middle range The response is resistor 31. and the capacitor 37. Conde Branch impedance including resistor 3g and capacitor 3 shunt from sensor 37 The impedance between terminals 3 and 35 is very large in this frequency range, so it - Doesn't have much effect on dance.

The bulk impedance of capacitor 33 at these frequencies is from 30Hz to can be kept relatively constant over the entire range up to 6kHz, so the The pulse capacitance represented by capacitor 33 is connected to terminals 311t and 3j. a low frequency range below 30 Hz without significantly changing the impedance between , the response between terminals 34t and 35 includes resistor 3r and capacitor 3. is dominated by the complex impedance 2(ω) in the branch. resistor 36 and The capacitor 370 time constant T, = R1C1 has the effect of low frequency and intermediate frequency. The zero time constant, which determines the predominant frequency, depends on the dielectric thickness d. Therefore, the ratio For relatively thick dielectric layers or slices, mid- and low-frequency responses are T8 can be transferred until it no longer separates.

Three different embodiments of AC multiplexed sensors are shown in FIGS. 6-g. . In the embodiments of Figures 1-r, the ACRMS voltage across the capacitive sensor is through the AC energizing voltage and sensor that is detected and supplied to the circuit containing the sensor. Phase comparison is performed with the flowing current. By measuring voltage and phase , it becomes possible to effectively determine the complex impedance of the sensor. computer Data technology is used to correlate the response from the detector with previously stored responses to and to determine its concentration. Physical adsorption and chemisorption Wearing techniques are utilized in all these embodiments.

In embodiment A1g, the capacitor j/ with lanthanum fluoride dielectric is , to the variable amplitude and variable frequency oscillator n by the current sampling resistor j11t. Connected. The impedance of resistor tp is the impedance of capacitor j/ Since the voltage generated by the resistor is relatively low in comparison, the voltage generated by the capacitor is It is shown as a copy of the current waveform generated at saj/. The magnitude of the voltage applied to the resistor The magnitude is directly proportional to the amplitude of the current flowing through the capacitor J″/. Child! The phase of the voltage across the resistor, 5'≠ with respect to the phase at 3, is ! Let the phase angle between the voltage applied to rl and the current flowing through this capacitor be represent.

Oscillator! 2 is a sine wave or square waveform with variable stepped amplitude and variable stepped frequency. It has an output.

Oscillator! The amplitude of 2 is stepped over a series of values, thus the capacitor! / electrode The ACRMS voltage once applied is /-100 m for physical adsorption operation. v range or 0.0 for chemisorption behavior. /~j, Odel This is the range of The frequency of power supply j-2 is several dozen from 0.03 to 30Hz Stepped over the Hertz range. The upper frequencies of this range are related to the explanation in Figure 5. It is set for the reasons stated. Oscillators of the type described are well known and Often used in network analyzers. Theoretically, it emits at a frequency of 0.03 Hz or less. Although it is possible to operate the vibrator j2, generating such a low frequency source, The actual separation of detection is usually limited to operating at such low frequencies. prevent. For the above reasons, an AC excitation voltage must be applied to the capacitor jlK. DC voltage must not be applied to the capacitor electrodes. It is important that

The oscillator, the timer included in the computer type circuitry j7 in the evening 2! To the output of B Control input terminal that responds! , evening is included. Oscillator! 2 is carried out by timer B. control input 1tK is programmed to respond to each signal supplied to the The oscillator oscillation S, which generates an AC output with wavenumber and amplitude, is held constant, but , while the oscillator frequency is the timer! Full range of frequencies in response to 7 sets of outputs from B move.

Oscillator for specific amplitude! 1 of the oscillator output if a maximum output frequency of 2 is achieved. The amplitude is incremented to a higher level and the full range of frequencies is performed sequentially again. .

Capacitor j/ is the gas incident on the capacitor that determines its complex impedance. As a function of the oscillator! 2 each amplitude and frequency output. capacitor ! The values of the capacitance and resistance of / are the voltage across the resistor and the oscillator Resistor to the phase of the AC voltage at the output terminal j3 of j2! Voltage applied to r≠ It affects the phase of . Resistor! ≠The voltage that is generated is an AC voltage detector. This detector is monitored by a resistor, 5'≠ or 75 degrees RMS. Generates a DC output representing K pressure. Resistor! ≠ and the output terminal of the oscillator, gλ! to 3 The phase difference in such voltages is monitored by a phase detector, f. The output device derives a DC voltage having an amplitude representative of the phase difference. Detector, 3-♂ and 5 Tade's DC outputs are connected to the computer circuitry j7 via electronic switch 6.2. is applied to the analog/digital converter B/, which is part of the analog/digital The converter B/ generates a parallel multi-bit output, which is connected to the electronic switch via 3. and the usual writable inputs, readable inputs, address inputs and data bus It is coupled to a constant speed access memory (RAM) 6B having a memory.

Switches t, 2 and 63 and memory t are timer! Controlled by output of B So the oscillator! 2. Immediately before completing each amplitude and frequency position, another memory Each address is a one-multibit binary signal representing the amplitude of the output of detectors j♂ and j. is loaded.

Timer! B controls switches Otsu 2 and 63 and memory Otsu 6, and therefore detects vessel! Which output is coupled to the input of the converter B/, while the output of the converter is the oscillator! Immediately before finishing the specific amplitude and frequency position of 2, the first instruction is given to the address of 9 memory 6 will be combined with the response. Oscillator j2 then continues to produce a single output, but timer! Otsu energizes switches 2 and 63 and memory 6, resulting in phase detector 3' The output of the second bit is coupled to the input of the converter B, and the one bit output of the converter is 2 to the memory address indicated by .

Oscillator! 2 is stepped over the entire range of frequencies for a particular amplitude, so the transducer The amplitude and phase display signals obtained from 6/ are loaded into RAM 2. Timer jA is RAM1. data from the converter is stored. Control your address . Data for the entire range of frequencies in /amplitude of the power supply 2 is stored in the RAM i4 Power after being stored sequentially in separate addresses! capacitor for the second amplitude of The voltage and phase obtained from j/ are the timer! Under the control of Party B, RAM Party B's second address Loaded into the dress sequence. Thereby, the oscillator! The total amplitude and period of 2 If the timer steps the oscillator over wavenumber positions, RAM66Fi, the oscillator Detector at each amplitude and frequency position of! With g! an array of data representing the output of Store. The system then determines what species is incident on the capacitor j/ Determine its concentration, i.e. qualitative and quantitative of the gas incident on the detector jl Ready to provide information about characteristics.

For this purpose, RAM +! , A signals stored in A are normally addressed and read. Previously stored in a fixed storage device Otsu 7 with removable input and multi-bit data output The signal is compared with the detected signal. The signals in fixed memory fA7 are Detector for amplitude and frequency position! Detector for known gas species incident on / represents the phase angle output of Before installing the device, data in the fixed storage device Otsu 7 must be Data are accumulated for each gas that can be detected by the detector. these places The phase angle display is stored in the fixed storage device 7 when the device is manufactured. Detector, 3 ’/Each species that can be detected by the oscillator! At each amplitude and frequency position of 2. It has a unique binary pattern representing the phase angle.

After the complete sequence of amplitude and frequency position of oscillator j2 is completed, the fixed storage The phase angle display stored in Otsu 7 is the monitoring phase stored in constant velocity recall memory device Otsu 2. Compare with angular display. This comparison is made for all amplitude and frequency positions of oscillator n. be called. For this purpose, timer jA controls the reading of fixed storage device Otsu7 and The storage device sequentially supplies a plurality of multi-bit binary signals to path O. /The signal is given for each species that can be detected by detector j/. path The tt signal is combined as a multi-bit to the path oscillator! 2 each shake Phase detector for width and frequency position! Constant speed recall memory device 6B for the output of is correlated with the signal stored in the The signal of path tr and the signal of path O7 are correlated, Determine the closest similarity between the signal on path 6r and the signal on path 2. Then, Determine whether this similarity is sufficient to identify it as either gas. A test will be conducted.

This correlation applies to a number of Chebyshev rangefinders equal to the number of gases and gas combinations. The number of this gas is determined by equipping the calculator with a detector! / is where it is placed It is designed to be detected in a specific environment where the Chebyshev distance calculator 71, when timer J″B operates the RAM, constant speed recall memory device Bt All are driven in parallel by the phase display output signal generated by the Chebishe Each of the distance calculators 7/ calculates the position for each species and species combination to be detected. of the ROM Otsu7 representing the phase angle to be generated from the phase detector j5; It includes a buffer storage for storing different multi-bit data outputs 6g. Che Just before timer zt controls the time that the Byshev calculation is to be performed, this timer Reading of ROM A 7 to the Chebyshev distance calculator 7/ is carried out under the control of It will be done. Alternatively, each of the calculators 71 can be used for different species and species combinations. It contains a register that constantly stores a signal representing the phase angle.

ROM A7 is then removed. Detector j/ typically detects multiple gases Different combinations of gases to be detected by the detector And the phase angle value for all permutations is ROM A7 or Chebyshev distance It is stored in the register of calculator 7/.

Chebyshev distance calculator 71 is bus tjrl! : the signal fed to it on t9 Measure the similarity of

The signals on paths U and O that are fed to a particular Chebyshev distance calculator are identical. In this case, the Chebyshev distance calculator outputs O. Pass Af and 67 As the similarity of the signals fed to a particular Chebyshev distance calculator decreases, As a result, the amplitude of the multi-bit output of this specific distance calculator increases.

Each of the calculators 7/ has a buffered output storage for storing the distance calculated by it. Contains.

After all the Chebyshev distances have been measured by the calculator 7/, the output buffer of the calculator The signal at the storage device passes through multiplexer 73 controlled by timer and is sequentially supplied to a comparator 72.

Comparator 72 is also responsive to a multi-bit signal from register 74t; Seven of the registers are gas species and species combinations to be detected by detector jl. are provided for each of them. The register 74t is calculated by each of the calculators 7/ A signal representing the calculated maximum Chebyshev distance value is stored and transmitted by detector j/. identify each gas species and species combination to be detected. Register 7≠ signal is passed through the multi-bit f73 to the comparator 72, and the comparator by the multiplexer 73 It is coupled in synchronization with the coupling of the output signal of calculator 7/ to 72.

Comparator 72, in response to its input signal, compares the chips generated by each of calculators 7/ The Ebyshev distance display signal is the maximum allowable Chebyshev stored in each of the 7 registers. It is determined whether b is equal to or smaller than the eff distance. Specific gas species or species The combination is less than the maximum Chebyshev distance for that particular species or combination of species. Comparator 72 table with Chebyshev distance less than or equal to In response to the indication, a binary signal representing the species or combination of species is sent from the ROM 7. A buffer storage 7 is provided with a multiplexer 7 enabled by the output of the comparator 7. darted through Ir. Multiplexer 7 is multiplexer 73 and 7 j, it operates sequentially at the same time and in synchronization, so it is not suitable for the same species or combination of species. The signal is coupled sequentially to comparator 72 and buffer 7B. buffer storage device 7 Party B shall identify the specific species or combination of species identified as incident on the detector J″l. Stores the binary signal representing the The binary signal stored in the buffer storage device 7t is a seed digital signal. data is supplied to the display device 77, but since this display device includes memory, , it is responsive to a plurality of separate outputs of the buffer storage device 7t, and is responsive to the gas species and species The combination of alphabetic characters is displayed repeatedly in sequence.

Is the seed display signal stored in the buffer storage device 7B a pass? Constant-speed recall storage on λ Address input of fixed storage device 1/ that also responds to the multi-bit data output of 6 supplied to When the seed display signal from memory 7B is supplied to ROM 4J , timer j A li addresses RAM B, so the RAM output signal oscillates. vessel! Voltage detector for all amplitude and frequency positions! represents the amplitude of the output of g , ROMJ'/ is basically a two-person table index memory, which is an oscillator. Voltage detector for each amplitude and frequency position of j2! The entire amplitude output of rr is The specific amplitude for the species or species combination displayed by buffer 7B, i.e. Correlate with concentration. On lead r2 and from buffer 7z to ROM f/ In response to the input of the ROM ii, a multi-bit value having a value representing the concentration of the gas species Generate output.

Prior to operation of the device, the binary output value of ROM ff/ is set to the voltage amplitude of path t2. at discrete address locations corresponding to the output signal and the species indication stored in the buffer 7B. Stored. The concentration display output signal of ROM f/ is supplied to buffer r2, and then This buffer drives quantitative numeric display g3. The display device 13 is the display device 7 9', during the operating sequence of the oscillator J'', the signal detected by the detector J/ including a memory for storing multiple signals from the ROMJ'/ for different species by the numbers and letters given by the 0 display devices f3 and 7, respectively. The indications for the gas type and gas type occur simultaneously, so the operator looking at the display can see the gas type and can be given an indication of concentration. Oscillator! 2ii Generate a sine wave or square wave.

It was discovered through experiments that when a sine wave is applied to a capacitor, Some gases are more sensitive when a shaped wave is applied to the electrodes of a capacitor. Detected. This is especially true for chemisorption techniques related to methane detection. be.

Turning now to FIG. 7, the detection capacitor, 5'/ The capacitor/is an oscillator due to the resistor j≠! as well as connected to 2 , connected to the stepped variable amplitude and single frequency oscillator 91 by resistor j≠. Ru. Since the oscillator operates at a single frequency such as Hz and the amplitude is stepped, , /~100mv RMSAC voltage was once applied to the electrodes of capacitor j/. This gives only physical adsorption action. Since the amplitude of the oscillator / is stepped, it becomes 0, / RMSAC voltage ranging from to 3 delts capacitor! The mark is placed on the electrode l. added to provide chemisorption behavior. In the embodiment of FIG. 6, the voltage detector rt and The phase detector is a resistor and an oscillator! Similarly, it is connected via Voltage detector! ;1 and the phase detector j are connected to the resistor j11t via the output of the oscillator and is connected.

An important difference between the embodiment of FIG. 7 compared to that of FIG. 2 is that in FIG. The output is for odd harmonics of the voltage generated across the sangresistive resistor j4t. It is something to be prepared for. Odd harmonics are detectors! / acts like a diode This increases the voltage generated by the oscillator in chemisorption mode. mentioned above In chemisorption mode, an asymmetric response occurs during opposite half-cycles of the AC power supply. occurs, that is, it acts like a diode. Detector! / diode The effect is that the AC voltage across the detector reaches different amplitudes, occurs for. For physical adsorption mode and diode operation of detector 3/ For chemisorption excitation voltages that are less than the voltage that produces the There are no odd harmonics for the /Hz output of the oscillator. The amplitude of the oscillator is If a value high enough to initiate the diode action of the detector j/ is reached, the resistor An odd harmonic is generated at j4t. Odd harmonics.

The amplitude of determines the concentration of the gas that initiated the diode action of the detector j/. Let's do it. Compare the phase of the odd harmonic across resistor j″≠ with the reference phase of the odd harmonic By doing this, we can create a voltage across the resistor that produces a step change in odd harmonics. By monitoring, gas species are identified.

column, where N is the highest odd key to be detected for amplitude and phase. It is the number of waves. The harmonic phase detector 92 is also responsive to the output of the harmonic oscillator tag. Therefore, oscillator 7≠ responds to the output of oscillator RI/ from the 3v4th wave to the Nth harmonic. Generates N-/odd harmonics. The harmonics generated by the harmonic oscillator tag are synchronous and therefore the zero crossing of the harmonic output of the oscillator tag includes capacitor jl This occurs in a time-locked relationship with the zero crossings of the output of the oscillator applied to the network.

The harmonic phase detector deco detects the harmonics of the voltage across the resistor 5 da and the output of the oscillator tag. In response, the harmonics generated across resistor 3t and the phase of the output of the harmonic oscillator tag Derive the DC voltage that represents the relationship. Specific harmonic phase detection by harmonic oscillator 94t resistor, 1 at a frequency corresponding to the frequency of the harmonic phase detector, which is coupled to the If there is no harmonic ever generated at 1I, this harmonic phase detector will have a zero output. Derive.

The voltage across resistor 3da is at the harmonic associated with the specific harmonic phase detector 9.2. If it has a significant amplitude, the harmonic phase detector L associated with that frequency, the resistor , 11I and the corresponding harmonics supplied to the detector 92 by the oscillator tag. Derive a DC output with an amplitude representing the phase angle of . For example, resistor j + bitter Is the third harmonic wave supplied by the oscillator Deda to the third harmonic phase detector? Rada! If the M3 harmonic phase detector is displaced by a third harmonic phase detector, the M3 harmonic phase detector is Derive the DC output that is / of the maximum output that can be derived.

Resistor 5! ! The amplitude of the odd harmonics once generated is A band pass filter coder is included which is responsive to the output across resistor 1+. filter 2 Is each of the 9 hiro separate AC voltage detectors? 5 and this detector is applied to it 9 generates a DC voltage that is directly proportional to the RMS AC voltage. Each of the filters 91I It is tuned to separate odd harmonics of the /Hz signal generated by the oscillator Del. follow In order to obtain an indication of the amplitude of the third harmonic across resistor S4t, the first bandpass filter is The tag is tuned to connect thereto and send a 3H3 signal to the nine-tone voltage detector 95. Ru.

The different amplitude levels for the /Hz output of oscillator 91I are generated by tie-f, l-A. In a manner similar to that described above for controlling the shaker tacho, timer 9B is used. is controlled. For the voltage of oscillator 9/ that causes only physical adsorption action, i.e. for voltages in the range /~700mV, the outputs of voltage detectors 5g and 59 The signals are combined via a multiplexer 7 under the control of a timer.

The timer zero energizes the oscillator del, thus causing the oscillator to actuate through the electrodes of the detector 9/. When the applied voltage reaches a sufficiently high level and preempts chemisorption action, In this case, voltage detector 5g, fundamental phase detector S and harmonic phase detector Tacho and The voltage at the output of harmonic amplitude detector q3 is They are sequentially coupled via a plexer 97.

The DC signal at the output of the multiplexer 7 is sequentially converted from analog to digital. This converter is coupled to a multi-pitch converter 9g which limits the amplitude of the input to the converter. Supplies the signal to Pastade. The output signal of converter 9g on the pasta is A computer-based network lOl similar to the computer-based network 57 is supplied.

The memory requirements of network /θ/ are significantly less than those of network 37. capacitor 5 The response from resistors 5g and jq while / is operating only in physical adsorption mode A path that represents? The signal on q is the signal from the converter 61 7. For physical adsorption only mode The signal on the second bus qq spans the entire range of amplitudes of the physical adsorption-only mode, In other words, i4s9? The above signal is expressed as / and 1 at /Hz excitation of capacitor Sl. ACRMS voltage and phase across resistor 5g for stepped amplitude between 00mV represents a corner.

In the physical adsorption only mode, RAM A,! , the output of tie-f? to A Therefore, in response to the controlled switch 102, it is directly coupled to the ROM g/. Therefore, path g2 is directly connected to the input of the ROM.

When the chemisorption mode is summed, the output signal of the harmonic phase detector octopus provides species identification. Let's do it. The sequentially generated signals on the reeds representing the harmonic phase shift are transmitted to the detector 5g and Similar to the response from Tade, it is stored in RAM AA. ROM Otsu 7 is in a different building Store the predetermined value for the harmonic phase detector for as a function of the amplitude of the oscillator q/ do. These predetermined values for the harmonic phase detector output are suitable for Chebyshev rangefinders. It is compared with the output of RAM 6A by the calculator, and the input signal is input to the detector 5/ in Fig. 7. species can be determined. Another problem is that the stepwise output of the harmonic phase detector the output of the oscillator, i.e., in response to a step change in the amplitude of the output of the oscillator Large changes are exploited when chemisorbed species identification is added. Oscillator q/ The difference between the phase angle signals stored in RAM for adjacent amplitude values of Gradual changes are detected by comparison with a criterion that is a function of the width value. .

The specific species that caused the diode action of the detector 5/ in response to a difference exceeding the reference An indication of existence is given.

To measure performance in the embodiment of FIG. , and the detected odd harmonic amplitude converted into a digital signal by converter qg. Width is cumulative. For this reason, while processing the data stored in the RAM 44, Masolo energizes switch 102, so the output path of RAM Otsu 6 becomes accumulator 103. is combined with The timer addresses the RAM and relates to the output of the voltage detector 9S. Only during the period in which the value is calculated, the accumulator 103 uses the timer q6 to control the output of the RAM 66. It is coupled to path g2. If the chemisorption mode is added, the amount applied to the detector S/ The accumulated value for each amplitude is addressed under the control of the timer, They are stored in separate addresses in RAM 1011.

If several species to be detected are incident on the detector 51, a diode is added to the detector. RAMl0II at each address value for different amplitudes The responses in represent the cumulative effects of several different species. The oscillator voltage is a/ to 3 When it changes to melt, the voltage amplitude of oscillator q/ increases and the voltage across resistor 5g increases. As the pressure increases, RAM / 0'! separate addresses stored at separate addresses in The value can represent the influence of a single species or multiple elements incident on the capacitor 5/. Wear. To determine the concentration, the contents of RAM/011 are stored in separate RAM addresses. are read out sequentially from the source and added together. The readout sequence is based on the excitation voltage. Progress against increasing values. Values from different addresses in RAM/OII are the same. are added together until the specified species is detected. accumulated for the identified virtues. The calculated value is correlated with the concentration value associated with the cumulative value. RAM/0hiro read process The value associated with a particular species is Subtracted from cumulative value.

The device providing this result includes an accumulator lO3 responsive to the output of the RAM/θ group. I'm here. The accumulator ios has a multi-bit output, and it has a buffer memory 1 06, this buffer storage creates a diode effect of the detector 5/. is provided for the gas species that has the lowest voltage that can be applied. Chebyshev distance long indicates that the species associated with the buffer 106 is present by the step change calculation. In this case, buffer 106 is selectively activated by the output of comparator 72. multiple Lexa 73 is the Chebyshev distance or Buffer 104 is activated only while responding to a step change calculation. Buffer 10 The output of 6 is coupled to fixed storage 107, which is basically , the amplitude value stored in the buffer/QB is expressed as the concentration (i) for the buffer related to the buffer. It is a single-dimensional index table that is related.

The outputs of accumulator/θ3 and buffer memory I&f1t/θ6 are multi-pin) f Applied to the minuend input and the subtrahend input of the digital difference network IOg. Buffer 10 6, the output of the subtraction network 10 enters the detector S/. generates an indication of the concentration of the first gas species; Chebyshev distance or step change The calculation process indicates that the species associated with buffer 106 is not present. , the output of subtraction network 10g is equal to the contents of accumulator/Q3.

The difference circuit W410g outputs the voltage of the detector 5/ for the next high output voltage of the oscillator 52. The multiplier applied to the buffer 109 related to the gas species causing the ionic action. Generates bit output. Detector 5/ produces a diode action of the next highest voltage. Chebyshev distance or step change calculation process associated with the gas A possible input is included in buffer 10. Buffer 10 de has multi-bit output is derived from the ROM / / / / and responds to the output of the buffer 106. has an addend input. r Digital adder // Supplied in parallel to the addend power of 2 Ru. The adder network //2 derives the multi-bit sum output, which is the sum output of the accumulator 10S. Digital subtraction circuitry with minuend input responsive to output //30 minuend input Given. Buffer 101. If the species related to and /Q de are both present, add The output of the calculator //, 2 indicates the sum of the harmonic voltages related to the voltage across the resistor, 31. .

The output of the well reducer //3 is the harmonic wave read out from the RAM /04' to the accumulator 105. The signal has a value representing the contribution of the remaining gas to the voltage.

The network for Enoki with the highest voltage at which diode action begins is different from other networks. Except for being a little bit military, there are no indications for species related to buffer memory/θ de. A similar network is detected by the detector, 1/! Building D are provided for each of them. At the same time, a diode action is applied at the detector, 1/ The network for the building with the highest starting voltage includes a subtractor/lS; The subtracter has a minuend input responsive to the left output of the accumulator IO and a diode of the detector 5/. Addition of the network associated with the species with the penultimate voltage that produces the ordinal action. It has a subtraction input responsive to the output of the calculator //6. By subtraction network/15 The generated signal representing the multi-bit difference only drives the fixed storage device //g. buffer //7. ROM　/　/　g is the binary signal connected thereto. the gas species with the highest voltage inducing diode action in the detector, A rough globulogram is shown to correlate with the concentration of .

ROMg/, 107. The species quantitative measurement signal stored in /// and 77g is Quantitative numerical display under the control of imma q6 via multi-breech circuit network l/q It is supplied to the device 3. Multi-blephsa l/q is a display device! Energized in synchronization with 7q Therefore, when a specific gas type is displayed on the display device 79, the corresponding number representing the concentration The value appears on display ftg3.

Next, in FIG. 3, another embodiment of the multi-gas gas analyzer according to the present invention is shown. Ru. The gas analyzer for multiple gases shown in Figure 3 has capacitances with different vi numbers that have ionic dielectrics. An array of gas detectors is included.

All of the detectors in this array respond simultaneously to all of the gases to be detected. Ru. The capacitors have separate gas adsorption properties, but preferably the gas specifically adapted to detect gas species or a small number of gas species. . Hence, a stepped variable amplitude and/or stepped variable frequency oscillator! by f2 When energized by diode-like action and only physical adsorption, Separate detectors generate separate output signals as a function of the gas incident thereon.

In particular, the gas detector shown in Figure S is made entirely of lanthanum fluoride dielectric and its dielectric Detection capacitor /2/~ with electrodes of different materials covering the upper part of the body, exposed surfaces /25 is included. The upper surface of the capacitor /2 is made of inert material such as gold. formed from metal. ;The upper surface electrode of Ndensa/22 is a porous tin oxide catalyst layer. Covered with a capacitor! 22 is particularly suitable for detecting methane. Ko The top electrode of the capacitor 7.23 is covered with a palladium catalyst grid, so Capacitor/23 is particularly suitable for the detection of methane and hydrogen. Capacitor/2 The upper exposed surface of 'l is covered with an electrode consisting of a layer of catalytic iridium oxide, This makes the capacitor/24' particularly suitable for detecting oxygen. Also for capacitor/2 In addition, since the upper electrode is formed from an iron phthalocyanine layer, it is particularly effective against oxygen. suitable for detection.

Capacitors /2/~/ko5 are sampling resistors S4! and multiplexer The oscillator connected to the capacitor by /24! 2, variable amplitude and/or or variable frequency output to selectively act like a diode and It is activated to the mode of physical adsorption only. Multiplexer/24. is a computer type network/S7 in response to a control signal provided to the multiplexer by a timer. and selectively connect one of the capacitors /2/-/coS to the output of the oscillator S2. . Computer-based circuitry 157 is the computer-based circuitry of FIGS. 6 and 7. Via switch 62, voltage and phase detector Sg and responds to and processes the output signals of S and S. However, capacitive detector/ 21~/2S is adapted for specific gases, so species can be identified more accurately. Ru. Network 15 is similar to the circuits in Figures 6 and 7 and processes a large amount of data. However, this means that network 157 has a detector for each of capacitors /2/~/coS. 5g and 59 in sequence.

Circuit network/! ;7'F! , oscillator! r2 and multiplexer/26, It's an oscillator! The full range of amplitude and/or frequency of 2 is initially applied to the capacitor /2/ given to. Circuitry 157 first collects data from detectors 5g and 5q. , while capacitor /2/ is energized and the signal from detector /2/ is applied to the circuit. to the network via multiplexer/26 under the control of a timer in network 157. be combined. Next, the circuit network 15 Riha! Energize the Multigrexa/2B and detect the detection Connect capacitor/22 to five oscillators. Therefore, the timer in circuit network IS7 is The oscillator 52 is stepped through a full range of voltage and amplitude. If methane is present, The response provided by detector/22 to network IS7 is the response in the absence of methane. The answer is clearly different. The network 157 has a Metanchebyshev distance calculator therein. In this case, only data collected from detector/22 is collected instead of data from all detectors. simplifies and shortens processing operations. do. The signals from voltage and phase detectors 5g and 59 are energized by capacitor /22. is collected by circuitry 157 while The above sequence is a condenser The process is repeated for each of the samples 723 to /25.

Computerized circuitry 157 connects capacitors /2/ to /, 2. S- to De After the data has been collected, the computer is booted up and stored in the network's constant-speed recall storage. Read data from. The circuit network /37 connects the RAM output signal to the capacitor /2/~/ 2S to be detected with the predetermined values related to the various woodcutter and As explained above in connection with Figure 6 and/or Figure 7, the Derive the target representation.

Next, in Figure 2, a lanthanum fluoride dielectric and an inert metal, preferably gold, are used. Measuring the relative humidity and temperature of the gas incident on the capacitor 5/ with the upper electrode A circuit diagram is shown. Capacitor S/ is connected by oscillators /3/ and /32 At frequencies of 7Hz and 1000kh, it is activated into physical adsorption only mode, Each of the oscillators is connected to the electrode of the capacitor 51 (approximately 3θ milligol) ACRMS Apply voltage.

The frequencies of /Hz and /θ00Hz of oscillators /3/ and /32 were chosen because of the absorption The attached water molecules respond to /Hz excitation and convert into condensate? Detected by dielectric of S/ On the other hand, it does not respond to the presence of 1000 Hz response social water. 100 With a 0kh excitation, the capacitor 5/ has a response that basically depends on an exponential function of temperature. will be able to answer the question. In this regard, reference is made to the explanation above for Figure S. stomach.

The oscillator/3/work/32 is controlled by the timer/36, the switch/33 and It is coupled to capacitor 51 by sampling resistor /35. Resistor/3 The voltage across 5 is applied in parallel to the 1-phase detector/37 and the voltage detector/3g. Ru. Phase detector/37 also selectively and alternately detects the position via switch 139. Connect the L input to the phase detector's L input. Responds to 00Hz output. Switch/, 39 is controlled by timer/31°. Therefore, the output of oscillator /3/ is simultaneously applied to capacitor 5/ and phase detector /37. or the output of the oscillator/32 is simultaneously applied to the capacitor and phase detector. given to. Phase detector/37 and voltage detector/3g have their inputs and their R DC output signals are generated that each represent the phase difference of the MSAC inputs. Detector/37 The output signals of and 13g are used to open and close switches /33 and 73d by timer /36. Analog/digital converter/' via synchronously activated switch/tacho I/ is given alternately. The switch/octopus has the status of switch/33 and 13 de. Immediately before changing the output of phase and voltage detectors 137 and 13g to the converter/da l Join.

Transducer /'I/ outputs the output voltage of detector /37 and 13g under the control of timer /36. It is supplied to the multi-bit signal tube, Multi-Brephsa/Ko 3, which indicates the pressure. Multiplayer The Kusa/Da 3 has two output paths, seven of which are multiplexed. Selectively connected to the output path of the converter /'I/. Multiplexer/lI3 group Each of the two output paths is arranged to correspond to the output of multiplexer/G3. The buffer storage device / dahiro ~ lhiro 7 is given, so the (-) buffer / lhiro 5 and 5 are capacitors, and 5'/ is powered by a 100011z oscillator /32. The position representing the response from phase detector/37 and voltage detector/3g while and (b) the buffer/da 6 and/or capacitors store the phase and voltage signals. While the sensor 5/ is energized by the /Hz output of the oscillator /3/, the phase detector /37 and a signal representing the output voltage of the voltage detector 13g.

Buffer /++ and /4t! The signal stored in is given to the fixed storage device 15/. However, this ROM is a two-man power table with inputs responsive to the output of timer/36. It serves as a bull index. ROM / j / is ioo.

A buffer stores data representing the output of detector/37 and 13g in response to Hz excitation. After that, timer /3B outputs the signals stored in buffers /4t/ and /’12. Be able to respond. ROM/! ; / is 1000kh excitation versus temperature related to the voltage across the sampling resistor/35 and the phase of the voltage in response to the It serves as an index table. When enabled, ROM/, t/ will be warmed up. generates a multi-bit output signal representing the degree. Multi bit of ROM / j / The output signal is provided to buffer storage 152. Buffer storage fill! f2 is temperature Degree value display m/! It has a multi-bit output that is combined into 3.

Detector /37 in response to the /Hz excitation stored in buffers /da 6 and /da 7. The signal representing the output voltage of 13g is sent from ROM/j4 to the output of timer/36. Therefore, when it becomes available, it is supplied to the ROM. ROM1s is detector 3/upper is logged to correlate the water vapor with the output of detector/37 and 13g. . However, the signals stored in ROM/, t+ are exposed to the detector 3. It does not represent the relative humidity of the atmosphere, but it does reflect the phase of detector/37 and 73g. This is because the voltage output is a function of temperature.

In order to compensate for the temperature dependence of the output representing water vapor of ROM/, t+, R The output of the OM is a ROM/ROM having a second input responsive to the output of the buffer 152. , Buffer storage supplying the /input of S-A/, S-! is coupled to f.

ROM　/　, Ii'A is the water vapor response stored in ROM　/　,S"!I As a two-person index table that relates the answer to the temperature response of ROM /, li-/ Grogrammed. Buffer/s2 and 15. t is ROM /, t /o After being loaded by the signals from Therefore, it is made usable. When enabled, ROM/, 51’A produces an output signal representing relative humidity independent of temperature. ROM/Sb output The force is supplied to the humidity numerical display ft/, t7 through a buffer storage device 73g.

While several specific embodiments of the invention have been described and illustrated, in particular Examples of variations in details of the embodiments illustrated and described may be found in the accompanying! ＃The range of pestle hunting The invention is made without departing from the true spirit and scope of the invention as set forth herein. It is obvious that it can be done. international search report ANNEX To TaE INTERNATIONAL S3 ARCH? , E ? ORτLIN

Claims (97)

[Claims] (1) The presence of a specified gas in the surrounding gas environment is detected using a solid gas adsorption electrolyte dielectric. In the method of detecting by means of a condenser having The gases interact and therefore the ambient gas when no given gas is incident on the dielectric. Compared to the adsorption of There is a change in the adsorption of ambient gas by the dielectric, and one or a given gas is on the dielectric. If it is incident on the dielectric, it will be attracted by the dielectric, and the degree of attraction will depend on the The dielectric is measured by the amount of a predetermined gas that is said condenser while adsorbing gases of the surrounding environment and molecules of one or more predetermined gases. energizing the capacitor to cause a physical adsorption process on the dielectric and , and measuring the molecules adsorbed by said capacitor. The impedance of gas molecules adsorbed by the dielectric is determined by the physisorption process is influenced by the interaction of the the impedance of said capacitor as influenced by its interaction with the gas molecules deposited on it; the derived response is the presence of a given gas. The method characterized in that the method is characterized in that: providing an indication representing the . (2) In the method according to claim 1, the capacitor is energized and supplying a voltage with a sufficiently low amplitude within the range to the opposite electrodes of the capacitor; to measure the physisorption effect and thus not drive gas molecules into the dielectric. The method characterized in above. (3) In the method according to claim 2, the voltage is applied to the space charge of the solid dielectric. AC voltage with a frequency low enough to measure the effect of physisorbed gases on The method characterized in that: (4) In the method according to claim 2, the frequency is less than 30Hz. The method characterized by: (5) In the method according to claim 4, the amplitude of the AC voltage is 1 millivolt R. 100 millivolts RMS. (6) In the method according to claim 2, the amplitude of the voltage is from 1 millivolt to 1 millivolt. 000 millivolt range. (7) In the method described in claim 1, the dielectric material is a rare earth fluoride. The method characterized by: (8) In the method according to claim 7, a contact that interacts with the gas is provided on the dielectric. It is characterized by having a medium and activating oxygen from the surrounding environment that is incident on the dielectric material. Said method. (9) In the method according to claim 8, the catalyst is ZnO, Pd, IrO2, Iron phthalocyanine, cobalt phthalocyanine, Fe2O3, SnO2, and C dS. (10) In the method according to claim 1, the dielectric is lanthanum fluoride. The method characterized in that. (11) In the method according to claim 10, the method includes the step of interacting with the gas on the dielectric. said method, characterized in that there is a catalyst for activating oxygen incident on the dielectric. (12) In the method according to claim 11, the catalyst is ZnO, Pd, IrO. 2, iron phthalocyanine, cobalt phthalocyanine, Fe2O3, SnO2 and Said method, characterized in that it is selected from a group comprising CdS. (13) In the method according to claim 1, the predetermined gas is oxygen, and The catalyst is a group containing IrO2, iron phthalocyanine and cobalt phthalocyanine. said method, characterized in that said method is selected from a group of: (14) In the method according to claim 13, the dielectric and oxygen are kept at room temperature. The method characterized in that: (15) Scope of Desired In the method described in item 1, the predetermined gas is methane; The catalysts that promote the oxidation of methane gas are Pd, ZnO, Fe2O3, and SnO. 2. (16) In the method according to claim 15, the dielectric and methane are heated to room temperature. The method, characterized in that: (17) In the method according to claim 11, the predetermined gas is a gas containing oxygen atoms. and the catalyst is IrO2, Fe phthalocyanine and cobalt phthalocyanine. Said method, characterized in that the cyanine is selected from the group comprising cyanine. (18) In the method according to claim 17, the dielectric and the oxidizing gas are heated at room temperature. The method, characterized in that: (19) In the method according to claim 11, the predetermined gas is a reducing gas, And the catalyst is selected from the group including Pd, ZnO, Fe2O3, and SnO2. The method, characterized in that: (20) In the method according to claim 19, the dielectric material and the reducing gas are at room temperature. The method, characterized in that: (21) In the method according to claim 1, the impedance of the capacitor By correlating the response representing the gas concentration with the predetermined response representing the concentration for a given gas. and a step of measuring the concentration of a predetermined gas in the surrounding gas. The method described above. (22) The presence of a specific gas in the surrounding gas environment can be detected using a solid gas adsorbing electrolyte dielectric. In the method of detecting by a capacitor having an environment, the predetermined gas and the ambient Gases in the surrounding environment interact and therefore Compared to adsorption of surrounding gas, the case where surrounding gas and specified gas are incident on the dielectric material If there is a change in the adsorption of ambient gas by the dielectric and/or if a given gas When a certain gas is incident on an electric body, it is absorbed by the dielectric body, but the absorption The degree of deposition is measured by the amount of a predetermined amount of gas that is incident on the dielectric. The dielectric is exposed to the predetermined gas to reduce the amount of gas in the surrounding environment and/or the predetermined gas. While adsorbing the capacitor, AC excitation is applied to the capacitor to connect the dielectric to the dielectric. causes an adsorption process to occur between molecules of the gas that are incident and thereby adsorbed. The AC impedance of the capacitor is determined by the adsorption process and the dielectric influenced by the interaction with the gas molecules adsorbed by the body, and the adsorption process The said component is influenced by the interaction of the gas molecules adsorbed by the gas and the dielectric. the step of deriving a response representative of the value of the AC impedance of the capacitor; A method as described above, characterized in that the derived response provides an indication of the presence of the predetermined gas. (23) In the method according to claim 22, the AC voltage is generated on the dielectric material. Said method, characterized in that the method has an amplitude that makes it possible to measure the physisorption process. . (24) In the method according to claim 23, the capacitor is energized and the capacitor is energized. An AC voltage having a sufficiently low amplitude within a predetermined range is supplied to the opposite electrode of the capacitor. By measuring the physisorption effect, therefore no chemisorption occurs and the dielectric Only in response to the Van der Waals forces of attraction between the gas and the dielectric that are incident on the Said method, characterized in that the gas is adsorbed by a dielectric. (25) In the method according to claim 24, the amplitude of the AC voltage is 1 millivolt. 100 millivolts. (26) In the method according to claim 23, the AC excitation is a space charge of the dielectric material. AC voltage with a frequency low enough to measure its effect on The method characterized in that. (27) In the method according to claim 26, the frequency is less than 30Hz. The method characterized in that. (28) In the method according to claim 22, the dielectric is a rare earth fluoride. The method characterized in that. (29) In the method according to claim 28, the method includes the step of interacting with the gas on the dielectric. said method, characterized in that there is a catalyst for activating oxygen incident on the dielectric. (30) In the method according to claim 29, the catalyst is ZnO, Pd, IrO. , iron phthalocyanine and cobalt phthalocyanine. The method characterized in that: (31) In the method according to claim 22, the dielectric is lanthanum fluoride. The method characterized in that: (32) In the method according to claim 31, the method includes the step of interacting with the gas on the dielectric. There is a catalyst that is characterized by modifying the oxygen in the surrounding environment that is incident on the dielectric material. The said method. (33) In the method according to claim 32, the catalyst is ZnO, Pd, IrO. , iron phthalocyanine and cobalt phthalocyanine. The method characterized in that: (34) In the method according to claim 22, the predetermined gas is oxygen, and The catalyst is a group containing IrO2, iron phthalocyanine and cobalt phthalocyanine. said method, characterized in that said method is selected from a group of: (35) In the method according to claim 34, the dielectric and oxygen are kept at room temperature. The method characterized in that: (36) In the method according to claim 22, the predetermined gas is methane; The catalyst is selected from the group including Pd, ZnO, Fe2O3, and SnO2. The method characterized in that: (37) In the method described in claim 36, the dielectric and methane are kept at room temperature. The method, characterized in that: (38) In the method according to claim 32, the predetermined gas is an oxidizing gas, and the catalyst includes IrO2, iron phthalocyanine and cobalt phthalocyanine Said method, characterized in that the selection is made from a group. (39) In the method according to claim 38, the dielectric material and the oxidizing gas are heated at room temperature. The method, characterized in that: (40) In the method according to claim 32, the predetermined gas is a reducing gas, The catalyst is selected from a group containing Pd, ZnO, Fe2O3, and SnO2. The method, characterized in that: (41) In the method according to claim 40, the dielectric material and the reducing gas are at room temperature. The method, characterized in that: (42) The method according to claim 22, further comprising: The response representing the impedance of the capacitor is the concentration for a given gas. measuring by correlating with a predetermined response representing the The said method. (43) In the method according to claim 22, the adsorption process is performed by AC voltage. The method is characterized in that the gas is subjected to a chemisorption process. (44) In the method according to claim 43, the AC voltage causes breakdown of the dielectric. It has enough amplitude to cause the capacitor to exhibit diode action without causing The method characterized in that: (45) In the method according to claim 44, the AC The harmonics are generated by the capacitor and the response is due to diode action. Said method, characterized in that it is derived in response to the generated harmonics. (46) In the method according to claim 44, the amplitude of the AC voltage is 0.1 to 3. volt RMS. (47) In the method according to claim 44, the voltage is applied to the space charge of the dielectric material. AC with a frequency low enough to allow measurement of chemisorption processes in The method characterized in that the voltage is applied. (48) In the method according to claim 44, the dielectric is endogenously doped. The method characterized in that: (49) In the method according to claim 44, the dielectric is exogenously doped. The method characterized in that: (50) A capacitor with a solid ionic dielectric exposed to the air with a relative temperature of air a method for measuring with a frequency sensor having first and second predetermined frequency ranges; applying a voltage to the capacitor sensor, the first frequency range and its The amplitude changes the impedance component of the capacitor sensor to the temperature and humidity of the air. capacitor sensor by the second frequency range and its amplitude varied as a function By changing the AC impedance component of the air as a function of air temperature, independent of humidity. further, the method is responsive to the magnitude of the impedance components, respectively. generating first and second responses to voltages in the first and second frequency ranges; and deriving a quantitative measurement of relative humidity in response to an indication of the magnitude of the first and second responses. The method characterized in that it comprises the steps of: (51) In the method according to claim 50, the first and second frequency ranges are The voltage amplitude induced by the molecular dielectric causes field-driven chemisorption onto the dielectric. There is no physical adsorption of molecules in the air by the dielectric. The method characterized in that: (52) In the method according to claim 50, the first and second frequency ranges are The voltage amplitude applied is low enough that only the water vapor and air molecules in the air can reach the dielectric dielectric only in response to the van der Waals forces of attraction between the incoming gas and the dielectric Said method, characterized in that it can be adsorbed by the body. (53) In the method according to claim 52, the first and second frequency ranges are characterized in that the amplitude of the voltage applied is between 1 millivolt and 100 millivolts. Said method. (54) In the method according to claim 52, the first frequency range is sufficiently low. Therefore, the adsorbed water vapor molecules are affected by the change in impedance component in the first frequency range. The method, characterized in that it can be detected by monitoring sex. (55) In the method according to claim 54, the second frequency range is very high. Therefore, it is possible to monitor the physical adsorption induced impedance change at the first frequency. The method characterized in that: (56) In the method according to claim 55, the first frequency range is 30Hz or more. and the second frequency range is between 30Hz and 6kHz. The method described above. (57) The amount of water vapor having polar molecules in the surrounding gas environment is calculated as follows: This method uses a capacitor with a solid electrolyte dielectric that adsorbs molecules. While the dielectric is exposed to the water vapor and adsorbs molecules of the water vapor, energizing said capacitor to measure the physical adsorption process; The impedance of the capacitor is determined by the physisorption process and the interaction with gas molecules in the environment. It is also influenced by the physical adsorption process and the interaction with the gas molecules in the environment. Steps to measure the value of the impedance of said capacitor as affected by the interaction and correlating the measured impedance value with the amount of water vapor. The method characterized in that: (58) In the method according to claim 57, the capacitor is energized and When gas molecules at the boundary are adsorbed in response to van der Waals forces, the condenser By supplying the counter electrode with an AC voltage having a low frequency in a predetermined range. The method characterized in that the physical adsorption effect is measured. (59) In the method according to claim 58, the frequency is likely to be on the order of 1 Hz. said method, wherein the amplitude is in the range of about 10-30 millivolts. (60) A condenser with solid electrolyte dielectric that reduces reducing gas molecules in the surrounding gas environment. In the detection method using a capacitor, the dielectric material interacts with gas molecules to generate a dielectric covered by a metallic structure that generates ions of molecules that can be adsorbed by the body , this structure is configured such that the dielectric is exposed to the reducing gas and ambient gas environment. However, if the capacitor is exposed to an environment of reducing gas molecules and ambient gas, energizes the capacitor to initiate an adsorption process between the dielectric and the ions. The impedance of the capacitor is determined by the adsorption process and the step of generating the capacitor. However, the adsorption process and the interaction of said ions are affected by a response representing the value of the impedance of said capacitor as affected by the interaction This derived response gives an indication of the presence of reducing gas molecules. The above method, characterized in that: (61) Contains a solid ionic dielectric exposed to air relative humidity and temperature The method uses a capacitor sensor to measure the impedance component of the air. A first excitation of the sensor causes the first excitation of the sensor to be a function of temperature and relative humidity. monitoring the impedance component and the A of the sensor at a frequency in a predetermined range; monitoring the AC impedance of the sensor in response to the C excitation. , the first excitation does not cause field-driven chemisorption of gas molecules by the dielectric. The effect of physical adsorption of gas molecules by dielectrics is measured and monitored in response to AC excitation. Although the observed AC impedance component provides a measurement of temperature independent of relative humidity, and a value representing the impedance component monitored in response to both said excitation. 3. A method as described above, characterized in that it comprises the step of combining. (62) In the method according to claim 61, the first excitation is water vapor in the air. AC at another range of frequencies low enough that molecules can be sensed, and for a given The range of frequencies is characterized by being high enough to make the adsorbed molecules in the dielectric insensible. The method described above. (63) In the method according to claim 62, the other frequency range is 30Hz or more. and the predetermined frequency range is between 30Hz and 6kHz. The said method. (64) In the method according to claim 62, another and predetermined frequency range The voltage amplitude at is sufficiently low that the molecules in the air in the dielectric are Said method, characterized in that it can be measured only by Waals surface forces. (65) A capacitor containing a solid ionic dielectric exposed to the temperature of a gas A method of measuring by means of a sensor, wherein the sensor's current is activated in response to AC excitation of the sensor. The AC excitation consists of monitoring the impedance components over a predetermined frequency range and It has a predetermined amplitude range, and the predetermined amplitude range corresponds to the electric field drive of gas molecules on the dielectric material. Enables physical adsorption of gas molecules by the dielectric without causing dynamic chemical adsorption. and the given frequency range is high enough that the dielectric space charge cannot follow it. monitored impedance that is active and responsive to AC excitation in a predetermined range. said method, characterized in that the temperature component provides a measurement of temperature independent of relative humidity. . (66) The amount of gas with polar molecules in the surrounding gas environment is the amount of gas in the environment. A method of measurement by a capacitor sensor containing a solid ionic dielectric exposed to In response to excitation of the sensor by a voltage within a predetermined amplitude range, the impedance of the sensor is - The amplitude of the AC excitation is controlled by the dielectric. The physics of gas molecules by dielectrics without causing electric field-driven chemisorption of gas molecules. The monitored impedance component, which allows adsorption and responds to excitation, is characterized in that it provides a measurement of the amount of gas having polar molecules in a gaseous environment Said method. (67) A device for detecting the presence of a predetermined gas in the environment, which is a fixed a capacitor having a body gas adsorption electrolyte dielectric, the predetermined gas and Gases in the surrounding environment interact, so if a given gas does not enter the dielectric Compared to the adsorption of the specified gas, the ambient gas and the specified gas are incident on the dielectric. If the adsorption of ambient gas on the dielectric varies and/or if a given gas When it is incident on an electric body, it is attracted by the dielectric, but the degree of attraction depends on the dielectric. The device is determined based on the amount of a predetermined gas that enters the electric body, and the device While exposed to the predetermined gas, an AC voltage is applied to the capacitor to reduce the surrounding environment. means for adsorbing molecules of an ambient gas and/or a predetermined gas; energizes the capacitor and thus impinges on said dielectric and is attracted thereby. An adsorption process occurs between the gas molecules and the impedance of the capacitor. is influenced by the adsorption process and the interaction of the gas molecules adsorbed by the dielectric. and the adsorption process and the gas molecules adsorbed by the dielectric. represents the value of the AC impedance of said capacitor as affected by the interaction means for deriving a response, the derived response being an indication of the presence of a predetermined gas. The device characterized in that it provides: (68) In the device according to claim 67, the means for deriving the response is a condenser. The current through the sensor and the voltage across the capacitor and the amplitude of the current through the capacitor The apparatus characterized in that it includes means for detecting a phase difference between. (69) In the device according to claim 67, the AC applying means applies to the capacitor. including means for changing the applied AC amplitude, and still responsive to the AC amplitude. The AC response for different widths is a function of the variable AC amplitude applied to the capacitor. Data processing to compare with its stored values for different species and concentrations of gas as The device, characterized in that it also includes means. (70) In the device according to claim 69, the AC applying means applies to the capacitor. including means for changing the applied AC frequency, and still responsive to the AC frequency. A variable AC frequency applied to a capacitor allows the AC response to different frequencies. data comparing its stored values for different species and concentrations of gas as a function of the number of The device characterized in that it includes data processing means. (71) In the device according to claim 67, the AC applying means applies to the capacitor. including means for changing the applied AC frequency, and still responsive to the AC frequency. A variable AC frequency applied to a capacitor allows the AC response to different frequencies. data comparing its stored values for different species and concentrations of gas as a function of the number of The device characterized in that it includes data processing means. (72) In the device according to claim 67, the AC applying means applies to the capacitor. means for changing the applied AC amplitude, some of which are capacitors. The diode action is caused by the AC applied to the capacitor. A that derives harmonics of a frequency, but also derives derived harmonics and harmonics The above method is characterized in that it comprises means for identifying the predetermined gas in response to the C voltage. Device. (73) In the device according to claim 67, the AC voltage is used for chemisorption process. The device characterized in that it generates. (74) In the device according to claim 67, the AC voltage is used for the physical adsorption process. The device characterized in that it generates. (75) A device for detecting the presence of a plurality of predetermined gases in a surrounding gas environment, , comprising a plurality of capacitors having a solid gas adsorbing electrolyte dielectric environment; Different types of gas and ambient environment may have different conditions in different types of capacitors. so that each capacitor has a preference for a separate one of the gases. The interaction of each capacitor in response to Compared to adsorption of ambient gas, ambient gas and specified gas are incident on the dielectric. If the adsorption of ambient gas by each dielectric varies and/or is incident on a dielectric, it will be attracted by the dielectric, and the degree of adsorption will depend on the dielectric. It is measured by the amount of a predetermined gas incident on the electric body, and the above-mentioned applying an AC voltage to the capacitor while the dielectric is exposed to the predetermined gas; AC power The pressure energizes the capacitor and is therefore incident on the dielectric and the dielectric. An adsorption process occurs between the molecules of the gas adsorbed by the condenser. The AC impedance of the sensor is determined by the adsorption process and the gas molecules adsorbed by the dielectric. influenced by interactions, and adsorbed by adsorption processes and dielectrics. the AC impedance of the capacitor as influenced by the interaction of gas molecules; The device is equipped with means for deriving a response representing the value of said device, characterized in that it gives an indication of the presence of. (76) In the device according to claim 75, the adsorption process is performed by an AC voltage. The device described above is characterized in that the process uses a physical adsorption process. (77) In the device according to claim 76, the capacitor is energized and In response to the van der Waals force of attraction between a gas incident on an electric body and a dielectric body, A with a sufficiently low amplitude in a predetermined range where gas is adsorbed by the dielectric. A physical adsorption effect is generated by supplying C voltage to the opposite electrode of the capacitor. The device as described above. (78) In the device according to claim 75, the adsorption process is performed by an AC voltage. The device described above is characterized in that the process is a chemisorption process. (79) In the device according to claim 78, the AC voltage causes breakdown of the dielectric. amplitude sufficient to cause the capacitor to exhibit diode action without causing The device characterized in that it has: (80) Capacitor with solid rare earth fluoride electrolyte dielectric and first and second a gas detector comprising electrodes spaced apart from each other, one side of said dielectric being opposite to said first side; covered by an electrode, said first electrode detecting said dielectric voltage as a function of the gas to be detected. The above characterized in that it contains a catalyst that affects charged particles in the body. gas detector. (81) In the gas detector according to claim 80, the catalyst is ZnO, Pd, IrO2, iron phthalocyanine, cobalt phthalocyanine, Fe2O3, SnO2 and CdS. (82) Desired Range In the gas detector described in item 80, the catalyst is the said gaseous environment characterized in that it is porous to the molecules in the gaseous environment in which it is exposed; gas detector. (83) In the gas detector according to claim 80, the first electrode has a gap. is formed as a grid and the detector is positioned in the gas environment. The gas detector is characterized in that the gas detector allows a gas to be incident on the one surface. (84) In the gas detector according to claim 80, the dielectric is a self-supporting unit. formed as a monocrystalline slice, the substrate is formed from a metal with high conductivity, and is not bonded to the dielectric, and the metal layer is on one side of the substrate and on the other side of the dielectric. sandwiched between and bonded to the two sides, said layer being made of a highly conductive metal. said gas, characterized in that said gas is formed from said gas and adheres to said dielectric and said substrate; Detector. (85) In the gas detector according to claim 84, the dielectric is lanthanum fluoride. The gas detection device is characterized in that the substrate is copper and the layer is silver. vessel. (86) In the gas detector according to claim 80, the dielectric is a thin film layer. A metal substrate is formed, and a layer of a highly conductive degenerate semiconductor is provided on the substrate. The semiconductor layer has thermal expansion properties different from that of the dielectric, and the metal layer The means is sandwiched between opposing surfaces of the semiconductor layer and the dielectric layer to The gas detector is characterized in that it provides thermal expansion matching to the gas detector. (87) In the gas detector according to claim 86, the substrate is copper and a semiconductor The body layer is silicon, the dielectric layer is lanthanum fluoride, and the metal layer means first and second layers, the first layer being chromium and having a silicon layer; and the second layer is copper and has a second surface adjacent to the second surface of the dielectric. The gas detector characterized in that it has a second surface that is in contact with the second surface. (88) In the gas detector according to claim 80, the rare earth fluoride is very is sensitive to moisture, and a solid hydrophilic salt is suspended above the first electrode so that the detector It adsorbs water vapor molecules in the environment in which it is located, and thus the molecules become dielectric. The gas detector described above is characterized in that it is desired to enter the body. (89) In the gas detector according to claim 88, the rare earth fluoride is The gas detector is characterized in that it is a lantern. (90) In the gas detector according to claim 80, the rare earth fluoride is very is sensitive to moisture and a hydrophobic layer is suspended on the one side of the dielectric so that the detector is positioned It repels water vapor molecules in the environment in which it is placed, thus making the molecules dielectric. The gas detector is characterized in that it does not enter the gas detector. (91) In the gas detector according to claim 90, the rare earth fluoride is The gas detector is characterized in that it is a lantern. (92) Solid rare earth fluoride electrolyte formed as a self-supporting single crystal slice A gas detector comprising a capacitor having a dielectric and first and second spaced apart electrodes. one surface of the dielectric is covered with the first electrode; a metal layer sandwiched between and bonded to a surface of the substrate and another surface of the dielectric. The layer is made of a metal with high conductivity and includes a dielectric and a base. The gas detector is bonded to a plate. (93) In the gas detector according to claim 92, the dielectric is lanthanum fluoride. The gas detection device is characterized in that the substrate is copper and the layer is silver. vessel. (94) Condensers with highly moisture-sensitive electrolyte dielectrics of solid rare earth fluorides a gas detector comprising a first and a second spaced apart electrodes; one side of which is covered by the first electrode, further suspended on the first electrode, The detector is equipped with a solid hydrophilic salt that adsorbs water vapor molecules in the environment in which it is positioned. The gas detector is characterized in that the molecules are not incident on the dielectric material. . (95) In the gas detector according to claim 94, the rare earth fluoride is The gas detector is characterized in that it is lanthanum chloride. (96) Condensers with highly moisture-sensitive electrolyte dielectrics of solid rare earth fluorides and first and second spaced apart electrodes, the gas detector comprising: a first and second spaced apart electrode; one surface of the dielectric is covered by the first electrode, and a dielectric layer is formed on the first surface of the dielectric. , with a hydrophobic layer that repels water vapor molecules in the environment in which the detector is positioned. The gas detector is characterized in that the molecules are not incident on the dielectric material. . (97) In the gas detector according to claim 96, the rare earth fluoride is fluorinated. The gas detector is characterized in that it is powered by a lanthanum.